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2. 发明专利

DE2852143A1 未知
公开(公告)号：DE2852143A1
公开(公告)日：1979-06-21
申请号：DE2852143
申请日：1978-12-01
申请人： HITACHI LTD
发明人： KIMURA SHOICHI , TAKAHASHI TOSHIHIKO , TAMURA ZENSUKE
IPC分类号： C10K1/04 , C10K1/20 , C10K1/34
摘要： A high temperature, high pressure raw coal gas containing hydrogen sulfide, ammonia, and tarry matter, is purified by contacting the raw coal gas with solid particles thereby cooling the raw coal gas to a temperature suitable for hydrogen sulfide removal and at the same time depositing the tarry matter onto the solid particles by condensation to recover the tarry matter from the raw coal gas, removing the hydrogen sulfide from the cooled and substantially tar-free coal gas, expanding the raw coal gas to a pressure suitable for ammonia decomposition, heating the expanded raw coal gas to a temperature suitable for ammonia decomposition by heat obtained by combusting the recovered tarry matter on the solid particles, thereby regenerating the solid particles for reuse, and then decomposing ammonia in the raw coal gas, thereby removing ammonia therefrom. A process for efficiently purifying raw coal gas by removing tarry matter, hydrogen sulfide and ammonia, including effectively utilizing the recovered tarry matter to produce heat while also effectively utilizing the energy obtained by expanding the coal gas through a pressure-reducing means such as an expansion turbine.

3. 发明专利

DE2824534A1 未知
公开(公告)号：DE2824534A1
公开(公告)日：1978-12-07
申请号：DE2824534
申请日：1978-06-05
申请人： HITACHI LTD
发明人： KIMURA SHOICHI , TAKAHASHI TASHIHIKO , TAMURA ZENSUKE
IPC分类号： B01D53/86 , C10K1/34 , C10K1/20 , B01D53/00
摘要： A refining process of a hot gas such as coal gas containing hydrogen sulfide and ammonia comprises steps of contacting the hot gas with a first catalyst comprising iron oxide to remove hydrogen sulfide, and then contacting the hot gas with a second catalyst comprising reduced iron made by reducing iron oxide prior to introducing the hot gas into the catalyst to remove ammonia. The refining process further includes steps of temperature adjustment of the gas directing to the first and second catalyst and the removal of hydrogen sulfide remaining in the hot gas after the removal of the ammonia with a third catalyst comprising iron oxide.

4. 发明专利

DE2759049A1 未知
公开(公告)号：DE2759049A1
公开(公告)日：1978-07-06
申请号：DE2759049
申请日：1977-12-30
申请人： HITACHI LTD
发明人： KIMURA SHOICHI , TAKAHASHI TOSHIHIKO
IPC分类号： C01B17/04
摘要： Hydrogen sulfide is removed from coal gas for gas turbine power generation and recovered as elemental sulfur by contacting a coal gas formed by gasification of coal with an iron oxide catalyst, thereby removing hydrogen sulfide from the coal gas and obtaining a desulfurized coal gas; regenerating the iron oxide catalyst of lowered desulfurization activity, thereby obtaining a regeneration off-gas containing sulfur dioxide; converting a portion of said desulfurized coal gas to reducing gas containing hydrogen; reacting the hydrogen of the resulting reducing gas with the sulfur dioxide in a portion of said regeneration off-gas, thereby producing hydrogen sulfide; reacting the resulting hydrogen sulfide with the sulfur dioxide in the remaining portion of the regeneration off-gas in the presence of a catalyst, thereby producing a gas containing elemental sulfur, and recovering the elemental sulfur from the gas.

5. 发明专利

DE2324401A1 Liquid aerating tower contg perforated trays - with bottom gas inlet and downward flow between trays and wall 未知
公开(公告)号：DE2324401A1
公开(公告)日：1974-12-12
申请号：DE2324401
申请日：1973-05-14
申请人： HITACHI LTD
发明人： FUKUMORU HIROMASA , KIMURA SHOICHI
IPC分类号： B01F3/04 , B01F7/00 , B01F15/06 , C02F3/20 , B01F5/06
摘要： A liq. aeration appts. comprises a vessel (tower) with bottom inlet pipe for the aerating gas a number of perforated plates or the like arranged at vertical intervals above the pipe, each (generally horizontal) plate has a downward hanging edge at a little distance from the vessel inner wall, thus forming a circulation passage between plate and wall. All plates may either be mounted on a vertical revolving shaft or suspended fixed from the vessel wall. Typical uses are for culture growth, gas absorption and reaction processes.

6. 发明专利

JPS5923562B2 失效
公开(公告)号：JPS5923562B2
公开(公告)日：1984-06-02
申请号：JP3419078
申请日：1978-03-27
申请人： HITACHI LTD
发明人： ODA CHIKAO , KIMURA SHOICHI , TAMURA ZENSUKE , YOSHIKAWA SEIICHI , SUMYA TOMOAKI
IPC分类号： C08F2/00 , C08F2/02 , C08F12/08

9. 发明专利

JPH08107139A INSULATING RING MEMBER AND SEMICONDUCTOR MANUFACTURING DEVICE PROVIDED THEREWITH 失效
公开(公告)号：JPH08107139A
公开(公告)日：1996-04-23
申请号：JP24142594
申请日：1994-10-05
申请人： HITACHI LTD , SUMITOMO METAL IND
发明人： TOMITA KAZUISHI , URUSHIYA HIROSHI , KIMURA SHOICHI , YOSHIDA MASAMICHI , SATO MINEICHI , MORI MIKIO
IPC分类号： H05H1/46 , H01L21/302 , H01L21/3065 , H01L21/68 , H01L21/683
摘要： PURPOSE: To provide an insulating ring member which prevents the side face of a wafer from being processed by plasma so as to reduce foreign objects produced by plasma and to improve the wafer in yield when the wafer is processed with plasma and a semiconductor manufacturing device equipped therewith. CONSTITUTION: An insulating ring member 3 is used in a processing chamber where a wafer 1 is processed with plasma and possessed of an inner circumferential face 3a corresponding to the side face 1a of the wafer 1, wherein a gap (t) between the side face 1a of the wafer 1 and the inner circumferential face 3a of the ring member 3 is set smaller than 1mm when the wafer 1 is mounted on an electrostatic chuck 2 as a specimen pad.

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