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    • 2. 发明专利
    • DE69331692D1
    • 2002-04-18
    • DE69331692
    • 1993-09-14
    • HITACHI LTD
    • UMEMURA SHINICHIROKAWABATA KENICHIUCHIDA KENKOYASUDA KENJIWADA YASUOHIRAIWA ATSUSHI
    • A61B17/22A61N7/00A61N7/02
    • This invention is directed to accomplish an ultrasonic remedial apparatus for generating a living body action such as cavitation suitable for remedy of a malignant tumor, a thrombus and a calculus, an ultrasonic wave diagnostic apparatus for generating cavitation to enhance an ultrasonic echo image of a blood stream, etc., and utilizing its reflection capacity, an ultrasonic chemical reaction promotion apparatus, an ultrasonic washing apparatus, an ultrasonic sterilizer, etc., by providing an ultrasonic irradiation apparatus for efficiently generating acoustic cavitation. Irradiation focus code signals for defining focal positions and sound pressure distribution shapes of irradiation sound fields of a fundamental frequency waves and harmonics are applied from a main control circuit to driving phase generation circuits, respectively. The driving phases thus generated are applied to driving signal generation circuits and the resulting driving signals are applied to device driving circuits, respectively, so that a group of the fundamental frequency devices and a group of harmonic devices are driven, respectively. The driving phases are controlled so that the fundamental frequency wave and the harmonic waves are superposed with one another in a medium near the focus, and acoustic cavitation is generated locally and efficiently.
    • 5. 发明专利
    • DE69331692T2
    • 2002-10-24
    • DE69331692
    • 1993-09-14
    • HITACHI LTD
    • UMEMURA SHINICHIROKAWABATA KENICHIUCHIDA KENKOYASUDA KENJIWADA YASUOHIRAIWA ATSUSHI
    • A61B17/22A61N7/00A61N7/02
    • This invention is directed to accomplish an ultrasonic remedial apparatus for generating a living body action such as cavitation suitable for remedy of a malignant tumor, a thrombus and a calculus, an ultrasonic wave diagnostic apparatus for generating cavitation to enhance an ultrasonic echo image of a blood stream, etc., and utilizing its reflection capacity, an ultrasonic chemical reaction promotion apparatus, an ultrasonic washing apparatus, an ultrasonic sterilizer, etc., by providing an ultrasonic irradiation apparatus for efficiently generating acoustic cavitation. Irradiation focus code signals for defining focal positions and sound pressure distribution shapes of irradiation sound fields of a fundamental frequency waves and harmonics are applied from a main control circuit to driving phase generation circuits, respectively. The driving phases thus generated are applied to driving signal generation circuits and the resulting driving signals are applied to device driving circuits, respectively, so that a group of the fundamental frequency devices and a group of harmonic devices are driven, respectively. The driving phases are controlled so that the fundamental frequency wave and the harmonic waves are superposed with one another in a medium near the focus, and acoustic cavitation is generated locally and efficiently.
    • 10. 发明公开
    • METHOD AND DEVICE FOR MEASURING DEFECT OF CRYSTAL ON CRYSTAL SURFACE
    • 方法和装置的晶体缺陷对晶体表面测量
    • EP0887621A4
    • 2000-12-20
    • EP96906053
    • 1996-03-15
    • HITACHI LTDHITACHI TOKYO ELECTRONICS
    • TAKEDA KAZUOISHIDA HIDETSUGUHIRAIWA ATSUSHITAJIMA TAKESHIWATASE SHINICHIRO
    • G01N21/95G01N21/47
    • G01N21/9505
    • In a measuring method by which internal defects of a crystal are detected using scattered light, it is made possible to measure the size, depth from the surface and position of each internal defect of the sample with a resolution shorter than the wavelength of the scattered light. The sample is scanned with two light beams which have different wavelengths penetrating the sample to different depths, one being more than three times as large as the other, the intensity of scattered light by an internal defect for either wavelength is measured, the size of the defect is found from the intensity of the scattered light of the longer wavelength, and the depth and position of the defect are found from the ratio of the intensity of the scattered light of the long wavelength to that of the other wavelength. The found depth, position, and size of the defect are displayed in the form of in-plane distribution of a wafer. According to the wide-area surface measurement a camera is moved to the position of a specific defect of the defects detected, the defect is observed by scanning the sample with the two light beams having different wavelengths and the depth, position, and size of the defect are found similarly from the picture data obtained from the scattered light of two wavelengths. By the method of this invention, the sizes, depths, and positions of the defects can be measured by examining the entire surface of the sample and by observing the image of the defect one by one.