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    • 2. 发明专利
    • SEMICONDUCTOR DEVICE
    • JP2003132679A
    • 2003-05-09
    • JP2001324458
    • 2001-10-23
    • HITACHI LTDHITACHI DEVICE ENG
    • AKIBA TAKESADAHORIGUCHI SHINJI
    • G11C11/407G11C11/409H01L21/822H01L27/04H02M3/07
    • PROBLEM TO BE SOLVED: To realize an internal boosting circuit in which output voltage of external positive power source voltage is constant and is operated stably in a wide voltage range from low voltage to high voltage, also reliability of elements is secured, and a semiconductor chip. SOLUTION: One voltage drop circuit 12 and two boosting circuits 13, 14 are provided in a chip, the voltage drop circuit 12 generates constant voltage VARY from external voltage VDD and supplies voltage to a bit line, the first boosting circuit 13 supplies external voltage VDD, generates internal boosting voltage VPPL, and supplies voltage to a pre-charge circuit of a bit line, the second boosting circuit 14 supplies internal boosting voltage VPPL, generates internal boosting voltage VPPH, and supplies voltage to a word line. Voltage difference between VPPL and VARY is assumed to constant, and adjusted higher than a threshold value of MOS constituting the pre-charge circuit, and voltage difference between VPPH and VARY is assumed to constant, and adjusted higher than a threshold value of MOS constituting a memory cell.