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1. 发明专利

DE69942158D1 未知
公开(公告)号：DE69942158D1
公开(公告)日：2010-04-29
申请号：DE69942158
申请日：1999-06-09
申请人： HITACHI LTD
发明人： KANNO SHUICHI , HONJI AKIO , YAMASHITA HISAO , AZUHATA SHIGERU , TAMATA SHIN , IRIE KAZUYOSHI
IPC分类号： B01D53/86 , B01J23/16 , B01J23/34 , B01J23/38 , B01J23/63 , B01J23/70
摘要： Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made in contact with a fluorine compound decomposition catalyst and a catalyst the decomposition oft least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst the decomposition oft least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which is liable to be absorbed by water or an alkaline aqueous solution, and a substance, such as CO, SO2F2 and N2O, formed by decomposition of the fluorine compound can also be decomposed.

2. 发明专利

DE60140514D1 未知
公开(公告)号：DE60140514D1
公开(公告)日：2009-12-31
申请号：DE60140514
申请日：2001-08-27
申请人： HITACHI LTD
发明人： TAMATA SHIN , KOUKUN RI , IRIE KAZUYOSHI , SHIBANO YOSHIKI , KANNO SHUICHI
IPC分类号： B01D53/34 , B01D53/68 , B01D53/14 , B01D53/70 , B01D53/86 , C01B9/08 , H01L21/302 , H01L21/3065
摘要： In a PFC decomposing apparatus according to the present invention, PFC contained in a discharged gas is decomposed in catalyst cartridge (3) packed with a catalyst containing 80% Al2O3 and 20% NiO. The discharged gas containing acid gases as a decomposition gas is cooled in cooling chamber (6) and led to discharged gas washing column (13), where the acid gases are removed. Mists of acid gases (SO3 mists or NOx mists) entrained in the discharged gas are separed in cyclone (16). Compressed air at about 0.1 Mpa is fed to ejector (24) through air feed pipe (56). The interior of ejector (24) is brought into a negative pressure state by the compressed air to such the discharged gas from cyclone (16) and ejector. Ejector (24) can reduce a frequency of maintenance inspection, as compared with a blower.

3. 发明专利

DE69829625D1 未知
公开(公告)号：DE69829625D1
公开(公告)日：2005-05-12
申请号：DE69829625
申请日：1998-11-09
申请人： HITACHI LTD , HITACHI ENG CO LTD , HITACHI KYOWA ENGINEERING CO
发明人： IRIE KAZUYOSHI , MORI TOSHIHIRO , YOKOYAMA HISAO , TOMIYAMA TAKAYUKI , TAKANO TOSHIHIDE , TAMATA SHIN , KANNO SHUICHI
IPC分类号： B01D53/86 , B01D53/14 , H01L21/00
摘要： An exhaust gas containing a perfluoride compound (PFC) and SiF4 is conducted into a silicon remover and contacted with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700 DEG C by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 by the catalyst. The exhaust gas containing HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In accordance with the present invention, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.

4. 发明专利

DE69841726D1 Verfahren, Katalysator und Vorrichtung zur Zersetzung fluorierter Verbindungen 未知
公开(公告)号：DE69841726D1
公开(公告)日：2010-07-29
申请号：DE69841726
申请日：1998-06-03
申请人： HITACHI LTD
发明人： KANNO SHUICHI , IKEDA SHINZOU , YASUDA KEN , YAMASHITA HISAO , AZUHATA SHIGERU , TAMATA SHIN , IRIE KAZUYOSHI
IPC分类号： B01D53/86 , A62D3/00 , A62D3/20 , A62D3/35 , A62D101/22 , A62D101/49

5. 发明专利

DE69829625T2 未知
公开(公告)号：DE69829625T2
公开(公告)日：2005-09-15
申请号：DE69829625
申请日：1998-11-09
申请人： HITACHI LTD , HITACHI ENG CO LTD , HITACHI KYOWA ENGINEERING CO
发明人： IRIE KAZUYOSHI , MORI TOSHIHIRO , YOKOYAMA HISAO , TOMIYAMA TAKAYUKI , TAKANO TOSHIHIDE , TAMATA SHIN , KANNO SHUICHI
IPC分类号： B01D53/86 , B01D53/14 , H01L21/00
摘要： An exhaust gas containing a perfluoride compound (PFC) and SiF4 is conducted into a silicon remover and contacted with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700 DEG C by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 by the catalyst. The exhaust gas containing HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In accordance with the present invention, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.

