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1. 发明专利

DE3838032A1 Method and apparatus for structure testing 未知
公开(公告)号：DE3838032A1
公开(公告)日：1989-05-24
申请号：DE3838032
申请日：1988-11-09
申请人： HITACHI LTD
发明人： NINOMIYA TAKANORI , YOSHIMURA KAZUSHI , NOMOTO MINEO
IPC分类号： G01R31/308 , G06T7/00
摘要： In a method and an apparatus for structure testing, a determined structure is brought into binary form (302), the binary structure is expanded (303), the image size is reduced (305a), whilst maintaining the interconnection of the expanded structure, and is stored in a first store (306); furthermore, the binary structure is contracted (304), the image size is reduced (305b), whilst maintaining the interconnection of the contracted structure, and is stored in a second store (307). The expanded structure is then read out of the first store (306) and an interconnection of the structure is selected (308); the contracted structure is read out of the second store (307) and an interconnection is selected from this structure. The selected interconnections are compared with the interconnection of a normal structure, in order to determine a non-match. Corresponding to such non-matches, the structure having a short-circuit or partial short-circuit and the structure having an open or partially open electric circuit are classified and selected. Furthermore, the structure shape stored in the first store (306) is analysed in order to determine the position at which a short-circuit or partial short-circuit fault is present.

2. 发明公开

EP2725385A4 DISTANCE MEASURING METHOD AND DEVICE 审中-公开
公开(公告)号：EP2725385A4
公开(公告)日：2015-04-01
申请号：EP12802335
申请日：2012-04-23
申请人： HITACHI LTD
发明人： HARIYAMA TATSUO , KASAI HIROAKI , WATANABE MASAHIRO , YOSHIMURA KAZUSHI
IPC分类号： G01S17/36 , G01S7/481
CPC分类号： G01S17/36 , G01S7/481 , G01S7/4818

3. 发明公开

EP2790033A4 DISTANCE MEASUREMENT METHOD AND DEVICE, AND SHAPE MEASUREMENT DEVICE IN WHICH DISTANCE MEASUREMENT DEVICE IS INSTALLED 有权
标题翻译：距离测量方法和设备以及形状测量设备符合测距仪INSTALLED
公开(公告)号：EP2790033A4
公开(公告)日：2015-03-11
申请号：EP12856558
申请日：2012-10-26
申请人： HITACHI LTD
发明人： KASAI HIROAKI , HARIYAMA TATSUO , WATANABE MASAHIRO , YOSHIMURA KAZUSHI
IPC分类号： G01S7/481 , G01C3/06 , G01S17/36 , G01S17/42
CPC分类号： G01S7/4812 , G01S7/4815 , G01S7/497 , G01S17/36 , G01S17/42

4. 发明专利

JP2004264054A Flaw inspection device and method for using it 有权
公开(公告)号：JP2004264054A
公开(公告)日：2004-09-24
申请号：JP2003033232
申请日：2003-02-12
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YOSHIMURA KAZUSHI , NOMOTO MINEO , KATSUTA DAISUKE
IPC分类号： G01N21/954
CPC分类号： G01N21/954
摘要： PROBLEM TO BE SOLVED: To inspect defects such as a casting nest, an injury, a contaminant or the like at high speed.
SOLUTION: This defect inspection device is provided with a support member 12 having an illumination optical system 3 for illuminating the inner surface of a cylindrical object 1 to be inspected and a detection optical system 10, which comprises a reflecting optical element 2 for reflecting the reflected light image of the optical system in an axial direction so as to obliquely detect the same, an image forming optical element 4 for forming the reflected light image linearly and a linear image sensor 5 for receiving the linear reflected light image to output an image signal, attached thereto and constituted so as to detect a two-dimensional image signal from the linear sensor by rotating the support member centering around the axis of the inner surface of the cylindrical object. By controlling the distance L of the detection optical system, a detected angle θr is made constant even if a condition such as the size of the object or the like changes.
COPYRIGHT: (C)2004,JPO&NCIPI

