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    • 6. 发明专利
    • RECOGNIZING METHOD FOR PATTERN
    • JPS62249003A
    • 1987-10-30
    • JP9204186
    • 1986-04-23
    • HITACHI LTD
    • SUZUMURA YOSHIKAZUTANIMOTO MICHIO
    • H01L21/66G01B11/24
    • PURPOSE:To easily execute a recognition with high accuracy by bringing the whole pattern to an image pickup in a necessary picture element size by using one optical equipment, enlarging this picture element size by an electric method, and executing a recognition of a partial pattern. CONSTITUTION:First of all, as shown in a figure (a), the whole of an element pattern 1a of a semiconductor chip is brought to an image pickup by one set of optical machine. In this case, an image pickup surface is brought to an image pickup in advance in a picture element size which becomes, for instance, 500 lines. In this state, information which has been obtained by this image pickup is processed electrically, and in case of recognizing the whole of the pattern by a device which can recognize a pattern of, for instance, 250 lines, sampling is executed on an average from in picture element information of said 500 lines, picture element information of 250 lines is extracted from the whole, and by using it, a pattern recognition is executed. In case of executing a recognition of a part, information of 250 lines containing a necessary part is selected as shown in a figure (b), and by enlarging it, a pattern recognition is executed.
    • 8. 发明专利
    • RECOGNIZING DEVICE OF OBJECT
    • JPS5870380A
    • 1983-04-26
    • JP16722381
    • 1981-10-21
    • HITACHI LTD
    • SUZUMURA YOSHIKAZUTAKASUGI NOBUHIROKIYOUMASU RIYUUICHI
    • G06T1/00G06K9/38
    • PURPOSE:To exactly execute recognition, by varying in order a threshold level in case of electrically processing a photographic image of an object to be recognized, to a value decided in advance, also statistically processing a signal quantity of the object to be recognized, and varying a reference value of said threshold level. CONSTITUTION:When recognition has become impossible due to variation of brightness of a photographic image of an object to be recognized 1, an NG signal is outputted to a threshold value control part 8. The threshold level control part 8 selects a threshold level in order as theta+DELTAtheta, theta-DELTAtheta, theta+DELTA2theta, and theta-DELTA2theta from theta. Also, a level of a signal recognized in case of repeated recognition is processed statistically in a reference control part 9, its distributing state is detected, a center value of its distribution is compared with the threshold level theta which is used at present, a definite value of the threshold level theta is made to conform with said center value, and a range which can be covered by each threshold level can always be held in an effective state. As a result, the recognition is executed exactly, and also the work efficiency is improved.