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1. 发明专利

DE69829625T2 未知
公开(公告)号：DE69829625T2
公开(公告)日：2005-09-15
申请号：DE69829625
申请日：1998-11-09
申请人： HITACHI LTD , HITACHI ENG CO LTD , HITACHI KYOWA ENGINEERING CO
发明人： IRIE KAZUYOSHI , MORI TOSHIHIRO , YOKOYAMA HISAO , TOMIYAMA TAKAYUKI , TAKANO TOSHIHIDE , TAMATA SHIN , KANNO SHUICHI
IPC分类号： B01D53/86 , B01D53/14 , H01L21/00
摘要： An exhaust gas containing a perfluoride compound (PFC) and SiF4 is conducted into a silicon remover and contacted with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700 DEG C by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 by the catalyst. The exhaust gas containing HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In accordance with the present invention, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.

2. 发明专利

DE69624625D1 未知
公开(公告)号：DE69624625D1
公开(公告)日：2002-12-12
申请号：DE69624625
申请日：1996-06-14
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , A62D3/00
摘要： A method for treating organohalogen compound by destroying the organohalogen compound effectively to make it harmless is provided. The supplied amounts of the organohalogen compound, carrier gas such as air, and steam are controlled, these gases are heated at a temperature in a designated range by combustion of hydrocarbon fuel. The exhaust gas after the catalytic destruction is cooled in a container having the catalyst. The exhaust gas after the catalytic destruction passes through an apparatus for treating exhaust gas and undestroyed organohalogen compound is adsorbed by an adsorbing agent. The exhaust gas is desorbed and recovered during the operation of the catalyst, and the undestroyed organohalogen compound is destroyed by the catalyst. The destruction efficiency of organohalogen compounds is increased and the durability of the apparatus for destruction is improved.

3. 发明专利

CA2179076A1 Method for Treating Organohalogen Compound, and an Apparatus Thereof 未知
公开(公告)号：CA2179076A1
公开(公告)日：1996-12-15
申请号：CA2179076
申请日：1996-06-13
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , B01D53/70
摘要： A method for treating an organohalogen compound by destroying the compound harmlessly supplies the organohalogen compound, a carrier gas such as air, and steam in controlled amounts. These gases are heated to a temperature in a designated range by combustion of hydrocarbon fuel. The exhaust gas after catalytic destruction is cooled in a container having the catalyst. This exhaust gas passes through apparatus for treating undestroyed organohalogen compound by adsorption. The exhaust gas is desorbed and recovered during the operation of the catalyst, and the undestroyed compound is destroyed by the catalyst. The arrangement increases the efficiency of the destruction of organohalogen compounds and the durability of the apparatus employed.

4. 发明专利

NO962482L 未知
公开(公告)号：NO962482L
公开(公告)日：1996-12-16
申请号：NO962482
申请日：1996-06-12
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , B01D53/70
摘要： A method for treating organohalogen compound by destroying the organohalogen compound effectively to make it harmless is provided. The supplied amounts of the organohalogen compound, carrier gas such as air, and steam are controlled, these gases are heated at a temperature in a designated range by combustion of hydrocarbon fuel. The exhaust gas after the catalytic destruction is cooled in a container having the catalyst. The exhaust gas after the catalytic destruction passes through an apparatus for treating exhaust gas and undestroyed organohalogen compound is adsorbed by an adsorbing agent. The exhaust gas is desorbed and recovered during the operation of the catalyst, and the undestroyed organohalogen compound is destroyed by the catalyst. The destruction efficiency of organohalogen compounds is increased and the durability of the apparatus for destruction is improved.

5. 发明专利

DE69829625D1 未知
公开(公告)号：DE69829625D1
公开(公告)日：2005-05-12
申请号：DE69829625
申请日：1998-11-09
申请人： HITACHI LTD , HITACHI ENG CO LTD , HITACHI KYOWA ENGINEERING CO
发明人： IRIE KAZUYOSHI , MORI TOSHIHIRO , YOKOYAMA HISAO , TOMIYAMA TAKAYUKI , TAKANO TOSHIHIDE , TAMATA SHIN , KANNO SHUICHI
IPC分类号： B01D53/86 , B01D53/14 , H01L21/00
摘要： An exhaust gas containing a perfluoride compound (PFC) and SiF4 is conducted into a silicon remover and contacted with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700 DEG C by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 by the catalyst. The exhaust gas containing HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In accordance with the present invention, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.

6. 发明专利

DE69624625T2 未知
公开(公告)号：DE69624625T2
公开(公告)日：2003-09-11
申请号：DE69624625
申请日：1996-06-14
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , A62D3/00
摘要： A method for treating organohalogen compound by destroying the organohalogen compound effectively to make it harmless is provided. The supplied amounts of the organohalogen compound, carrier gas such as air, and steam are controlled, these gases are heated at a temperature in a designated range by combustion of hydrocarbon fuel. The exhaust gas after the catalytic destruction is cooled in a container having the catalyst. The exhaust gas after the catalytic destruction passes through an apparatus for treating exhaust gas and undestroyed organohalogen compound is adsorbed by an adsorbing agent. The exhaust gas is desorbed and recovered during the operation of the catalyst, and the undestroyed organohalogen compound is destroyed by the catalyst. The destruction efficiency of organohalogen compounds is increased and the durability of the apparatus for destruction is improved.

