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1. 发明专利

JP2507329B2 失效
公开(公告)号：JP2507329B2
公开(公告)日：1996-06-12
申请号：JP14950886
申请日：1986-06-27
申请人： HITACHI LTD
发明人： SATO MAKOTO , FURUHATA YOSHIO , KAJIMURA TAKASHI , KUBOTA SHIGEO , KATO SHIGEO
IPC分类号： H01L21/20 , C30B21/00 , C30B21/04 , H01L21/324

2. 发明专利

JPH02237754A LENS POLISHING DEVICE AND POLISHING METHOD THEREOF 失效
公开(公告)号：JPH02237754A
公开(公告)日：1990-09-20
申请号：JP5645989
申请日：1989-03-10
申请人： HITACHI LTD , HITACHI TOKYO ELECTRONICS
发明人： IMAI KUNINORI , SHIOKAWA TAKEJI , KUBOTA SHIGEO , FUJIMOTO ISAO , WATASE SHINICHIRO
IPC分类号： B24B13/00
摘要： PURPOSE:To polish by profiling to the surface shape of a lens even if its shape is slightly changed by providing a means for gradually feeding a polishing tape while giving a constant tension and reciprocating movement to the polishing tape by a hysteresis clutch. CONSTITUTION:A lens 1 is polished by using a polishing tape 2 in the state of the lens 1 being rotated by fitting it to a turntable 9. In this case, a current passed to hysteresis clutches 3A-3D is controlled and the polishing tape 2 is gradually fed out by a feeding means while a constant tension and reciprocating movement is given to the polishing tape 2. By interlocking with this the polishing tape 2 advances and retreats, and an abrasive liquid 16 is fed to the polishing tape 2 by the driving of a pump. Polishing can thus be made by profiling to the surface shape even if the shape of the lens 1 is slightly changed by feeding out the polishing tape 2.

3. 发明专利

JPS636829A MANUFACTURE OF EUTECTIC SEMICONDUCTOR REGULAR STRUCTURE 失效
公开(公告)号：JPS636829A
公开(公告)日：1988-01-12
申请号：JP14950886
申请日：1986-06-27
申请人： HITACHI LTD
发明人： SATO MAKOTO , FURUHATA YOSHIO , KAJIMURA TAKASHI , KUBOTA SHIGEO , KATO SHIGEO
IPC分类号： H01L21/20 , C30B21/00 , C30B21/04 , H01L21/324
摘要： PURPOSE:To enhance the productivity by externally applying thermal, elastic vibrations along the crystal precipitated surface when a seed crystal is brought into contact with a melted raw material, cooling a boundary to precipitate a crystal. CONSTITUTION:A bonding sample of a Ge seed crystal 42 and a GaAs-Ge eutectic unit 43 (15 mol% of GaAs) sealed in a quartz vacuum ampule 47 is thermally melted in an electric furnace 41 having a temperature gradient, and cooled from one end. At this time, an optical pulse is emitted through an optical chopper 45 from the side to apply a periodic temperature vibration to the unit 42. Then, a laminar crystal parallel to the seed crystal 43 is obtained. Thus, after a laminar structure is obtained, a crystal layer is grown with the laminar end as a seed. A temperature periodic vibration is so applied as to coincide in the period of high and low temperatures at the layer period formed initially.

