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    • 1. 发明授权
    • Process for resist pattern formation using positive electrodeposition
photoresist compositions
    • 使用正电沉积光致抗蚀剂组合物的抗蚀剂图案形成方法
    • US5702872A
    • 1997-12-30
    • US610237
    • 1996-03-04
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • G03F7/004G03F7/039G03F7/16G03F7/027
    • G03F7/0045G03F7/039G03F7/164G03F7/168Y10S430/12Y10S430/122
    • A positive type electrodeposition photoresist composition includes, as essential components: (A) 100 parts by weight of a polymer having carboxyl group(s) in an amount of 0.5 to 10 equivalents per kg of said polymer and optionally having hydroxyphenyl group(s) in an amount of at least 1 equivalent per kg of the polymer, or (A') a carboxyl group-containing polymer and (A") a hydroxy-phenyl group-containing polymer; (B) 5 to 150 parts by weight of a compound having at least 2 vinyl ether groups in the molecule; and (C) 0.1 to 40 parts by weight per 100 parts by weight of the total of polymer (A), or the polymer (A') and the polymer (A"), and the vinyl ether group-containing compound (B), which generates an acid when irradiated with an actinic ray. The composition is dissolved or dispersed in an aqueous medium by neutralizing the carboxyl group(s) in the polymer (A) or (A') with a basic compound. The positive type electrodeposition photoresist composition allows the forming of a fine image pattern at high resolution. A process for a resist pattern formation using such a composition is also disclosed.
    • 正型电沉积光致抗蚀剂组合物包括作为必要组分的(A)100重量份的具有羧基的聚合物,其量为每当所述聚合物为0.5至10当量,并且任选地具有羟基苯基 至少1当量/ kg聚合物或(A')含羧基聚合物和(A“)含羟基苯基的聚合物的量; (B)5〜150重量份的分子中具有至少2个乙烯基醚基的化合物; 和(C)每100重量份聚合物(A)或聚合物(A')和聚合物(A“)和含乙烯基醚基化合物(B)的总量为0.1〜40重量份 ),当用光化射线照射时产生酸。 通过用碱性化合物中和聚合物(A)或(A')中的羧基,将组合物溶解或分散在水性介质中。 正型电沉积光致抗蚀剂组合物允许以高分辨率形成精细图像图案。 还公开了使用这种组合物的抗蚀剂图案形成方法。
    • 2. 发明授权
    • Positive type electrodeposition photoresist compositions
    • 正型电沉积光致抗蚀剂组合物
    • US5527656A
    • 1996-06-18
    • US233443
    • 1994-04-26
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • Genji ImaiNaozumi IwasawaTsuguo Yamaoka
    • G03F7/004G03F7/039G03F7/16G03C1/73
    • G03F7/0045G03F7/039G03F7/164G03F7/168Y10S430/12Y10S430/122
    • A positive type electrodeposition photoresist composition includes, as essential components: (A) 100 parts by weight of a polymer having carboxyl group(s) in an amount of 0.5 to 10 equivalents per kg of said polymer and optionally having hydroxyphenyl group(s) in an amount of at least 1 equivalent per kg of the polymer, or (A') a carboxyl group-containing polymer and (A") a hydroxyphenyl group-containing polymer; (B) 5 to 150 parts by weight of a compound having at least 2 vinyl ether groups in the molecule; and (C) 0.1 to 40 parts by weight per 100 parts by weight of the total of polymer (A), or the polymer (A') and the polymer (A"), and the vinyl ether group-containing compound (B), which generates an acid when irradiated with an actinic ray. The composition is dissolved or dispersed in an aqueous medium by neutralizing the carboxyl group(s) in the polymer (A) or (A') with a basic compound. The positive type electrodeposition photoresist composition allows the forming of a fine image pattern at high resolution. A process for a resist pattern formation using such a composition is also disclosed.
