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1. 发明授权

US06653988B2 Parallel resonance whirl antenna 有权
公开(公告)号：US06653988B2
公开(公告)日：2003-11-25
申请号：US10185676
申请日：2002-06-27
申请人： Gi Chung Kwon , Hong Sik Byun , Sung Weon Lee , Hong Seub Kim , Sun Seok Han , Bu Jin Ko , Joung Sik Kim
发明人： Gi Chung Kwon , Hong Sik Byun , Sung Weon Lee , Hong Seub Kim , Sun Seok Han , Bu Jin Ko , Joung Sik Kim
IPC分类号： H01Q136
CPC分类号： H01Q21/24 , H01Q1/38 , H01Q9/27 , H01Q21/20
摘要： Disclosed is a parallel resonance antenna comprising: a whirl antenna having a plurality of antenna units installed two-dimensionally and radially around a central point, each of the antenna units having a ground point at a predetermined position thereof, portions outside the ground points respectively being bent in a same direction, the antenna units having a same size and direction, angles between the antenna units at the central point being all the same; a central conductive line connected to the central point to be normal to the whirl antenna, for being supplied with an RF power; a metal plate installed over and apart from the whirl antenna, the metal plate being connected with end portions of the antenna units, and having a penetration hole through which the central conductive line passes without contacting with the metal plate; and a variable resonance capacitor installed in series between the central conductive line and the metal plate. According to a parallel resonance antenna, the geometrical structure enables to obtain a uniform plasma. Since the antenna has a small inductance, impedance matching is easy even at the VHF band. Also, at the resonance point, since the potential of the inner portions (Z1, Z2, Z3 and Z4) of the ground points of the antenna units is low, it becomes possible to decrease a non-desired sputtering phenomenon.

2. 发明授权

US06685800B2 Apparatus for generating inductively coupled plasma 有权
标题翻译：用于产生电感耦合等离子体的装置
公开(公告)号：US06685800B2
公开(公告)日：2004-02-03
申请号：US10003195
申请日：2001-11-14
申请人： Hong Seub Kim , Gi Chung Kwon , Sun Seok Han , Choong Won Lee , Sung Weon Lee , Hong Sik Byun
发明人： Hong Seub Kim , Gi Chung Kwon , Sun Seok Han , Choong Won Lee , Sung Weon Lee , Hong Sik Byun
IPC分类号： C23C1600
CPC分类号： H01J37/32522 , H01J37/321
摘要： Disclosed is an apparatus for generating ICP, which has a heater having a hot wire as a heating source for heating elements in a chamber and inner wall of the chamber and also efficiently transfers heat of the heater through a heat transferring gas to the elements in the chamber and the inner wall of the chamber. According to the present invention, the elements in the chamber and the inner wall of the chamber can be heated up to a temperature of about 200° C., thereby reducing the adhesion of the by-product served as the source generating the undesirable particles. In addition, since the hot wire having a longer life span than the halogen lamp is used as heat radiating means, the life span of the apparatus is also increased.
摘要翻译：公开了一种用于产生ICP的装置，其具有加热器，该加热器具有热丝作为加热室，用于加热腔室中的元件和腔室的内壁，并且还通过传热气体将加热器的热量有效地传递到室和室的内壁。根据本发明，室中的元件和室的内壁可被加热至约200℃的温度，从而降低了作为产生不期望的颗粒的源的副产物的粘附。此外，由于使用寿命比卤素灯长的热丝作为散热装置，因此装置的使用寿命也增加。