4. 发明专利

JPS62246645A ROTARY INTRODUCING DEVICE 失效
公开(公告)号：JPS62246645A
公开(公告)日：1987-10-27
申请号：JP8792286
申请日：1986-04-18
申请人： HITACHI LTD
发明人： KUBOTA SHIGEO , KATO SHIGEO
IPC分类号： F16H1/32 , F16H49/00
摘要： PURPOSE:To obtain rotary introduction of high airtightness, by disposing input/ output ends at a wave generator, giving the rotation of the wave generator of an input side for a circular spline, then giving the rotation of the circular spline for the wave generator of an output side with accelerating. CONSTITUTION:A thin and elastic flex spline 1 is held airtightly, a wave generator 6 is mounted to the inner side thereof, and the spline is transformed elliptically from its inner circumference. At the outer circumference of the flex spline 1, teeth 2 of (n) number are provided, and a circular spline 7 which has inner circumferential teeth being more then (n) by a plural number is engaged therewith. On the other hand, the wave generator is also mounted to a flex spline 9 which is connected with the spline 1, and the teeth of the circular spline 7 are provided more then the (n') number teeth of the outer circumference of the flex spline 9 by a plural number so as to be engaged mutually. Therefore, the rotation of the generator of an input side is decelerated by the spline 7, and the rotation is accelerated again and transmitted to an output side.

5. 发明专利

JPS6253746A HEATING/COOLING FURNACE 失效
公开(公告)号：JPS6253746A
公开(公告)日：1987-03-09
申请号：JP18965485
申请日：1985-08-30
申请人： HITACHI LTD
发明人： KATO SHIGEO , KUBOTA SHIGEO , TAKAGI KAZUMASA , FURUHATA YOSHIO , KURODA TAKARO , KAJIMURA TAKASHI
IPC分类号： B01L7/00 , C30B21/00 , C30B30/08 , F27B17/02
摘要： PURPOSE:To form a uniform crystal by cooling the crystal without imparting vibration thereto, in a heating furnace provided with a specimen heating part and an insulating part, by moving a part of the furnace at the cooling time of the specimen to promote the heat dissipation of the specimen. CONSTITUTION:A furnace heat insulating part 18 is moved to hold a capsule 14 having a specimen received therein by a heat insulating arm 17 and closely adhered to a furnace fixing part 15. When the heating/cooling furnace reaches space and gravity is lost, a current flows to a heater 16 and especially an eutectic crystal part is heated to be allowed to reach the m.p. thereof. A current is controlled to hold temp. slightly higher than the m.p. and, when the eutectic crystal is sufficiently diffused and becomes uniform, the heater 16 is cut off and two furnace heat insulating parts 18 are immediately sufficiently moved left and right. Because the furnace heat insulating parts 18 disappears from the circumference, the temp. of the eutectic crystal is lowered and, when reaching the m.p., the crystallization of the eutectic crystal starts from the interface of a seed crystal and the eutectic crystal to grow the eutectic crystal.

6. 发明专利

JPS6215747A MASS SPECTROMETER 失效
公开(公告)号：JPS6215747A
公开(公告)日：1987-01-24
申请号：JP15404585
申请日：1985-07-15
申请人： HITACHI LTD , HITACHI TOKYO ELECTRONICS
发明人： KUBOTA SHIGEO , MITSUI YASUHIRO , KONDO YATARO
IPC分类号： G01N27/62 , H01J49/10 , H01J49/24
摘要： PURPOSE:To accurately fix the kind of observed ions, by providing a vacuum heating gas evacuation means in an ionizing section to clean up a sample gas feed system and the ionizing section to exactly determine the spectral intensity of an analyzed sample. CONSTITUTION:An ionizing section 2 is provided with a gas evacuation pipe 14 and a gas evacuation means 15. A heater 16 is provided for a gas introduction pipe 8, the ionizing section 2 and the gas evacuation pipe 14. A contaminative substance such as a solid or gaseous impurity which is clinging to or adsorbed in the walls of the pipe 8 and the ionizing section 2 is removed by vacuum heating gas evacuation for cleaning. As a result, cluster ions of the contaminative substance other than a measured sample are not generated in cluster ions produced in the ionizing section 2. An exact spectrum of the analyzed sample is thus obtained to accurately fix the kind of observed ions.

