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    • 9. 发明专利
    • CHARGED PARTICLE BEAM APPARATUS HAVING MEANS TO OBSERVE A STEREO-IMAGE OF A SPECIMEN
    • GB1300624A
    • 1972-12-20
    • GB1640570
    • 1970-04-07
    • HITACHI LTD
    • OKANO HIROSHIHOSOKI SHIGEYUKIKAMIJO KAZUAKI
    • H01J37/147H01J37/28
    • 1300624 Electron microscopes HITACHI Ltd 7 April 1970 [9 April 1969] 16405/70 Heading H1D In an electron microscope the angle of incidence of the beam on the target may be varied to enable stereoscopic images to be obtained. In Fig. 5 the beam is focused by a lens 3 on a specimen 6 over until it is scanned by a coil 5, and passes through one of two apertures in a diaphragm 10 according to the position of an adjustable shutter 11; the apertures are on either side of the axis so that the angle of incidence of the beam is different for the two apertures, and if desired a third aperture may be disposed on the axis for use when stereo pictures are not required. In a modification, Fig. 6 (not shown), the beam is divided into two by an electrode (12), the two beams passing respectively to two apertures in a diaphragm and one of the beams being deflected away to an inoperative position by a deflection means (13, 14). This arrangement allows high speed scanning and direct display of the two images in different colours on a colour picture tube. In another arrangement, Fig. 7 (not shown) a magnetic deflection means is provided in the image plane preceding the lens 3 and energized to give two alternate paths for the beam through the lens. In a modification, Fig. 8 (not shown), the deflection means is preceded by a diaphragm and is located after the image plane; in this case the scanning coil 5 must be supplied with a waveform inverse to that supplied to the deflection means to compensate for the displacement of the beam. This waveform may be synchronized with the scanning wave (Fig. 9, not shown) but this is not essential.