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    • 1. 发明专利
    • INDUCTIVE THIN FILM MAGNETIC HEAD
    • JP2002117507A
    • 2002-04-19
    • JP2000313118
    • 2000-10-06
    • HITACHI LTD
    • NARUMI SHUNICHIOKADA TOSHIHIROETO KIMITOSHIYOSHIDA NOBUOFUYAMA MORIAKI
    • G11B5/31
    • PROBLEM TO BE SOLVED: To manufacture an inductive thin film magnetic head having a track width of 0.5 μm or lower in high yield in order to enhance the recording density of a magnetic disk device. SOLUTION: In this inductive thin film magnetic head, an upper magnetic core is formed by a frame plating method using a frame formed by a KrF or ArF excimer stepper, and thus the film thickness of the upper magnetic core is set equal to 3.0 μm or higher, and the width of the lower part of the upper magnetic core immediately after plating is set equal to 0.5 μm or lower. Then, by using at least the tip of the upper magnetic core as a mask, the area of a lower magnetic core uncovered with the upper magnetic core in the vicinity of a floating surface is eliminated by ion milling or the like (trimming). Since the width of the tip of the upper magnetic core is set equal to 0.5 μm or lower immediately after plating, the time and the number of trimming are reduced from a lateral direction to adjust a recording track width, that is, variance in recording widths is reduced.