7. 发明专利

JPS61704A ACCURATE POSITIONING CARRIAGE 失效
公开(公告)号：JPS61704A
公开(公告)日：1986-01-06
申请号：JP10813285
申请日：1985-05-22
申请人： HITACHI LTD
发明人： TAJIMA TAKESHI , KUBOTA SHIGEO , SAITOU SUKEO
IPC分类号： G01B9/00 , G01B5/00 , G01B9/02 , G01B11/00
摘要： PURPOSE:To obtain an accurate and stable optical system, by equalizing a distance from the center of a beam splitter up to a reflecting surface of a fixed mirror reflecting a reference beam of light and a distance from the center of the beam splitter to a reflecting surface of a travelling mirror. CONSTITUTION:In a positioning carriage, a fixed mirror is so arranged that a distance from a beam splitter 13 up to a travelling mirror located at the center of travelling stroke through a plane mirror 20 and a distance from a beam splitter to a fixed mirror are so set as to be equally b+l+S/2. In this case when a temperature change DELTAt is observed, the greatest reading is obtained from the equation II, giving the maximum error of (S/2).alpha.DELTAt. As comparison of this value with that obtained by the conventional optical system I gives an answer of l>alpha, the error given by the present invention is clearly smaller. Thus, by comparison of the optical system related to the present invention and a state provided with a static pneumatic bearing type travelling guide, a stage available for positioning in submicron order can be manufactured.

8. 发明专利

JPS5975177A Radioactive rays detector 失效
标题翻译：放射性检测器
公开(公告)号：JPS5975177A
公开(公告)日：1984-04-27
申请号：JP18448382
申请日：1982-10-22
申请人： Hitachi Ltd , Hitachi Medical Corp
发明人： KUBOTA SHIGEO , YOSHIDA MINORU , TAKAHASHI TOSHIO , KATOU SHIGEO , MATSUOKA SADAO , KOUNO HIDEKI , HAYAKAWA TAKAYUKI , SUZUKI KOUJI
IPC分类号： G01N23/04 , G01T1/164 , G01T1/20 , G01T1/202
CPC分类号： G01T1/2018 , G01T1/1644 , G01T1/202
摘要： PURPOSE:To improve the assembly precision of a radioactive rays detector used for X-ray CT (tomographic device) by using a positioning member provided to a base plate to attach a scintillator and a photodetector to the base plates. CONSTITUTION:The radio active rays detector has plural scintillators and photodetectors at a circumference and those members are attached to fitting base plates 21 and 21 by using the support members 20. Namely, the support members 20 are fixed on the upper and lower arcuate base plates 21 and 21 respectively. Grooves 13 for positioning and fixing radioactive rays shield plates 13 are formed in those support members 20. The scintillators 11 are fixed to the side surfaces of the shield plates 13 and the photodetectors 12 are fixed between the side plates 22a of the support members 20. An opening hole 25 is formed at the plane part 22c of the support members 20 to lead the lead line of the photodetectors 12 onto the surfaces of the base plates 21.
摘要翻译：目的：通过使用提供给基板的定位构件将闪烁体和光电检测器连接到基板，提高用于X射线CT（断层摄影装置）的放射线检测器的装配精度。构成：无线电激光光线检测器在圆周处具有多个闪烁体和光电检测器，并且这些构件通过使用支撑构件20附接到装配基板21和21上。即，支撑构件20固定在上部和下部弓形基板 21和21。用于定位和固定放射线屏蔽板13的槽13形成在这些支撑构件20中。闪烁体11固定到屏蔽板13的侧表面，并且光电检测器12固定在支撑构件20的侧板22a之间。在支撑构件20的平面部分22c处形成开口孔25，以将光电检测器12的引线引导到基板21的表面上。