    • 正型电沉积光致抗蚀剂组合物包括作为必要组分的(A)100重量份的具有羧基的聚合物,其量为每当所述聚合物为0.5至10当量,并且任选地具有羟基苯基 或(A')含有羧基的聚合物和(A“)含羟基苯基的聚合物的量为每千克聚合物至少1当量; (B)5〜150重量份的分子中具有至少2个乙烯基醚基的化合物; 和(C)每100重量份聚合物(A)或聚合物(A')和聚合物(A“)和含乙烯基醚基化合物(B)的总量为0.1〜40重量份 ),当用光化射线照射时产生酸。 通过用碱性化合物中和聚合物(A)或(A')中的羧基,将组合物溶解或分散在水性介质中。 正型电沉积光致抗蚀剂组合物允许以高分辨率形成精细图像图案。 还公开了使用这种组合物的抗蚀剂图案形成方法。
    • 5. 发明授权
    • Process for production of printed circuit board
    • 印刷电路板生产工艺
    • US5576148A
    • 1996-11-19
    • US382155
    • 1995-02-01
    • Genji ImaiYukari TakedaHideo KogureNaozumi Iwasawa
    • Genji ImaiYukari TakedaHideo KogureNaozumi Iwasawa
    • H05K3/42H05K3/00H05K3/06H05K3/46G03F7/00
    • H05K3/0094H05K2201/09581H05K2203/0582H05K2203/107H05K2203/135H05K3/0082H05K3/064
    • The present invention provides a process for producing a high-density printed wiring board with plated throughholes, at high productivity and reliability by a direct drawing method. The process comprises making throughholes in a substrate having an electro-conductive layer on each side; conducting plating on at least the walls of the substrate throughholes; forming a photosensitive resist film on each side of the substrate; applying an actinic radiation onto the resist film by a direct drawing method in the shape of a pattern to be obtained when the resist film is a negative type, or in the shape of a pattern reverse to a pattern to be obtained when the resist film is a positive type; forming, on the uncoated portion inside the throughholes by electrodeposition, an electrodeposition film which is insoluble in a developing solution used later and an etching solution used later but is removable with a peeling solution used later; conducting development with an appropriate developing solution to remove the resist film; removing the exposed plating layer portion and the electro-conductive layer portion present therebeneath, by etching; and then peeling the remaining resist film and the electrodeposition film inside the throughholes, with an appropriate peeling solution.
    • 本发明提供一种通过直接拉伸法以高生产率和可靠性制造具有电镀通孔的高密度印刷线路板的方法。 该方法包括在每个侧面上具有导电层的基板中形成通孔; 至少在基板通孔的壁上进行电镀; 在基板的每一侧上形成光敏抗蚀剂膜; 通过直接拉伸法将光化辐射施加到抗蚀剂膜为负型时获得的图案的形状,或者与抗蚀剂膜为 积极的类型 通过电沉积在通孔内的未涂覆部分上形成不溶于稍后使用的显影液的电沉积膜和稍后使用的可用随后使用的剥离溶液除去的蚀刻溶液; 用合适的显影液进行显影以除去抗蚀剂膜; 通过蚀刻去除暴露的镀层部分和存在于其中的导电层部分; 然后用适当的剥离溶液将剩余的抗蚀剂膜和电沉积膜剥离到通孔内。
    • 9. 发明授权
    • Process for preparing printed-circuit board
    • 制备印刷电路板的工艺
    • US5236810A
    • 1993-08-17
    • US592245
    • 1990-10-03
    • Toshio KondoShinsuke OnishiNaozumi IwasawaSadaaki Hashimoto
    • Toshio KondoShinsuke OnishiNaozumi IwasawaSadaaki Hashimoto
    • G03F7/26H05K3/06
    • G03F7/265H05K3/064H05K2203/0793H05K2203/135
    • An improved process for preparing a printed-circuit board, which successively comprises (I) a step of forming a positive photo-sensitive resist film onto a circuit board having a conductive film according to the electrodeposition coating process, (II) a step of irradiating a full dose of an actinic ray onto the positive photo-sensitive resist film through a photomask with which the actinic ray is cut off over a conductive circuit-forming area, (III) a step of developing the resulting resist film, (IV) a step of etching away a deposited copper-clad area, and (V) removing a remaining resist film on the conductive circuit-forming area, the improvement further comprising a step of imparting the resist film in the conductive circuit-forming area an increased alkali resistance prior to development so as to obtain the printed-circuit board having high resolution with good reproductivity without being affected by variations of the developing conditions.
    • 一种制备印刷电路板的改进方法,其依次包括(I)根据电沉积涂布工艺在具有导电膜的电路板上形成正光敏抗蚀剂膜的步骤,(II)照射步骤 通过在导电电路形成区域上切割光化射线的光掩模,将正光敏抗蚀剂膜上的全剂量的光化射线,(III)显影所得抗蚀剂膜的步骤,(IV) 蚀刻掉沉积的铜包层区域的步骤,以及(V)去除导电电路形成区域上的剩余抗蚀剂膜,该改进还包括将导电电路形成区域中的抗蚀剂膜赋予增加的耐碱性的步骤 在开发之前,以获得具有高分辨率的印刷电路板,具有良好的再现性,而不受显影条件的变化的影响。