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1. 发明公开

EP1207378A4 SEMICONDUCTOR PRESSURE SENSOR AND PRESSURE SENSING DEVICE 有权
标题翻译：半导体压力传感器和装置检测打印
公开(公告)号：EP1207378A4
公开(公告)日：2002-11-13
申请号：EP99938551
申请日：1999-08-20
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： SATO SHINYA , SHIMADA SATOSHI , WATANABE ATSUO , ONOSE YASUO , KURYU SEIJI , MIYAZAKI ATSUSHI , HORIE JUNICHI , MONMA NAOHIRO
IPC分类号： B81B3/00 , B81B7/00 , G01L7/08 , G01L9/00 , H01L21/00 , G01L9/12 , H01L29/84
CPC分类号： B81C1/00333 , B81B2201/0264 , B81B2203/0127 , B81C1/00293 , B81C2203/0145 , G01L9/0042 , G01L9/0073
摘要： A pressure sensor produced by etching a sacrificial layer. The sensor has an etching channel sealing structure which is excellent in water nonpermeability and the diaphragm of which hardly changes with time. The sensor is excellent in productivity and durability. A very small cavity is made by etching a sacrificial layer, and then a silicon oxide layer is deposited by, e.g., CVD to seal an etching channel. A water-nonpermeable thin film of polysilicon is formed covering the silicon oxide layer. The etching channel sealing structure of the pressure sensor is simplified, water is prevented from entering the cavity to enhance the moisture resistance. The change in shape with time of the diaphragm is suppressed because the sealing material has a small film stress.

2. 发明专利

DE69936794T2 未知
公开(公告)号：DE69936794T2
公开(公告)日：2008-04-30
申请号：DE69936794
申请日：1999-08-20
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： SATO SHINYA , SHIMADA SATOSHI , WATANABE ATSUO , ONOSE YASUO , KURYU SEIJI , MIYAZAKI ATSUSHI , HORIE JUNICHI , MONMA NAOHIRO
IPC分类号： G01L9/12 , B81B3/00 , B81B7/00 , G01L7/08 , G01L9/00 , H01L21/00 , H01L29/84
摘要： The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the pressure sensor produced according to the sacrificial layer etching technique, and to provide a pressure sensor characterized by excellent productivity and durability. After a very small gap is formed by the sacrificial layer etching technique, silicon oxide film is deposited by the CVD technique or the like, thereby sealing the etch channel. Further, impermeable thin film of polysilicon or the like is formed to cover the oxide film. This allows an etch channel sealing structure to be simplified in the pressure sensor produced according to the sacrificial layer etching technique, and prevents entry of moisture into the cavity, thereby improving moisture resistance. Moreover, sealing material with small film stress reduces temporal deformation of the diaphragm.

3. 发明专利

DE19861183B4 Sensor adjustment unit for hot wire air mass flow meter includes analog-to-digital converter 未知
公开(公告)号：DE19861183B4
公开(公告)日：2005-01-05
申请号：DE19861183
申请日：1998-10-08
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： MATSUMOTO MASAHIRO , SHIMADA SATOSHI , SUZUKI SEIKOU , SAITO AKIHIKO , MIYAZAKI ATSUSHI , HANZAWA KEIJI
IPC分类号： G01D3/02 , G06F9/32
摘要： The adjustment unit includes an analog-to-digital converter comprising an analog integrator (1) for integrating the analog input signal, a comparator (2) for comparing an output signal of the integrator with a predetermined value, and a first D/A converter (7) for outputting the comparator output signal as an analogue input signal. A second D/A converter (5) converts the output of the comparator and outputs the result as a further analog output signal. Four Independent claims are included for sensor adjustment circuits. Six Independent claims are included for digital sensor adjustment circuits.