6. 发明专利

DE69820926T2 未知
公开(公告)号：DE69820926T2
公开(公告)日：2004-09-02
申请号：DE69820926
申请日：1998-06-03
申请人： HITACHI LTD
发明人： KANNO SHUICHI , IKEDA SHINZOU , YASUDA KEN , YAMASHITA HISAO , AZUHATA SHIGERU , TAMATA SHIN , IRIE KAZUYOSHI
IPC分类号： A62D3/20 , A62D3/35 , A62D101/22 , A62D101/49 , B01D53/86 , A62D3/00
摘要： A method of decomposing fluorine compounds, wherein a gas flow containing said fluorine compounds is brought into contact with a catalyst in the presence of steam at a temperature in the range of 200 to 800 DEG C to decompose the fluorine compounds to hydrogen fluoride, wherein said fluorine compounds comprise a compound of fluorine and carbon, a compound of fluorine, carbon and hydrogen, a compound of fluorine, carbon, hydrogen and oxygen, a compound of fluorine and nitrogen and/or a compound of fluorine and sulphur, and said catalyst contains aluminium oxide and at least one of the elements Ti, Fe, Sn, Co, Zr, Ce, Si and Pt; said Ti, Fe, Sn, Co, Zr, Ce and Si being in the form of an oxide or of a complex compound with Al.

7. 发明专利

DE69820926D1 未知
公开(公告)号：DE69820926D1
公开(公告)日：2004-02-12
申请号：DE69820926
申请日：1998-06-03
申请人： HITACHI LTD
发明人： KANNO SHUICHI , IKEDA SHINZOU , YASUDA KEN , YAMASHITA HISAO , AZUHATA SHIGERU , TAMATA SHIN , IRIE KAZUYOSHI
IPC分类号： A62D3/20 , A62D3/35 , A62D101/22 , A62D101/49 , B01D53/86 , A62D3/00
摘要： A method of decomposing fluorine compounds, wherein a gas flow containing said fluorine compounds is brought into contact with a catalyst in the presence of steam at a temperature in the range of 200 to 800 DEG C to decompose the fluorine compounds to hydrogen fluoride, wherein said fluorine compounds comprise a compound of fluorine and carbon, a compound of fluorine, carbon and hydrogen, a compound of fluorine, carbon, hydrogen and oxygen, a compound of fluorine and nitrogen and/or a compound of fluorine and sulphur, and said catalyst contains aluminium oxide and at least one of the elements Ti, Fe, Sn, Co, Zr, Ce, Si and Pt; said Ti, Fe, Sn, Co, Zr, Ce and Si being in the form of an oxide or of a complex compound with Al.

8. 发明公开

EP1205234A4 METHOD AND APPARATUS FOR DISPOSING OF FLUORINE-CONTAINING COMPOUND BY DECOMPOSITION 有权
标题翻译：程序销毁含氟化物的化合物分解
公开(公告)号：EP1205234A4
公开(公告)日：2003-04-16
申请号：EP99923975
申请日：1999-06-09
申请人： HITACHI LTD
发明人： KANNO SHUICHI , HONJI AKIO , YAMASHITA HISAO , AZUHATA SHIGERU , TAMATA SHIN , IRIE KAZUYOSHI
IPC分类号： B01D53/86 , B01J23/34 , B01J23/38 , B01J23/63 , B01J23/70 , B01J23/16
CPC分类号： B01J23/34 , B01D53/8659 , B01J23/38 , B01J23/63 , B01J23/70 , Y02C20/10 , Y02C20/30
摘要： A method which comprises contacting a fluorine-containing compound such as C2F6, CF4, CHF3, SF6, NF3 or the like with a catalyst for the decomposition of a fluorine-containing compound together with a catalyst for the decomposition of at least one of CO, SO2F2 and N2O in the presence of water and optionally oxygen. A catalyst for the decomposition of at least one of CO, SO2F2 and N2O preferably comprises at least one of Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of metal or oxide. By the treatment according to the method, a fluorine atom in a fluorine-containing compound can be converted to HF, which is easily absorbed by water or an aqueous alkaline solution, and substances formed by the decomposition of a fluorine-containing compound, such as CO, SO2F2 and N2O, can also be decomposed.
摘要翻译：氟化合物：如C2F6，CF4，CHF3，SF6和NF3，在用氟化合物分解催化剂和催化剂分解CO，SO2F2和N2O的在水的存在下或在水的存在常常至少一个和接触由氧气。催化剂中的分解往往至少CO，N 2 O的SO2F2一个，优选含有至少一种在一个金属或氧化物的形式从钯，铂，铜，锰，铁，钴，铑，铱和Au中。。根据本发明，氟化合物可转化为HF，所有这易于由水或碱性wässrige溶液吸收，和的物质，颜色：如CO，SO2F2和N2O，形成在由氟化合物的分解，因此可以是分解。

