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    • 5. 发明专利
    • DE69116435T2
    • 1996-08-14
    • DE69116435
    • 1991-05-24
    • HITACHI LTDHITACHI AUTOMOTIVE ENG
    • TSUCHITANI SHIGEKISUZUKI SEIKOMIKI MASAYUKITANAKA TOMOYUKIMATSUMOTO MASAHIROICHIKAWA NORIOEBINE HIROMICHISUGISAWA YUKIKOSATO KANEMASAUENO SADAYASUASANO YASUHIROKUBOTA MASANORISUZUKI MASAYOSHI
    • G01P1/00G01P15/125G01P15/13
    • A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8 min , 9 min ) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40 DEG C or lower is, advantageously, charged into the hermetically sealed chamber.
    • 7. 发明专利
    • DE69116435D1
    • 1996-02-29
    • DE69116435
    • 1991-05-24
    • HITACHI LTDHITACHI AUTOMOTIVE ENG
    • TSUCHITANI SHIGEKISUZUKI SEIKOMIKI MASAYUKITANAKA TOMOYUKIMATSUMOTO MASAHIROICHIKAWA NORIOEBINE HIROMICHISUGISAWA YUKIKOSATO KANEMASAUENO SADAYASUASANO YASUHIROKUBOTA MASANORISUZUKI MASAYOSHI
    • G01P1/00G01P15/125G01P15/13
    • A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8 min , 9 min ) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40 DEG C or lower is, advantageously, charged into the hermetically sealed chamber.
    • 10. 发明专利
    • AIR-FUEL RATIO SENSOR
    • JPH06118053A
    • 1994-04-28
    • JP26842892
    • 1992-10-07
    • HITACHI LTDHITACHI AUTOMOTIVE ENG
    • SATO KANEMASAUENO SADAYASUOUCHI SHIROMINAMI NAOKI
    • G01N27/409
    • PURPOSE:To improve the heat conductivity from a heater to zirconia electrolyte by inserting a heat resisting fibrous material such as glass fiber or a metallic material such as a metal leaf spring between the zirconia solid electrolyte and the heater to fill the space. CONSTITUTION:An inside electrode 3 consisting of platinum is formed on the inside of a bag tube zirconia solid electrolyte (cell) 2 in the detecting part 1 of a sensor, and a platinum outside electrode 4 is similarly formed on the outside. A diffusive film 5 consisting of a magnesia spinel is formed on the outside thereof. Each electrode is drawn to the opened end part of the cell, and drawn by a lead 6 through a drawing electrode part. To the inside of the cell 2, a pipe heater 7 is inserted up to the top end part. The purpose of the heater 7 is to effectively heat the zirconia solid electrolyte inner part 10 corresponding to the effective electrode area part on the outside of the cell 2 in the detecting part as much as possible. Therefore, an elastic heat conductor 12 such as a glass fiber or leaf spring is inserted to the gap part 0.2-0.3mm between the solid electrode (cell) 2 and the heater 7 to fill the space, and heat conductivity is improved.