4. 发明专利

DE10005536A1 Pressure detector consisting of sensor and integrated circuitry for use in control systems 未知
公开(公告)号：DE10005536A1
公开(公告)日：2000-08-17
申请号：DE10005536
申请日：2000-02-08
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： ONOSE YASUO , HORIE JUNICHI , KURYU SEIJI , SAITO AKIHIKO , ICHIKAWA NORIO , WATANABE ATSUO , SHIMADA SATOSHI
IPC分类号： G01L9/00 , H01L29/84 , H01L23/28 , G01L9/08 , H01L27/20
摘要： The sensor consists of a sensor section (60) a membrane section (40) and a circuitry section (50) located next to one another on a semiconductor substrate (1). They are covered by a passivation film (107) with the sensor section only partially covered by the film

5. 发明专利

DE19940422A1 Sensor with capacitive element, e.g. for pressure or acceleration; has capacitive detection and reference elements and capacitance determination circuit to produce charge difference 未知
公开(公告)号：DE19940422A1
公开(公告)日：2000-03-09
申请号：DE19940422
申请日：1999-08-26
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： HANZAWA KEIJI , MATSUMOTO MASAHIRO , SHIMADA SATOSHI , SAITO AKIHIKO , ONOSE YASUO , ICHIKAWA NORIO , HORIE JUNICHI , KURYU SEIJI
IPC分类号： G01L9/12 , G01D5/24 , G01L9/00 , G01P15/125 , G01R27/26 , G01R31/12
摘要： The sensor has capacitive detection (5) and reference (4) elements. A capacitance determination circuit (6,7) produces a charge difference. If the detection element shifts corresponding to a dynamic variable, e.g. pressure, the equilibrium between the charging amounts in the detection and the reference elements is destroyed, and a charging difference is produced, which is used to form an output signal (VOUT) of the capacitance detection circuit. In addition a charge and discharge circuit (2,3,8) is provided, which alters the output voltage in response to the output signal of the capacitance value detection circuit, until the electric charges in the capacitance detection element and in the capacitive reference element are essentially equal to each other.

6. 发明专利

DE19846461A1 Sensor adjustment unit 未知
公开(公告)号：DE19846461A1
公开(公告)日：1999-04-29
申请号：DE19846461
申请日：1998-10-08
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： MATSUMOTO MASAHIRO , SHIMADA SATOSHI , SUZUKI SEIKOU , SAITO AKIHIKO , MIYAZAKI ATSUSHI , HANZAWA KEIJI
IPC分类号： G01D3/02
摘要： The adjustment unit includes an analog-to-digital converter comprising an analog integrator (1) for integrating the analog input signal, a comparator (2) for comparing an output signal of the integrator with a predetermined value, and a first D/A converter (7) for outputting the comparator output signal as an analogue input signal. A second D/A converter (5) converts the output of the comparator and outputs the result as a further analog output signal. Four Independent claims are included for sensor adjustment circuits. Six Independent claims are included for digital sensor adjustment circuits.

7. 发明专利

DE19601372B4 未知
公开(公告)号：DE19601372B4
公开(公告)日：2004-02-12
申请号：DE19601372
申请日：1996-01-16
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： INOUE HIROKAZU , SAITO RYUICHI , MORI MUTSUHIRO , KURIHARA YASUTOSHI , ONUKI JIN , KIMURA SHIN , SHIMADA SATOSHI , SUZUKI KAZUHIRO , KAMITA YUKIO , KOBAYASHI ISAO , YAMADA KAZUJI , MOMMA NAOHIRO
IPC分类号： H01L23/28 , H01L23/34 , H01L23/538 , H01L25/07 , H01L25/18
摘要： A semiconductor module has a plurality of power semiconductor devices mounted on a substrate, and a metal foil for wiring is mounted on the substrate so that an asymmetric unit arrangement of the semiconductor devices is formed. In the device, all of the units are arranged in the same direction on the substrate, and all of the units are electrically connected with electrode terminal feet, and the electrode terminal feet are electrically connected with linkage terminal foot. The electrode terminal feet are disposed with a certain interval.

