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    • 4. 发明专利
    • ION SOURCE
    • JPH02207438A
    • 1990-08-17
    • JP2740989
    • 1989-02-08
    • HITACHI LTD
    • KAWAGUCHI KOJIUMEMURA KAORUHABU TORU
    • H01J27/26H01J37/08
    • PURPOSE:To stabilize the title ion source and lengthen the service life by providing a means for adjusting the supply of a melt ionization material to a reservoir for melting and holding a material to be ionized. CONSTITUTION:A pressing jig 13 for fracturing an ampoule is touched onto a piston stopper 26 at the upper tip of a piston shaft 19 and thus the piston shaft 19 starts to rise together with the pressing jig 13. Then, an ion material reserved on a piston 25 is pushed out inside a reservoir 2 through the passages 27 and 28. In this case, the adjustment of the upward movement amount along a driving shaft 12 allows an ion material 14 to be controlled in the supply amount. The ion material can be thus supplied inside the reservoir without containing glass fragment, with the controlled supply amount. Furthermore, the ion material can be easily wetted to an emitter tip. Accordingly, it is possible to stabilize the ion source and lengthen the service life.
    • 6. 发明专利
    • LATTICE CONSTANT MEASURING INSTRUMENT
    • JPS62190453A
    • 1987-08-20
    • JP3084286
    • 1986-02-17
    • HITACHI LTD
    • TAJIMA TAKESHITAKANO YUKIOISHIBA TSUTOMUMATSUO AKIHIKOKAWAGUCHI KOJIODA ISAMU
    • G01N23/207
    • PURPOSE:To perform speedy, high-accuracy measurement by adjusting a standard sample and a sample to be measured automatically and independently as to a monochromator by swinging and tilting, and using a rough and a fine rotating mechanism and an angle detector fitted coaxially with a rotating shaft. CONSTITUTION:A screw moves in and out through the rotation of a motor 18 and a holder 21 where the standard sample 13 is fitted is rotated around a center 22 of rotation. Further, a screw 24 moves in and out through the rotation of a motor 23 and a sample 13 is swung or tilted around a center 25 as a fulcrum. The sample 14 to be measured is mounted on a moving table 30 which can be moved in an X direction 28 by an X-feed motor 27 and a ball screw and in a Y direction 29 by a Y-feed motor 29 and a ball screw, and the moving table 30 is mounted on the same slanting table 17 with the sample 13. The slanting table 17 is swung or tilted to a base 35 through the rotation of a pulse motor 33. A swing and tilt detector is fitted in parallel to the motor 33. Further, a rotary encoder 37 is coupled directly with the rotating shaft 36 which extends from the base 35 at right angles and is so structured as to rotate roughly and finely.
    • 8. 发明专利
    • LOW-TEMPERATURE SAMPLE STAGE
    • JPH03179734A
    • 1991-08-05
    • JP31749389
    • 1989-12-08
    • HITACHI LTD
    • KANETOMO MASABUMISAGARA KAZUHIKOKAWAGUCHI KOJIOGURO TAKAHIRONEMOTO TAKEO
    • H01L21/302H01L21/205H01L21/3065H01L21/31
    • PURPOSE:To lessen supply power to heaters at the time of temperature control in the vicinity of a room temperature and to decrease the consumption of liquefied gas in a sample stage, in which a sample arranged in a vacuum is subjected to temperature control at a low temperature by the balance of heat between the heaters and a cooling medium, by a method wherein the liquefied gas and gas for cooling use are subjected to selection and are led in the interior of the cooling tank of the sample stage. CONSTITUTION:A temperature control is performed by the balance of heat between a refrigerant, which is put in a cooling tank 6, and heaters 7. The tank 6 is formed into such a structure that liquefied gas and low-temperature cooling gas are subjected to selection and can be put in the interior of the tank 6 as the refrigerant. When a sample 5 is subjected to temperature control at a low temperature, the liquefied gas is selected by a valve 11 and the liquefied gas is directly introduced in the interior of the tank 6. Here, when the sample is subjected to temperature control at -120 deg.C, 300 W is needed. In case the sample is subjected to temperature control at a temperature of -100 deg.C or higher, the cooling gas is selected by a valve 11 and is led in the interior of the tank 6. The gas passes through the interior of a gas cooling tank 13 arranged in the midst of a piping 12 and is directly cooled with liquefied gas 14 in the tank 13.
    • 9. 发明专利
    • MEASURING INSTRUMENT FOR GRATING CONSTANT
    • JPS62223655A
    • 1987-10-01
    • JP6562486
    • 1986-03-26
    • HITACHI LTD
    • KAWAGUCHI KOJIISHIBA TSUTOMUTAKANO YUKIOTAJIMA TAKESHIMATSUO AKIHIKO
    • G01N23/207
    • PURPOSE:To easily attain restoration to an original state with good reproductivity even at the time of subsequent sample replacement ad the movement of a turntable by adjusting the axis of rotation of sample crystal at right angles to an X-ray beam. CONSTITUTION:Both X rays 12 and 13 emitted by an X-ray source 11 are made monochromatic by monochrometers 14 and 15 and then made incident on the sample crystal 16. The monochromatic X ray 17 is diffracted by the crystal 16 and incident on a detector 20 as a diffracted ray 19, which is measured. Then when the rotary part 40 of the turntable 22 is rotated by about 180 deg., the diffracted ray of an X-ray beam 18 is measured by a detector 21 as well as the X-ray beam 17. At this time, the quantity of displacement of the axis of rotation of the crystal 16 and variation in the diffraction intensity caused by the detector 21 are obtained as a diffraction intensity curve to obtain the grating constant of the sample crystal 16 as the fine quantity of variation in Bragg angle. Therefore, the restoration to the original state is easily attained with respect to the subsequent sample replacement, etc.