5. 发明专利

JPH10177844A MANUFACTURE OF PLANAR DISPLAY PANEL AND MANUFACTURE OF PLASMA DISPLAY PANEL 失效
公开(公告)号：JPH10177844A
公开(公告)日：1998-06-30
申请号：JP33962796
申请日：1996-12-19
申请人： HITACHI LTD
发明人： HONGO MIKIO , TAKADA ATSUKIMI , MARUYAMA SHIGENOBU , MIYATA KAZUFUMI , MATSUZAKI HIDEO , SATO MASASHI , TODOROKI SATORU , YOSHIMURA KAZUSHI
IPC分类号： G01N21/88 , G01N21/956 , G02F1/13 , G02F1/1333 , G02F1/136 , G02F1/1368 , H01J9/02 , H01J9/42
摘要： PROBLEM TO BE SOLVED: To improve a yield rate of manufacture so as to realize due cost reduction by administrating information about defect inspection and information about defect correction per substrate unit of lot unit and executing inspection and correction to such substrates suffering from defect generation. SOLUTION: In memory unit 22, the secondary position coordinates of a wire disconnection position on a drain line including a wire disconnection failure computed by a wire disconnection position computer 52 are stored additionally in the first inspection information per each substrate inspected by a wire disconnecting inspection device 51. A corrective device 53 takes out a substrate from a cassette transported as shown by an arrow mark 64 so as to read production number by a reading means 54C to transport it to a computer 21. The computer 21 refers it to inspection information stored in the memory unit 22 and transmits the information 74 such as the secondary wire disconnection coordinates, etc., to the corrective device 53. The corrective device 53 places the concerning substrate 1 on a stage on the basis of the information 74 and executes correction on wire disconnection position on the basis of information 74 from the computer 21 in response to the transmitted production number of the substrate.

6. 发明专利

JPH09211046A METHOD AND APPARATUS FOR NON-CONTACT DETECTION OF POTENTIAL 失效
公开(公告)号：JPH09211046A
公开(公告)日：1997-08-15
申请号：JP1755396
申请日：1996-02-02
申请人： HITACHI LTD
发明人： YOSHIMURA KAZUSHI , NINOMIYA TAKANORI , GUNJI TAKEO
IPC分类号： G01R29/12 , G01R19/00 , G01R31/302
摘要： PROBLEM TO BE SOLVED: To detect an unknown potential on an object to be measured by a sensor electrode without being influenced by a distance between the object and the sensor electrode. SOLUTION: While a sensor electrode 1 is vibrated in a direction orthogonal to a plane of an object 101 to be measured, each time potential difference between the object 101 and the electrode 1 is changed, an AC modulation signal is detected from the electrode 1, and a distance between the object 101 and the electrode 1 is estimated from a change in magnitude of the detected AC modulation signal. In addition, an apparent potential on the object 101 at the time when magnitude of the AC modulation signal is zero is detected, and the apparent potential is compensated based on the estimated distance, thereby allowing an actual potential on the object 101 to be detected.

7. 发明专利

JPH08327708A METHOD AND APPARATUS FOR TESTING OPERATION OF ELECTRONIC CIRCUIT IN BOARD UNDER TEST 失效
公开(公告)号：JPH08327708A
公开(公告)日：1996-12-13
申请号：JP13526695
申请日：1995-06-01
申请人： HITACHI LTD
发明人： YOSHIMURA KAZUSHI , NINOMIYA TAKANORI , GUNJI TAKEO
IPC分类号： G01R29/14 , G01R29/08 , G01R31/302
摘要： PURPOSE: To provide the method and the apparatus for testing the operation of the electronic circuits in a board under test, which can efficiently measure the operating state of the electronic circuits in the board under test, wherein the electronic parts such as LSIs are mounted on the circuit board such as a printed board or the like and the electronic circuits are formed (incircuit test), by using a sensor array without contact. CONSTITUTION: The signal for a point to be measured on a board under test 3 is applied from the outside and changed in time. A sensor array 1, on which detecting electrodes 2 are aligned, is brought close to the board under test 3 and arranged. Thus, the signal to be measured is induced in the electrostatically coupled detecting electrode 2. Then, the two-dimensional or one-dimensional potential distribution in the entire surface or a part of the board under test 3 is detected and compared with a reference potential distribution. Thus, the operating state of the electronic circuit (state of fault) is tested in the method and the apparatus for testing the operation of the electronic circuit in the board under test.