8. 发明专利

DE19983646B3 Statischer Kondensator-Drucksensor 未知
公开(公告)号：DE19983646B3
公开(公告)日：2013-06-06
申请号：DE19983646
申请日：1999-09-20
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： HORIE JUNICHI , MIYAZAKI ATSUSHI , SHIMADA SATOSHI , SAITOU AKIHIKO , ONOSE YASUO , ICHIKAWA NORIO , HANZAWA KEIJI
IPC分类号： G01L9/12 , G01L1/14 , G01L9/00 , H01L29/84
摘要： Kondensator-Drucksensor mit – einem aktiven Kondensator (100), der zwischen einer Membranelektrode (120a) und einer stationären Elektrode (30b) gebildet ist und dessen Kapazität sich mit dem Umgebungsdruck ändert, – einem Referenzkondensator (200), der zwischen einer oberen Elektrode (60a) und einer unteren Elektrode (30a) gebildet ist und dessen Kapazität sich im Wesentlichen nicht mit dem Umgebungsdruck ändert, und – einer Schaltung (300), die sowohl mit dem aktiven Kondensator (100) als auch mit dem Referenzkondensator (200) elektrisch verbunden ist, und deren Differenz oder Verhältnis zueinander erfasst, wobei – der aktive Kondensator (100), der Referenzkondensator (200) und die Schaltung (300) gemeinsam auf dem Halbleitersubstrat (10) ausgebildet sind, und – die untere Elektrode (30a) des Referenzkondensators (200) und die stationäre Elektrode (30b) des aktiven Kondensators (100) von dem Halbleitersubstrat (10) durch ein Dielektrikum (20) getrennt sind.

9. 发明专利

DE60131245T2 未知
公开(公告)号：DE60131245T2
公开(公告)日：2008-08-21
申请号：DE60131245
申请日：2001-03-30
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： MIYATA KENJI , SHIMADA SATOSHI , TAJIMA FUMIO , USUI TOSHIFUMI , KUBOTA MASANORI
IPC分类号： G01B7/30 , G01D5/14 , G01B7/00 , G01B7/14 , G01D5/12 , G01D5/16
摘要： A non-contact sensor for sensing a rotational position of a rotating object is provided. A ring-shaped permanent magnet (10) magnetized in the axial direction is sandwiched between two pairs of magnetic plates (11, 12, 13, 14) from above and below. Two pairs of upper and lower protruded magnetic substance portions (16, 17, 18, 19) are provided between the upper and lower magnetic plates (11, 12, 13, 14) at opposite outer ends thereof. Magnetic sensitive devices (21, 22) are inserted in air gaps between the two pairs of upper and lower protruded magnetic substance portions (16, 17, 18, 19). A magnetic flux generated from the ring-shaped permanent magnet (10) is substantially concentrated to the protruded magnetic substance portions (16, 17, 18, 19) and passes the magnetic sensitive devices (21, 22). The amount of magnetic flux passing each magnetic sensitive device (21, 22) is substantially proportional to the rotational angle of the ring-shaped permanent magnet (10). The rotational position of the ring-shaped permanent magnet (10) and hence the rotational position of a rotating shaft (15) supporting the ring-shaped permanent magnet (10) can be sensed in a non-contact manner as a signal output from the magnetic sensitive device. Since the magnetic flux is effectively concentrated to positions where magnetic sensitive devices (21, 22) are attached, a non-contact rotational position sensor having high accuracy and high sensitivity can be obtained.

10. 发明专利

DE10005536B4 未知
公开(公告)号：DE10005536B4
公开(公告)日：2007-11-29
申请号：DE10005536
申请日：2000-02-08
申请人： HITACHI LTD , HITACHI CAR ENG CO LTD
发明人： ONOSE YASUO , HORIE JUNICHI , KURYU SEIJI , SAITO AKIHIKO , ICHIKAWA NORIO , WATANABE ATSUO , SHIMADA SATOSHI
IPC分类号： H01L23/28 , G01L9/00 , G01L9/08 , H01L27/20 , H01L29/84

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