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1. 发明授权

US09146156B2 Light source tracking in optical metrology system 有权
标题翻译：光学测量系统中的光源跟踪
公开(公告)号：US09146156B2
公开(公告)日：2015-09-29
申请号：US13285712
申请日：2011-10-31
申请人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
发明人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
IPC分类号： G01B11/26 , G01J3/02 , G01N21/47 , G01J3/06 , G01J3/10
CPC分类号： G01J3/0264 , G01B2210/56 , G01J3/0208 , G01J3/0278 , G01J3/06 , G01J3/10 , G01N21/4785
摘要： The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.
摘要翻译：本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

2. 发明申请

US20130033704A1 LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM 有权
标题翻译：光学系统系统中的光源跟踪
公开(公告)号：US20130033704A1
公开(公告)日：2013-02-07
申请号：US13285712
申请日：2011-10-31
申请人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
发明人： Guorong V. Zhuang , Shankar Krishnan , Johannes D. de Veer , Klaus Flock , David Y. Wang , Lawrence D. Rotter
IPC分类号： G01C1/00
CPC分类号： G01J3/0264 , G01B2210/56 , G01J3/0208 , G01J3/0278 , G01J3/06 , G01J3/10 , G01N21/4785
摘要： The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.
摘要翻译：本发明可以包括将诊断样本加载到样本台上，将来自设置在多轴平台上的照明源的光聚焦到诊断样本上，利用检测器收集从诊断样品的表面反射的一部分光，其中照明源和检测器通过光学系统光学直接耦合，获取指示来自诊断样本的照明源位置漂移的一组诊断参数，通过比较所获取的诊断参数集合来确定照明源位置漂移的大小到在先前测量的对准条件下从诊断样本获得的初始参数集合，确定照明源位置漂移的方向; 以及提供照明源位置调整参数，其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

3. 发明申请

US20110310388A1 DISCRETE POLARIZATION SCATTEROMETRY 有权
标题翻译：离散极化分析
公开(公告)号：US20110310388A1
公开(公告)日：2011-12-22
申请号：US13108892
申请日：2011-05-16
申请人： Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
发明人： Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
IPC分类号： G01J4/00
CPC分类号： G02B27/141 , G01N21/474 , G01N21/4788 , G01N2021/4792 , G02B27/145 , G03F7/70633
摘要： Systems and methods for discrete polarization scatterometry are provided.
摘要翻译：提供了离散极化散射法的系统和方法。

4. 发明授权

US08896832B2 Discrete polarization scatterometry 有权
标题翻译：离散极化散射法
公开(公告)号：US08896832B2
公开(公告)日：2014-11-25
申请号：US13108892
申请日：2011-05-16
申请人： Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
发明人： Andrew V. Hill , Amnon Manassen , Daniel Kandel , Vladimir Levinski , Joel Seligson , Alexander Svizher , David Y. Wang , Lawrence D. Rotter , Johannes D. de Veer
IPC分类号： G01J4/00 , G02B27/14 , G01N21/47
CPC分类号： G02B27/141 , G01N21/474 , G01N21/4788 , G01N2021/4792 , G02B27/145 , G03F7/70633
摘要： Systems and methods for discrete polarization scatterometry are provided.
摘要翻译：提供了离散极化散射法的系统和方法。

5. 发明申请

US20100328670A1 SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION 失效
标题翻译：用于执行光热测量和放松补偿的系统和方法
公开(公告)号：US20100328670A1
公开(公告)日：2010-12-30
申请号：US12494734
申请日：2009-06-30
申请人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
发明人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
IPC分类号： G01N21/55
CPC分类号： G01N21/1717 , G01N2021/1731 , G01N2021/1761
摘要： A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
摘要翻译：公开了一种用于进行样品的光热测量和松弛补偿的装置和方法。该装置可以包括探针束源，泵浦束源，样本和检测器阵列。方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量定位在样品上以周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

6. 发明授权

US08643841B1 Angle-resolved spectroscopic instrument 有权
标题翻译：角度分辨光谱仪
公开(公告)号：US08643841B1
公开(公告)日：2014-02-04
申请号：US13028245
申请日：2011-02-16
申请人： Lawrence D. Rotter , David Y. Wang
发明人： Lawrence D. Rotter , David Y. Wang
IPC分类号： G01J4/00 , G01J3/28
CPC分类号： G01J3/0208 , G01J3/36 , G01N2021/213
摘要： A method for optically inspecting a specimen by directing a probe beam onto the specimen at varying angle of incidence and azimuth angle, thereby producing a reflected probe beam, gathering the reflected probe beam, separating the reflected probe beam as a function of wavelength, adding astigmatism to separate the reflected probe beam as a function of at least one of the angle of incidence and the azimuth angle, and evaluating the specimen based at least on changes in the reflected probe beam as a function of wavelength of the reflected probe beam and at least one of the angle of incidence and the azimuth angle.
摘要翻译：通过以不同的入射角和方位角将探测光束引导到样本上，从而产生反射的探测光束，聚集反射的探测光束，将反射的探测光束分离为波长的函数，增加像散以根据入射角和方位角中的至少一个来分离反射的探测光束，并且至少基于反射的探测光束的变化作为反射的探测光束的波长的函数来评估样本，并且至少一个入射角和方位角。