9. 发明专利

JPS5969305A Conveyer apparatus 失效
标题翻译：输送装置
公开(公告)号：JPS5969305A
公开(公告)日：1984-04-19
申请号：JP17841582
申请日：1982-10-13
申请人： Hitachi Ltd
发明人： KUBOTA SHIGEO , SUZUKI KEIZOU , NISHIMATSU SHIGERU , TAKAHASHI TOSHIO , NINOMIYA TAKESHI , KONDOU YOSHIMASA , MATSUO AKIHIKO
IPC分类号： H01L21/677 , B65G25/06 , H01L21/302 , H01L21/3065
CPC分类号： B65G25/06
摘要： PURPOSE:To improve the operability, durability and reliability of a conveyer mechanism by disposing belt feed means for driving a pair of conveying belts for transporting sample and means for driving sample attaching and detaching means mounted on the other end of the conveying belts. CONSTITUTION:Sprockets 16 engaged with at least one pair of flexible conveying belts 13 are rotated by means comprising a worm wheel 22, worm gears 24, 25, a blet driving shaft and so on to let out and take up the belts 13. Sample is attached and detached by an attaching and detaching mechanism 20 comprising at attaching and detaching finger 17, a holder 18, a slider 19 and so on, which is disposed on the other end of the belt 13. The gear 24 is moved on the driving shaft 23 to rotate the sprocket 16 interlocking with the gear 24, so that the conveying belt 13b is moved independently to move the slider 19, thereby opening and closing the attaching and detaching finger 17. Thus, the conveying apparatus is reduced to a compact size even if the conveying distance is long, and the operability of the conveying mechanism can be improved.
摘要翻译：目的：通过设置用于驱动一对运送样品的输送带的带式进给装置和安装在输送带的另一端的用于驱动样品附着和拆卸装置的装置来提高输送机构的可操作性，耐久性和可靠性。构成：与至少一对柔性输送带13接合的链轮16通过包括蜗轮22，蜗轮24,25，排气传动轴等的装置旋转，以排出和吸收带13.样品是通过安装和拆卸机构20附接和分离，该安装和拆卸机构20包括安装和拆卸手指17，保持器18，滑块19等，其设置在带13的另一端。齿轮24在驱动轴以使链轮16与齿轮24互锁，使得传送带13b独立地移动以移动滑动件19，从而打开和关闭附接和分离手指17.因此，输送装置甚至减小到紧凑的尺寸如果输送距离长，并且可以提高输送机构的可操作性。

10. 发明专利

JPS58202527A Semiconductor manufacturing device 失效
标题翻译：半导体制造设备
公开(公告)号：JPS58202527A
公开(公告)日：1983-11-25
申请号：JP8477582
申请日：1982-05-21
申请人： Hitachi Ltd
发明人： KUBOTA SHIGEO , SAITOU NORIO
IPC分类号： H01L21/302 , H01J37/30 , H01L21/027
CPC分类号： H01J37/3002
摘要： PURPOSE:To enable the fine work of high density by a method wherein an electric dust collector is provided in at least one of a sample processing chamber, a sample exchange chamber, or a gas introduction system. CONSTITUTION:The sample 31 into an electron ray image drawng device is loaded from the air into the sample exchange chamber 32, then mounted on a transfer table 34 by a sample detachment device 33 after evacuation, and thus processed by electron rays. After processing, it is replaced to a sample exchange device by the detachment device, while N2 gas is introduced from a leak valve 35, and then the sample is taken out to the air. Thereat, scattering and floating dusts are collected by the electric dust collector 36 provided in the sample detachment device and the leak gas introduction system, and then accumulated therein. Thereby, the deposition of dusts onto the sample is remarkably reduced.
摘要翻译：目的：通过在样品处理室，样品更换室或气体导入系统中的至少一个中设置电除尘器的方法，能够实现高密度的精细加工。构成：将进入电子射线图像的装置的样品31从空气加载到样品更换室32中，然后在抽真空之后通过样品分离装置33安装在转印台34上，由此通过电子束进行处理。在处理之后，通过分离装置将其替换为样品更换装置，而从泄漏阀35引入N 2气体，然后将样品取出到空气中。通过设置在取样装置和泄漏气体导入系统中的电动集尘器36收集威胁，散射和漂浮的灰尘，然后积聚在其中。因此，灰尘沉积在样品上显着降低。

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