会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS60200535A
    • 1985-10-11
    • JP5611084
    • 1984-03-26
    • HITACHI LTDHITACHI MICROCUMPUTER ENG
    • SUZUKI AKIRAHAGIWARA YASUHISA
    • H01L21/60
    • PURPOSE:To improve the reliability of a semiconductor device by forming a bonding pad of a pellet of a mixture material of glass and metal to electrically conduct the internal wirings of the pellet and to simultaneously strongly bond with a final passivation film. CONSTITUTION:A bonding pad 4 of a pellet 3 is formed, for example, of a mixture material of glass and ultrafine shape gold. A final passivation film 10 is etched at the prescribed position to open a hole, aluminum wirings 9 are partly exposed as a bonding pad forming electrodes. Then, titanium 11a is coated as the first layer on the bonding pad forming electrode, and palladium 11b is coated as the second layer, the unnecessary portion of the metal layer is removed by etching to form a primary metal layer 11. Further, the mixture material of the glass-gold is so coated on the layer 11 as to enclose the layer 11 in the state that the end is contacted with the surface of the passivation film around the layer 11, thereby forming the pad 4.