9. 发明专利

JP2007275764A Method and apparatus for decomposing pfc gas produced in aluminum refining 审中-公开
标题翻译：用于分解在铝精炼中生产的PFC气体的方法和装置
公开(公告)号：JP2007275764A
公开(公告)日：2007-10-25
申请号：JP2006105244
申请日：2006-04-06
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TAMADA SHIN , KUROKAWA HIDEAKI , IRIE KAZUYOSHI
IPC分类号： B01D53/70 , B01D53/68 , B01D53/86 , F27D17/00
CPC分类号： Y02C20/30
摘要： PROBLEM TO BE SOLVED: To provide a method for decomposing a perfluorocarbon (PFC) gas produced in aluminum refining capable of separating a PFC gas from other exhaust gases and performing decomposition processing with a small amount of energy, and an apparatus therefor. SOLUTION: The method for decomposing the PFC gas produced in the aluminum refining separates the PFC gas from the exhaust gas generated in an aluminum refining process in a PFC gas recovery apparatus 20, and decomposes the separated PFC gas in a PFC gas decomposition apparatus 30. As for pre-processing for separating the PFC gas, it is preferable that a solid content, dust and/or oxide gas present in the exhaust gas is/are removed in an exhaust gas processing apparatus 10. The separation of the PFC gas is performed by separating the PFC gas by, e.g. a selective adsorption method, and the decomposition of the PFC gas is performed by, for example, a catalytic process. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种分解在能够从其他排气分离PFC气体并以少量能量进行分解处理的铝精炼中产生的全氟化碳（PFC）气体的方法及其装置。解决方案：在铝精炼中产生的PFC气体的分解方法将PFC气体与在PFC气体回收装置20中的铝精炼过程中产生的废气分离，并分解PFC气体分解中分离的PFC气体装置30.对于分离PFC气体的预处理，优选在排气处理装置10中除去存在于排气中的固体成分，灰尘和/或氧化物气体。PFC的分离通过例如分离PFC气体来执行气体选择性吸附方法，PFC气体的分解通过例如催化方法进行。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JPH11244656A TREATMENT OF FLUORINE COMPOUND-CONTAINING GAS AND CATALYST 失效
公开(公告)号：JPH11244656A
公开(公告)日：1999-09-14
申请号：JP4682498
申请日：1998-02-27
申请人： HITACHI LTD
发明人： SUGANO SHUICHI , IKEDA SHINZO , YASUDA TAKESHI , YAMASHITA HISAO , AZUHATA SHIGERU , TAMADA SHIN , IRIE KAZUYOSHI
IPC分类号： B01D53/68 , B01D53/86 , B01J23/06 , B01J23/755
摘要： PROBLEM TO BE SOLVED: To efficiently decompose and treat a fluorine compound selected from CF4 , CHF3 , C3 F8 and C4 F8 . SOLUTION: A gas stream containing the fluorine compound selected from CF4 , CHF3 , C3 F8 , and C4 F8 is brought into contact with either one of catalysts consisting of Al and Zn, Al and Ni, or Al, Ni and Zn at about 200-800 deg.C under the presence of water vapor. Thus, the fluorine in the gas stream is efficiently converted into hydrogen fluoride at relatively lower temperatures.

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