8. 发明专利

JPH05126723A METHOD AND DEVICE FOR MONITORING SINTERING STATE OF CERAMIC SUBSTRATE 失效
公开(公告)号：JPH05126723A
公开(公告)日：1993-05-21
申请号：JP28974891
申请日：1991-11-06
申请人： HITACHI LTD
发明人： YOSHIMURA KAZUSHI , NINOMIYA TAKANORI
IPC分类号： C04B35/64 , G01N21/21 , H05K3/00
摘要： PURPOSE:To obtain a means for monitoring sintering state of a ceramic substrate quantitatively by obtaining an amount of glass at a pattern part of the ceramic substrate quantitatively. CONSTITUTION:A surface of a ceramic substrate 1 which was sintered is polished and an image which is detected by an optical system consisting of a light source 3, a sensor 4, a polarizer 5, an analyzer 6, lens groups 10a, 10b, and 10c, a half mirror, etc., is processed by an image-processing part 7 for obtaining an amount of glass at a pattern part of the ceramic substrate and using it as sintering state information.

9. 发明专利

JPH0527047A LIMIT MEASUREMENT BY TRAVELING VEHICLE AND DEVICE THEREFOR 失效
公开(公告)号：JPH0527047A
公开(公告)日：1993-02-05
申请号：JP18724891
申请日：1991-07-26
申请人： HITACHI LTD , HIGASHI NIPPON RYOKAKU TETSUDO , HITACHI ELECTR ENG
发明人： YOSHIMURA KAZUSHI , NINOMIYA TAKANORI , NAKAGAWA YASUO , YOSHIZAWA TAKAO , KIKUCHI TSUNENOBU , SARUTANI KENZO
IPC分类号： B61K9/00 , G01V8/20
摘要： PURPOSE:To surely detect the existence of an obstacle in a construction limit, without being influenced by the external scattered light during the high speed traveling, by projecting light in planary form to the periphery of a vehicle, by using the light cutting method and detecting an image formed through the projection onto an obstacle in a vehicle traveling limit. CONSTITUTION:The unit in the light projection.detection system of a measurement vehicle is constituted of a detection part 3 (3a and 3b) consisting of a light projector 2 which consists of a light source 6 and a cylindrical lens 7 and forms a light projection plane 8, image focusing lens 9, optical filter 10, the two-dimensional detectors 11 (11a and 11b) such as TV camera. The light projector projects light perpendicularly to the traveling direction of the measurement vehicle and forms the light projection plane 8. When no obstacle exists in the detection range of the two-dimensional detectors 11a and 11b of the detectors 3a and 3b, an external scattered image on the periphery of the measurement vehicle is detected in the output of the detectors 11a and 11b. When an obstacle exists in the detection viewfield, the light projection plane 8 radiates the surface of the obstacle, and the image is detected, together with the external scattered image.

10. 发明专利

JPH0447764B2 失效
公开(公告)号：JPH0447764B2
公开(公告)日：1992-08-04
申请号：JP3863884
申请日：1984-03-02
申请人： HITACHI LTD
发明人： HAMADA TOSHIMITSU , YOSHIMURA KAZUSHI , KUNI TOMOHIRO , SHIGEMURA TAKASHI
IPC分类号： G01B15/00 , G01B15/04

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