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    • 9. 发明授权
    • Method and apparatus for inspecting defects of semiconductor device
    • 用于检查半导体器件缺陷的方法和装置
    • US08385627B2
    • 2013-02-26
    • US11500979
    • 2006-08-09
    • Tadanobu TobaShuji KikuchiYuichi SakuraiWen Li
    • Tadanobu TobaShuji KikuchiYuichi SakuraiWen Li
    • G06K9/00G06K7/10G01B5/28G06F11/30H04N3/14G01N21/00
    • G06T7/0004G06T2207/30148
    • When an inspection apparatus of a semiconductor device repeatedly executes computation of prescribed area data, such as image processing for detecting defects, procedures for commanding, data load, computation, and data store need to be repeated the number of times of the computation. This may impose a limitation on the speeding up of the operation. In addition, when performing parallel computation by a high-capacity image processing system for handling minute images, a lot of processors are needed, resulting in an increase in cost. In order to solve the above-mentioned problems, in the invention, an inspection apparatus of a semiconductor device includes a data memory including an access section which is capable of reading and writing simultaneously, a plurality of numerical computation units, a connector for connecting the data memory and the numerical computation units, a controller for collectively controlling the contents of processing by the plurality of numerical computation units, another connector for connecting the numerical computation units and the controller, and a data transfer controller for controlling data transfer between the numerical computation units.
    • 当半导体装置的检查装置重复执行规定区域数据的计算时,例如用于检测缺陷的图像处理,命令,数据加载,计算和数据存储的过程需要重复计算次数。 这可能对操作的加速施加限制。 此外,当通过大容量图像处理系统执行并行计算以处理微小图像时,需要许多处理器,导致成本增加。 为了解决上述问题,在本发明中,半导体装置的检查装置包括数据存储器,该数据存储器包括能够同时读写的访问部分,多个数值计算单元,连接器 数据存储器和数值计算单元,用于共同控制多个数值计算单元的处理内容的控制器,用于连接数值计算单元和控制器的另一连接器,以及用于控制数值计算之间的数据传送的数据传输控制器 单位。