7. 发明授权

US08111399B2 System and method for performing photothermal measurements and relaxation compensation 失效
标题翻译：进行光热测量和放松补偿的系统和方法
公开(公告)号：US08111399B2
公开(公告)日：2012-02-07
申请号：US12494734
申请日：2009-06-30
申请人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
发明人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
IPC分类号： G01N21/55
CPC分类号： G01N21/1717 , G01N2021/1731 , G01N2021/1761
摘要： A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
摘要翻译：公开了一种用于进行样品的光热测量和松弛补偿的装置和方法。该装置可以包括探针束源，泵浦束源，样本和检测器阵列。方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量定位在样品上以周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

8. 发明申请

US20150363010A1 FINGER-DRIVEN COMPUTER MOUSE 审中-公开
标题翻译：指尖驱动电脑鼠标
公开(公告)号：US20150363010A1
公开(公告)日：2015-12-17
申请号：US14831817
申请日：2015-08-20
申请人： David Y. Wang
发明人： David Y. Wang
IPC分类号： G06F3/0354
CPC分类号： G06F3/03543 , G06F2203/0333 , G06F2203/0335
摘要： The present invention relates to a finger-driven computer mouse. The finger-driven computer mouse includes a mouse housing and finger retention device adjacent thereto. The user inserts his or her finger tips in the finger retention device and can position the mouse across a flat surface by actions of the fingers except the thumb which is used to operate mouse buttons arranged on a side surface. The finger-driven mouse allows the wrist and hand muscles to be in a relaxed, natural posture.
摘要翻译：本发明涉及一种手指式计算机鼠标。手指驱动的计算机鼠标包括与其相邻的鼠标外壳和手指保持装置。用户将他或她的指尖插入手指保持装置中，并且可以通过除了用于操作布置在侧表面上的鼠标按钮的拇指之外的手指的动作将鼠标定位在平坦表面上。手指驱动的鼠标允许手腕和手部肌肉处于轻松自然的姿势。

9. 发明授权

US07190460B2 Focusing optics for small spot optical metrology 有权
标题翻译：聚焦光学用于小光点光学测量
公开(公告)号：US07190460B2
公开(公告)日：2007-03-13
申请号：US10695007
申请日：2003-10-28
申请人： David Y. Wang
发明人： David Y. Wang
IPC分类号： G01N21/47
CPC分类号： G01N21/55 , G02B17/0615
摘要： A system for focusing broadband light within a reflectometer includes a concave spherical mirror for gathering light from the surface of a sample under inspection. The concave spherical mirror projects the received light to a convex spherical mirror. The combination of the two mirrors captures the light diverging from the sample and collimates the light into parallel rays. The light can then be passed through an aperture prior to entering a detector. Each of the two mirrors is fabricated as an off-axis section of a spherical mirror and positioned to form a partial Schwarzschild design without the associated problem of a central obscuration.
摘要翻译：用于将宽带光聚焦在反射计内的系统包括用于从被检查样品的表面收集光的凹球面镜。凹球面镜将接收的光投射到凸球面镜。两个镜子的组合捕获从样品发散的光并将光准直成平行光线。然后可以在进入检测器之前将光通过孔。两个反射镜中的每一个被制造为球面镜的离轴部分并且被定位成形成部分Schwarzschild设计，而没有相关的中心遮蔽问题。

10. 发明授权

US07020227B1 Method and apparatus for high-speed clock data recovery using low-speed circuits 失效
标题翻译：使用低速电路进行高速时钟数据恢复的方法和装置
公开(公告)号：US07020227B1
公开(公告)日：2006-03-28
申请号：US10161116
申请日：2002-05-31
申请人： David Y. Wang , Jyn-Bang Shyu , Yu-Chi Cheng
发明人： David Y. Wang , Jyn-Bang Shyu , Yu-Chi Cheng
IPC分类号： H04L7/00
CPC分类号： H04L7/0337 , H04L7/0025
摘要： A clock data recovery (CDR) circuit that can be used for recovering data from a high-speed serial transmission using components that operate at a fraction of the data speed. The CDR consists of a phase detector, an averaging circuit and a phase interpolator. The phase detector samples each data bit at its midpoint and at its transitional region and then compares the two samples to determine whether the sampling clock, which is generated by a phase interpolator, is leading or lagging the data stream. The averaging circuit filters out the high frequency jitters in the phase detector output and then passes the filtered signals on to the phase interpolator for phase selection. The phase interpolator uses the filtered signals from the averaging circuit as a guide in the selection of an output clock phase that minimizes the phase difference between the output clock and the incoming data.
摘要翻译：时钟数据恢复（CDR）电路，可用于使用以数据速度的一小部分运行的组件从高速串行传输中恢复数据。 CDR由相位检测器，平均电路和相位内插器组成。相位检测器在其中点和其过渡区域对每个数据位进行采样，然后比较两个采样，以确定由相位内插器产生的采样时钟是引导还是落后于数据流。平均电路滤除相位检测器输出中的高频抖动，然后将滤波的信号传递到相位内插器进行相位选择。相位插值器使用来自平均电路的滤波信号作为选择输出时钟相位的指导，其使输出时钟和输入数据之间的相位差最小化。

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