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    • 8. 发明专利
    • LIQUID CRYSTAL DISPLAY DEVICE
    • JP2001188213A
    • 2001-07-10
    • JP37416899
    • 1999-12-28
    • HITACHI LTD
    • NAKANO YASUSHIORITSUKI RYOJI
    • G01R31/00G02F1/13G02F1/1345
    • PROBLEM TO BE SOLVED: To inspect disconnection of signal wiring of a thin film transistor in a manufacturing process of a high definition display liquid crystal panel of which the display area is split into two upper and lower parts. SOLUTION: In a thin film transistor substrate forming a liquid crystal panel of which the display area is split into two parts of a top display area AR-U and a bottom display area AR-D to be driven at the same time, the presence or absence of disconnection is inspected by whether or not currents are flowing through top and bottom drain lines, by connecting an inspection purpose thin film transistor, at the time of inspecting disconnection, across a top side drain line DL-U and a bottom side drain line DL-D split in the center part of the top and bottom display areas, applying such voltages to a common gate line CGL of the inspection purpose thin film transistor CTFT and across the top side drain line DL-U and the bottom side drain line DL-D as to operate the inspection purpose thin film transistor CTFT, and thereby bringing the top drain lines DL-U and the bottom drain line into conduction with each other.
    • 9. 发明专利
    • SUBSTRATE WASHING METHOD AND SUBSTRATE WASHING DEVICE
    • JPH11221532A
    • 1999-08-17
    • JP2410398
    • 1998-02-05
    • HITACHI LTD
    • NAKANO YASUSHIKANEKO TOSHITERUNISHIMURA YUICHIUCHIDA MORIO
    • B08B3/08C11D7/04H01L21/304
    • PROBLEM TO BE SOLVED: To drastically decrease the amt. of the static electricity to be generated and to prevent the occurrence of a defect occurring in static electricity, as metallic wiring dissolution, by using the washing water prepd. by dissolving a salt not contg. metal elements or gaseous carbon dioxide at a high concn. into ultrapure water to lower the resistivity thereof. SOLUTION: This washing device senses the flow rate of the ultrapure water flowing into a washing water pipe 110a by a flow meter 111. Ammonium carbonate water which is the salt not contg. the metal elements in a tank 113 is intermittently injected by an injection pump 114 in accordance with the flow rate into a washing water pipe 110a. At this time, if the flow rate of the ultrapure water sensed by the flow meter 111 is large, the intermittent intervals are made shorter by the control of a controller 115 and if the flow rate is small, the intermittent intervals are made longer to a maintain the concn. of the ammonium carbonate which is the washing water constant. The setting of the concn. is executed by inputting desired electroconductivity into the controller 115. The information from an electroconductivity meter 112 is fed back to the injection pump 114 to maintain the desired electroconductivity of the washing water. For example, a static mixer 117 is disposed between the injection pump 114 and the electroconductivity meter 112 to well mix the ultrapure water and the ammonium carbonate water.