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1. 发明授权

US06244929B1 Chemical-mechanical-polishing system with continuous filtration 失效
标题翻译：化学机械抛光系统连续过滤
公开(公告)号：US06244929B1
公开(公告)日：2001-06-12
申请号：US09664862
申请日：2000-09-19
申请人： Richard D. Russ , Daniel Thomas
发明人： Richard D. Russ , Daniel Thomas
IPC分类号： B24B4900
CPC分类号： B23Q11/1069 , B24B37/04 , B24B57/02
摘要： A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two input valves have input ports connected to the slurry distribution system and output ports respectively connected to the filters for filtering. Two output valves have input ports respectively connected to the filters for receiving filtered slurry and output ports connected to the polisher. Two backflush valves have input ports connected to the deionized water supply and output ports respectively connected to backflush with deionized water; the output ports are also respectively connected to the input ports of the two output valves. Two drain valves have input ports respectively connected to the filters for receiving backflushed fluid and output ports connected to the drain. A pressure sensor disposed to sense pressure of slurry across the filters provide pressure indications which are used by control circuitry to open and close said valves to filter slurry or backflush the filters.
摘要翻译：具有浆料分配系统，抛光机，去离子水供应和排水管的化学机械抛光系统包括浆料过滤系统。过滤系统具有两个过滤器，用于交替过滤浆料中的颗粒并用去离子水反冲洗。两个输入阀具有连接到浆料分配系统的输入端口和分别连接到过滤器的输出端口用于过滤。两个输出阀具有分别连接到过滤器的输入端口，用于接收连接到抛光机的过滤浆料和输出端口。两个反吹阀具有连接到去离子水供应和输出端口的输入端口，分别连接到用去离子水反冲洗; 输出端口也分别连接到两个输出阀的输入端口。两个排水阀具有分别连接到过滤器的输入端口，用于接收反冲洗流体和连接到排水管的输出端口。设置用于感测穿过过滤器的浆料压力的压力传感器提供压力指示，其由控制电路用于打开和关闭所述阀以过滤浆液或反冲洗过滤器。

2. 发明授权

US06165048A Chemical-mechanical-polishing system with continuous filtration 失效
标题翻译：化学机械抛光系统连续过滤
公开(公告)号：US06165048A
公开(公告)日：2000-12-26
申请号：US189701
申请日：1998-11-10
申请人： Richard D. Russ , Daniel Thomas
发明人： Richard D. Russ , Daniel Thomas
IPC分类号： B01D29/60 , B01D29/66 , B01D36/00 , B01D37/04 , B23Q11/10 , B24B37/04 , B24B57/02 , H01L21/304 , B24B49/00
CPC分类号： B23Q11/1069 , B24B37/04 , B24B57/02
摘要： A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two input valves have input ports connected to the slurry distribution system and output ports respectively connected to the filters for filtering. Two output valves have input ports respectively connected to the filters for receiving filtered slurry and output ports connected to the polisher. Two backflush valves have input ports connected to the deionized water supply and output ports respectively connected to backflush with deionized water; the output ports are also respectively connected to the input ports of the two output valves. Two drain valves have input ports respectively connected to the filters for receiving backflushed fluid and output ports connected to the drain. A pressure sensor disposed to sense pressure of slurry across the filters provide pressure indications which are used by control circuitry to open and close said valves to filter slurry or backflush the filters.
摘要翻译：具有浆料分配系统，抛光机，去离子水供应和排水管的化学机械抛光系统包括浆料过滤系统。过滤系统具有两个过滤器，用于交替过滤浆料中的颗粒并用去离子水反冲洗。两个输入阀具有连接到浆料分配系统的输入端口和分别连接到过滤器的输出端口用于过滤。两个输出阀具有分别连接到过滤器的输入端口，用于接收连接到抛光机的过滤浆料和输出端口。两个反吹阀具有连接到去离子水供应和输出端口的输入端口，分别连接到用去离子水反冲洗; 输出端口也分别连接到两个输出阀的输入端口。两个排水阀具有分别连接到过滤器的输入端口，用于接收反冲洗流体和连接到排水管的输出端口。设置用于感测穿过过滤器的浆料压力的压力传感器提供压力指示，其由控制电路用于打开和关闭所述阀以过滤浆液或反冲洗过滤器。

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