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    • 4. 发明专利
    • MANUFACTURE OF SEMICONDUCTOR DEVICE; PLASMA TREATMENT APPARATUS
    • JPH04162622A
    • 1992-06-08
    • JP28700490
    • 1990-10-26
    • HITACHI LTD
    • MIYAZAKI HIROSHIHONMA YOSHIOMATSUMURA YASUHIDEHARADA KUNIOKANETOMO MASABUMISUZUKI ISAO
    • H01L21/302H01L21/3065H01L21/3205H01L21/3213
    • PURPOSE:To restrain the temperature of a substrate from being raised and to keep the temperature of the substrate definite during an etching operation by a method wherein a plasma treatment apparatus is used, the surface of the substrate is heated to a temperature which is equal to or higher than that of an electrode, a high frequency is applied to the electrode and the substrate is treated. CONSTITUTION:An oxide film 3, a copper film 4 and a mask 5 which is composed of an oxide film on which a pattern has been transcribed are formed on the surface of a silicon wafer 2. A polyimide film 6 is formed on the rear of the silicon wafer 2. A substrate 1 is placed inside an apparatus. The heating air from a heater 16 for gas heating use is supplied to a heating-gas passage 13 inside an electrode 12; the temperature of an electrode surface plate 11 is kept. Silicon tetrachloride as a reaction gas is supplied to the inside of an etching chamber 10 which has been evacuated to produce a vacuum; the pressure of the etching chamber is adjusted. Electric power is supplied to an infrared lamp 28 from an infrared-lamp power supply 27; the substrate 1 is heated. When the substrate 1 reaches a prescribed temperature, the output of the power supply 27 becomes zero by a signal from a temperature indicator 23; electric power is supplied to the electrode 12 from a high-frequency power supply 26.
    • 6. 发明专利
    • STATOR FOR ROTARY ELECTRIC MACHINE
    • JPS62123938A
    • 1987-06-05
    • JP26120285
    • 1985-11-22
    • HITACHI LTD
    • SUZUKI ISAO
    • H02K5/04
    • PURPOSE:To improve various operating properties, by eliminating the upper half section of a stator to form an easily removable protection cover, and by obtaining much working space on the upper section of the stator. CONSTITUTION:A stator consists of a stator integrated with a ring frame 1 and without an upper half section, namely, with lower half section ring-formed half ring frame 2', and of an easily removable protection cover 10. When the protection cover 10 is removed, then the upper section of a commutator 5 is exposed, and much working space is obtained, and the various works of wiring in a motor, and the like are facilitated. Especially regarding the work of machining the contact surface of the commutator 5, after one of brush metal fittings 6 is removed, the fitting and operating property of the machining edge via a fitted edge fitting stand is facilitated.
    • 7. 发明专利
    • SHAFT SEALING DEVICE OF PUMP
    • JPS61207896A
    • 1986-09-16
    • JP4867685
    • 1985-03-12
    • HITACHI LTD
    • SUZUKI ISAO
    • F16J15/18F04D29/12
    • PURPOSE:To prevent the occurrence of a seizure trouble and a breakage trouble, by a method wherein a seal ring is changed through a change in the inner pressure of a shaft sealing part, and in case the inner pressure is a positive pressure, pumped up water can be fed to the shaft sealing part, and in case it is negative pressure, lubricant can be fed to the shaft sealing part. CONSTITUTION:In case a pressure in a stuffing box 2, i.e., the inner pressure of a shaft sealing part is a positive pressure, a positive pressure P1 is exerted on the under surface of a seal ring 3, i.g., an end surface 3f, and it is deformed until it is forced into contact with the outer peripheral surface of a rotary shaft 6 to form a shaft sealing part 12, and an end surface 3g, located opposite to the end surface 3f, is brought into contact with a cover plate 10 to enclose a lubricant chamber 4. In this case, the shaft sealing part 12 is lubricated by pumped up water in the stuffing box 2. In case the inner pressure of the shaft sealing part is a negative pressure, the seal ring 3 is attracted by means of a negative pressure P2, the end surface 3g is deformed until it is brought into contact with the outer peripheral surface of the rotary shaft 6 to form a shaft sealing part 13, and is brought into contact with the cover plate 10. In this case, a lubricant 11 in a lubricant chamber 4 is pressed by an atmospheric pressure introduced through an air hole 2f and is fed to the interior of the shaft sealing part 13 to perform excellent lubrication.