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    • 4. 发明专利
    • GATE TURN-OFF THYRISTOR STACK
    • JPH1041498A
    • 1998-02-13
    • JP19307296
    • 1996-07-23
    • HITACHI LTD
    • WAKIZAWA YUUJIMATSUURA NOBUYOSHI
    • H01L29/74H01L29/744
    • PROBLEM TO BE SOLVED: To make the best use of the performance of a GTO thyristor preventing a current from concentrating on its region where more stress is induced when an unbalanced load is applied to the GTO thyristor by a method wherein the first region of a unit device is set smaller in current density than the second region when the unit device is equal in ON-state voltage. SOLUTION: A water-cooled fin 1 is equipped with an electrode lead-out terminal in one piece. The water-cooled fin is inserted between a diode 2 of small electrode diameter and a gate turn-off thyristor (GTO) 3 with electrodes larger in diameter than those of the diode 2. The GTO thyristor 3 is formed of a semiconductor pellet composed of a region A of the same diameter with the diode 2 and an outer region B, wherein the region A is smaller in current density than the region B when the GTO thyristor 3 is uniformly pressurized in an ON-state. The GTO thyristor is so formed as to make the region A shorter in a turn-off time than the region B. By this setup, a GTO thyristor stack can be enhanced in controllable current and lessened in size and cost.
    • 5. 发明专利
    • GTO THYRISTOR AND ITS MANUFACTURE
    • JPH08204169A
    • 1996-08-09
    • JP693495
    • 1995-01-20
    • HITACHI LTD
    • MATSUURA NOBUYOSHISUGAWARA YOSHITAKAONOSE HIDEKATSU
    • H01L29/74H01L21/332
    • PURPOSE: To obtain high cut-off capability, by forming parallel recessed parts in the bottom of a second stage trench formed from an N-emitter layer to an R-base layer of a gate turn-off thyristor, and forming heavily doped R layers on the surface of the R-base layer, along the second stage trench. CONSTITUTION: An N-emitter layer layer 5, an R-base layer 6, an N-base layer 7 and an R-emitter layer 8 are continuously formed between the main surfaces 11 and 12 of a semiconductor substratum 1 composed of silicon. The one main surface 11 is constituted as an uneven surface. On its protruding part, the strip type N-emitter layer 5 is exposed. On the recessed part, the R-base layer 6 is exposed. The R-emitter layer 8 is exposed on the other main surface 12, alternately with N regions 9. A cathode electrode 2, an anode electrode 3 and a gate electrode 4 are formed by an Al evaporation method. Two-stage trenches are formed from the emitter layer 5 to the R-base layer 6. Heavily doped R layers 10 are formed along the second trenches. Thereby cut-off capability can be improved without deteriorating the breakdown voltage between the cathode and the gate.
    • 8. 发明专利
    • PRESSURE-WELDING TYPE SEMICONDUCTOR DEVICE
    • JPH10107051A
    • 1998-04-24
    • JP25581096
    • 1996-09-27
    • HITACHI LTD
    • SAITO KATSUAKIMATSUURA NOBUYOSHI
    • H01L29/74H01L21/52
    • PROBLEM TO BE SOLVED: To prevent the generation of the unevenness of pressing stresses from pressing electrodes by a method wherein the pressing electrodes are respectively provided with two regions or more, the first regions of the regions are formed as the vicinities of the outlines of the shapes of the electrodes coming into contact with electrode films, the second regions and succeeding regions are formed as the regions other than the first regions and the yield stresses of the first regions are set larger than those of the second regions and succeeding regions. SOLUTION: A semiconductor substrate comes into contact thermally and electrically with buffer electrode plates 116 and 117. The plates 116 and 117 are pressed by pressing units and the like, which are provided on the outside of a semiconductor element, through pressing electrodes 118 and 119 and 21 reduction in the contact resistance between the electrode plates 116 and 117 is contrived. The electrodes 118 and 119 in this case consist of two materials, the first materials 125 respectively form the vicinities of the shapes of the outlines of the electrodes 118 and 119 and the second materials 126 respectively form sites other than the vicinities of the shapes of the outlines of the electrodes 118 and 119. The yield stress of the materials 125 is about 1.2 times larger than the yield stress of the materials 126. By applying an even pressing force to the thyristor, an even heat dissipation within the surfaces of the substrate and the even electrical contact within the surfaces of the substrate can be contrived and a reduction in pressing stresses from the electrodes 118 and 119 that a semiconductor device results in being broken due to an insufficient pressing to the substrate can be prevented.