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    • 8. 发明专利
    • RESIN SEALED TYPE SEMICONDUCTOR DEVICE
    • JPS62210658A
    • 1987-09-16
    • JP5252686
    • 1986-03-12
    • HITACHI LTDHITACHI MICROCUMPUTER ENG
    • MASUDA MASACHIKAOKANO KUMIKO
    • H01L23/50H01L21/48H01L23/28
    • PURPOSE:To obtain a resin packaged type semiconductor device characterized by high packaging reliability, by providing dimples having an inverted taper structure, in which a coaxial shape is provided, the thinning angle becomes smaller toward the inside and plurality of steps are provided, in the surface of a tab by a plurality of pressing processes. CONSTITUTION:Many dimples 9 are formed at the central part of a metal plate 10, i.e., a part where a tab 5 and an inner lead 4a are formed by press work. The dimples are formed through two pressing processes. At the first press work, a wedge shaped metal tool 11, which has a relatively broad taper angle, is pressed to the specified position of the metal plate 10. Then, the second pressing process is performed by a wedge metal tool 12, whose taper angle is relatively narrow. Each dimple 9 formed in this way has a two-step structure, which has the inverse taper surface formed by the wedge shaped metal tool 11 having the large taper angle, and inverse taper surface formed by the wedge shaped metal tool 12 having the small taper angle. Warping is not yielded in the frame material at the time of the pressing, and the structure of the deep dimples 9 can be obtained.