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    • 4. 发明授权
    • Chemical-mechanical-polishing system with continuous filtration
    • 化学机械抛光系统连续过滤
    • US06244929B1
    • 2001-06-12
    • US09664862
    • 2000-09-19
    • Richard D. RussDaniel Thomas
    • Richard D. RussDaniel Thomas
    • B24B4900
    • B23Q11/1069B24B37/04B24B57/02
    • A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two input valves have input ports connected to the slurry distribution system and output ports respectively connected to the filters for filtering. Two output valves have input ports respectively connected to the filters for receiving filtered slurry and output ports connected to the polisher. Two backflush valves have input ports connected to the deionized water supply and output ports respectively connected to backflush with deionized water; the output ports are also respectively connected to the input ports of the two output valves. Two drain valves have input ports respectively connected to the filters for receiving backflushed fluid and output ports connected to the drain. A pressure sensor disposed to sense pressure of slurry across the filters provide pressure indications which are used by control circuitry to open and close said valves to filter slurry or backflush the filters.
    • 具有浆料分配系统,抛光机,去离子水供应和排水管的化学机械抛光系统包括浆料过滤系统。 过滤系统具有两个过滤器,用于交替过滤浆料中的颗粒并用去离子水反冲洗。 两个输入阀具有连接到浆料分配系统的输入端口和分别连接到过滤器的输出端口用于过滤。 两个输出阀具有分别连接到过滤器的输入端口,用于接收连接到抛光机的过滤浆料和输出端口。 两个反吹阀具有连接到去离子水供应和输出端口的输入端口,分别连接到用去离子水反冲洗; 输出端口也分别连接到两个输出阀的输入端口。 两个排水阀具有分别连接到过滤器的输入端口,用于接收反冲洗流体和连接到排水管的输出端口。 设置用于感测穿过过滤器的浆料压力的压力传感器提供压力指示,其由控制电路用于打开和关闭所述阀以过滤浆液或反冲洗过滤器。
    • 5. 发明授权
    • Chemical-mechanical-polishing system with continuous filtration
    • 化学机械抛光系统连续过滤
    • US06165048A
    • 2000-12-26
    • US189701
    • 1998-11-10
    • Richard D. RussDaniel Thomas
    • Richard D. RussDaniel Thomas
    • B01D29/60B01D29/66B01D36/00B01D37/04B23Q11/10B24B37/04B24B57/02H01L21/304B24B49/00
    • B23Q11/1069B24B37/04B24B57/02
    • A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two input valves have input ports connected to the slurry distribution system and output ports respectively connected to the filters for filtering. Two output valves have input ports respectively connected to the filters for receiving filtered slurry and output ports connected to the polisher. Two backflush valves have input ports connected to the deionized water supply and output ports respectively connected to backflush with deionized water; the output ports are also respectively connected to the input ports of the two output valves. Two drain valves have input ports respectively connected to the filters for receiving backflushed fluid and output ports connected to the drain. A pressure sensor disposed to sense pressure of slurry across the filters provide pressure indications which are used by control circuitry to open and close said valves to filter slurry or backflush the filters.
    • 具有浆料分配系统,抛光机,去离子水供应和排水管的化学机械抛光系统包括浆料过滤系统。 过滤系统具有两个过滤器,用于交替过滤浆料中的颗粒并用去离子水反冲洗。 两个输入阀具有连接到浆料分配系统的输入端口和分别连接到过滤器的输出端口用于过滤。 两个输出阀具有分别连接到过滤器的输入端口,用于接收连接到抛光机的过滤浆料和输出端口。 两个反吹阀具有连接到去离子水供应和输出端口的输入端口,分别连接到用去离子水反冲洗; 输出端口也分别连接到两个输出阀的输入端口。 两个排水阀具有分别连接到过滤器的输入端口,用于接收反冲洗流体和连接到排水管的输出端口。 设置用于感测穿过过滤器的浆料压力的压力传感器提供压力指示,其由控制电路用于打开和关闭所述阀以过滤浆液或反冲洗过滤器。
    • 10. 发明申请
    • HEADLIGHT WITH DIRECTED FLOW HEAT SINK
    • 具有指向流动热量的头灯
    • US20120314428A1
    • 2012-12-13
    • US13324803
    • 2011-12-13
    • Daniel ThomasJohn TepperAustin Crowder
    • Daniel ThomasJohn TepperAustin Crowder
    • F21V29/00
    • F21V29/83F21V21/084F21V29/60F21V29/74F21V29/80
    • A headlight having a housing, a light assembly, at least one heat sink, and an air mover. The housing has a front end, a rear end, an air inlet, an air outlet, an intake chamber in fluid communication with the air inlet, an exhaust chamber in fluid communication with the air outlet, and a passageway establishing fluid communication between the intake chamber and the exhaust chamber. The passageway is positioned forward of both the air inlet opening and the air outlet opening. The heat sink is positioned in at least one of the intake chamber and the exhaust chamber. The air mover is supported by the housing in such a way as to move air into the housing through the air inlet, through the intake chamber, over the heat sink, through the exhaust chamber, and out of the housing through the air outlet.
    • 具有壳体,灯组件,至少一个散热器和鼓风机的头灯。 壳体具有前端,后端,空气入口,空气出口,与空气入口流体连通的进气室,与空气出口流体连通的排气室,以及在进气口之间建立流体连通的通道 室和排气室。 通道位于空气入口和出气口两侧。 散热器位于进气室和排气室中的至少一个中。 空气移动器由壳体支撑,以便通过进气口,通过进气室将空气进入壳体,在散热器上方,通过排气室,并通过空气出口从壳体中移出。