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    • 3. 发明专利
    • SOLDERING DEVICE
    • JPH06142903A
    • 1994-05-24
    • JP29480492
    • 1992-11-04
    • HITACHI LTDHITACHI TOKYO ELECTRONICS
    • SUZUKI JUNICHI
    • B23K1/08H01L23/50
    • PURPOSE:To reduce the generation of the short circuit or the like of a lead and to improve the yield of product by providing a means for interrupting the contact of at least a portion which is not used for solder dip of a molten solder ejected from an ejection hole with the air. CONSTITUTION:Solder coating is executed by bringing the outer lead of a semiconductor device 7 into contact with a molten solder which is ejected from the ejecting hole 6 of an ejecting part 5. A cover 10 for interrupting the contact of at least the portion which is not used for solder dip of the molten solder with the air is provided. An inert gas is introduced into a solder dip part. When the semiconductor device is not provided, a driving mechanism for moving the cover 10 so as to cover the entire area of the upper part of the ejection hole is provided. The cover 10 is made of such a material of titanium, tungsten, or molybdenum. Thus, the generation of oxide due to the reaction between solder and oxygen is reduced and the generation of the short circuit or the like of the lead is prevented.
    • 6. 发明专利
    • CLEANING DEVICE AND CLEANING METHOD USING THE SAME
    • JPH11330106A
    • 1999-11-30
    • JP15355798
    • 1998-05-18
    • HITACHI LTDHITACHI TOKYO ELECTRONICS
    • TOYOOKA MORIOSUZUKI JUNICHI
    • H01L21/304H01L21/50
    • PROBLEM TO BE SOLVED: To reusing of a cleaning solution by circulating and reproducing it by simple structure and operation management. SOLUTION: The cleaning device is provided with a water cleaning tank 21 storing pure water 22 for cleaning a TCP.IC carrier 1, a pump 32 for pumping out the pure water 22 from the tank 21, an evaporation tank 34 for storing and evaporating the pure water 22 pumped out from the pump 32, a condensate pump 40 for storing and condenstating vapor 27 from the tank 34, an ejector pump 42 for pumping up condensated water 28 in the tank 40 by reducing pressure, and a vacuum tank 52 for storing pumped-up condensed water and supplying the water to the tank 21. A steam forced exhausing route 54 is connected between the tank 52 and the discharge route 33 of the pump 32. Consequently, pure water is cleaned by steam, returned to the tank 21 and circulatingly reused. When the pressure of the evaporation tank 34 is reduced, a boiling point is lowered, and energy efficiency is improved. Reduction in pump efficiency can be prevented by supplying pure water to the vacuum tank 52 and discharing steam.