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    • 3. 发明专利
    • SENICONDUCTOR DEVICE
    • JPS62249435A
    • 1987-10-30
    • JP9204286
    • 1986-04-23
    • HITACHI LTD
    • MATSUKAWA KEIZOMIYAMOTO KEIJIYAMADA MUNEHIRO
    • H01L23/50H01L21/60H01L23/48
    • PURPOSE:To suppress creation of whiskers and avoid shor circuit between leads each other or between a lead and a bump by a method wherein the thickness of a surface treatment metal layer on the lead is made to be thin at the part which is jointed with the electrode and the thickness of the metal layer is made to be thin at the part other than jointing part. CONSTITUTION:The thickness of an Sn plating layer 5 on a lead 3 is made to be thinner at the part which is bonded to a bump electrode 2. Even if the thickness of the layer 5 is reduced like this, as bonding is carried out between Au bump metal of the bump electrode 2 and Sn of the Sn plating layer 5, creation of whiskers can be suppressed. Therefore, the short circuit between leads 3 of a lead frame each other caused by the growth of whiskers can be avoided. Moreover, by reducing the thickness, the creation of excessive Au-Sn alloy is suppressed and short circuit between the lead 3 and the bump 2 caused by the excessive alloy can be avoided. Further, by increasing the thickness of an Sn plating layer 6, stress on the surface of the plating layer 6 can be relieved and the creation of whiskers is suppressed and short circuit between the leads each other can be avoided in the same way.