7. 发明专利

NO962482A 未知
公开(公告)号：NO962482A
公开(公告)日：1996-12-16
申请号：NO962482
申请日：1996-06-12
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , B01D53/70
CPC分类号： A62D3/38 , A62D3/20 , A62D3/35 , A62D3/37 , A62D2101/22 , A62D2203/04 , A62D2203/10 , B01D53/8662 , Y02C20/30

8. 发明专利

NO962482D0 未知
公开(公告)号：NO962482D0
公开(公告)日：1996-06-12
申请号：NO962482
申请日：1996-06-12
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： TAMATA SHIN , OHASHI SATORU , TAKANO TOSHIHIDE , YOKOYAMA HISAO , MORI TOSHIHIRO
IPC分类号： B01D53/14 , A62D101/22 , B01D53/86 , B01D
摘要： A method for treating organohalogen compound by destroying the organohalogen compound effectively to make it harmless is provided. The supplied amounts of the organohalogen compound, carrier gas such as air, and steam are controlled, these gases are heated at a temperature in a designated range by combustion of hydrocarbon fuel. The exhaust gas after the catalytic destruction is cooled in a container having the catalyst. The exhaust gas after the catalytic destruction passes through an apparatus for treating exhaust gas and undestroyed organohalogen compound is adsorbed by an adsorbing agent. The exhaust gas is desorbed and recovered during the operation of the catalyst, and the undestroyed organohalogen compound is destroyed by the catalyst. The destruction efficiency of organohalogen compounds is increased and the durability of the apparatus for destruction is improved.

9. 发明专利

JPS63180083A AUTOMATIC REGULATOR FOR VACUUM DEGREE OF CONDENSER 失效
公开(公告)号：JPS63180083A
公开(公告)日：1988-07-25
申请号：JP989287
申请日：1987-01-21
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： YOKOYAMA HISAO , MIYATA USHIO
IPC分类号： F28B11/00
摘要： PURPOSE:To automatically turn down an air inlet valve to save power and to secure an appropriate vacuum degree of the condenser by providing means for computing a cooling water temperature signal and a plant load signal, and means for setting the opening degree of the air inlet valve due to a deviation between a pressure setter and a pressure detector. CONSTITUTION:A temperature signal 6 of a temperature detector 5 mounted on a cooling water pie 4, a turbine load signal of a pressure detector 8, and a condenser pressure signal 16 from a pressure detector 15 mounted on a condenser 1, are inputted into a controller 100. An opening degree signal 11 is generated from the controller 100, and is converted into an air signal by an electropneumatic converter 12 thereby to control the opening degree of an air inlet valve 12. By these procedures, since the opening degree of the air inlet valve 3 between the condenser 1 and a vapor type air extractor 2 can be automatically set, it is possible to secure the power saving and the appropriate vacuum degree of the condenser.

10. 发明专利

JP2007029790A Treatment method for perfluoride-containing exhaust gas and treatment apparatus 有权
标题翻译：含氟化物包含排气和处理设备的处理方法
公开(公告)号：JP2007029790A
公开(公告)日：2007-02-08
申请号：JP2005213040
申请日：2005-07-22
申请人： Hitachi Eng Co Ltd , Hitachi Ltd , 日立エンジニアリング株式会社 , 株式会社日立製作所
发明人： IRIE KAZUYOSHI , TAMADA SHIN , KUROKAWA HIDEAKI , YOKOYAMA HISAO
IPC分类号： B01D53/70 , B01D53/68 , B01D53/86
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To enhance reliability by maintaining an exhaust gas treatment ability at maintenance/inspection or the like when a perfluoride in the exhaust discharged from a production process apparatus for handling the perfluoride is decomposed/treated. SOLUTION: An auxiliary perfluoride decomposition apparatus 3 is provided on one or a plurality of perfluoride decomposition apparatuses 1, 2 for treating the exhaust gas containing the perfluoride, the object to be treated. When a treatment function of at least one of the perfluoride decomposition apparatuses is reduced, at least a part of the exhaust gas introduced to the perfluoride decomposition apparatus whose the treatment function is reduced is treated by the auxiliary perfluoride decomposition apparatus. Thereby, reliability can be enhanced by maintaining the exhaust gas treatment ability at maintenance/inspection or the like. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过在从用于处理全氟化物的生产加工装置排出的排气中的全氟化物被分解/处理时，通过维持/检查等维持排气处理能力来提高可靠性。解决方案：在一个或多个全氟化物分解装置1,2上设置辅助性全氟化物分解装置3，用于处理含有全氟化物的废气，即被处理物。当减少全氟化物分解装置中的至少一种的处理功能时，通过辅助全氟化物分解装置处理引入到处理功能降低的全氟化物分解装置的排气的至少一部分。因此，通过维持/检查等的排气处理能力可以提高可靠性。版权所有（C）2007，JPO＆INPIT

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