3. 发明授权

US06683274B1 Wafer susceptor 有权
标题翻译：晶圆座
公开(公告)号：US06683274B1
公开(公告)日：2004-01-27
申请号：US10295954
申请日：2002-11-18
申请人： Gi Chung Kwon , Soo Sik Yoon , Hong Sik Byun
发明人： Gi Chung Kwon , Soo Sik Yoon , Hong Sik Byun
IPC分类号： B23K1000
CPC分类号： H01L21/67103 , C23C16/4586 , C23C16/505 , H01J37/32082
摘要： Disclosed is a wafer susceptor which includes: a ceramic body; a RF electrode mounted within the ceramic body; a heater mounted within the ceramic body and spaced apart from the RF electrode by a predetermined distance to be disposed below the RF electrode; and an RF shield of a metal material, the RF shield being electrically grounded and mounted within the ceramic body, the RF shield being disposed between the RF electrode and the heater without being in contact with either the heater or the RF electrode. In case where an RF power is applied to the RF electrode, it is possible to minimize an influence of an RF noise on the heater 24. Accordingly, since the RF power can be applied to the susceptor while heating the susceptor at a high temperature, it is possible to deposit a high-density thin film and also control properties of the thin film such as stress and step coverage. Further, the invention may take the stabilization of the power system.
摘要翻译：公开了一种晶片基座，其包括：陶瓷体; 安装在陶瓷体内的RF电极; 安装在陶瓷体内并与RF电极隔开预定距离的加热器，以设置在RF电极下方; 以及金属材料的RF屏蔽层，RF屏蔽层电接地并安装在陶瓷体内，RF屏蔽件设置在RF电极和加热器之间，而不与加热器或RF电极接触。在向RF电极施加RF功率的情况下，可以使RF噪声对加热器24的影响最小化。因此，由于可以在高温下加热基座的同时向基座施加RF功率，可以沉积高密度薄膜，并且还可以控制薄膜的性能，例如应力和台阶覆盖。此外，本发明可以实现电力系统的稳定。

4. 发明授权

US08674209B2 Thin film type solar cell and method for manufacturing the same 有权
标题翻译：薄膜型太阳能电池及其制造方法
公开(公告)号：US08674209B2
公开(公告)日：2014-03-18
申请号：US12809581
申请日：2008-12-19
申请人： Jin Hong , Chang Sil Yang , Gi Chung Kwon
发明人： Jin Hong , Chang Sil Yang , Gi Chung Kwon
IPC分类号： H01L31/042 , H01L31/00 , H02N6/00
CPC分类号： H01L31/02366 , H01L31/03921 , H01L31/046 , H01L31/075 , Y02E10/548
摘要： A thin film type solar cell and a method for manufacturing the same is disclosed, which is capable of improving solar-ray transmittance and dispersion efficiency by the increased effective area for absorbing the solar ray through the use of substrate with a predetermined pattern having protrusions and depressions, wherein the method comprises preparing a substrate with a predetermined pattern having protrusions and depressions on its one surface; forming a front electrode on the substrate; forming a semiconductor layer on the front electrode; and forming a rear electrode on the semiconductor layer.
摘要翻译：公开了一种薄膜型太阳能电池及其制造方法，其能够通过使用具有突起的预定图案的基板来增加吸收太阳光线的有效面积来提高太阳光线透射率和分散效率，凹陷，其中所述方法包括在其一个表面上制备具有突起和凹陷的预定图案的基底; 在所述基板上形成前电极; 在前电极上形成半导体层; 以及在所述半导体层上形成后电极。

5. 发明申请

US20100288329A1 Thin Film Type Solar Cell and Method for Manufacturing the Same 有权
标题翻译：薄膜型太阳能电池及其制造方法
公开(公告)号：US20100288329A1
公开(公告)日：2010-11-18
申请号：US12809581
申请日：2008-12-19
申请人： Jin Hong , Chang Sil Yang , Gi Chung Kwon
发明人： Jin Hong , Chang Sil Yang , Gi Chung Kwon
IPC分类号： H01L31/042 , H01L31/00 , H01L31/02
CPC分类号： H01L31/02366 , H01L31/03921 , H01L31/046 , H01L31/075 , Y02E10/548
摘要： A thin film type solar cell and a method for manufacturing the same is disclosed, which is capable of improving solar-ray transmittance and dispersion efficiency by the increased effective area for absorbing the solar ray through the use of substrate with a predetermined pattern having protrusions and depressions, wherein the method comprises preparing a substrate with a predetermined pattern having protrusions and depressions on its one surface; forming a front electrode on the substrate; forming a semiconductor layer on the front electrode; and forming a rear electrode on the semiconductor layer.
摘要翻译：公开了一种薄膜型太阳能电池及其制造方法，其能够通过使用具有突起的预定图案的基板的使用来增加用于吸收太阳光线的有效面积来提高太阳光线透射率和分散效率，凹陷，其中所述方法包括在其一个表面上制备具有突起和凹陷的预定图案的基底; 在所述基板上形成前电极; 在前电极上形成半导体层; 以及在所述半导体层上形成后电极。

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