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    • 4. 发明授权
    • Device for the detection of substrates stacked with a specific spacing
    • 用于检测以特定间距堆叠的衬底的装置
    • US07109509B2
    • 2006-09-19
    • US10692047
    • 2003-10-23
    • Ulysses GilchristLouise S. BarrissHagen RaueBerndt LahneManfred HeinzeJoachim KönigKlaus Schultz
    • Ulysses GilchristLouise S. BarrissHagen RaueBerndt LahneManfred HeinzeJoachim KönigKlaus Schultz
    • G01N21/00G01V8/12
    • H01L21/67265H01L21/67259H01L21/681Y10S414/137
    • For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation.A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.
    • 对于用于检测堆叠在壁元件的开口处的基板的装置,存在构造检测装置的问题,使得能够相对于基板的过程更灵活地执行基板的位置的检测 测量和使用的测量方法以及传感器系统对待检测的半导体衬底的限定方法被确保在具有降低的颗粒产生风险的测量的确定位置。 发送和接收装置(11)由安装在壁元件(1)上的垂直驱动机构(10)和传感器头(13)组成,该传感器头可通过垂直驱动机构在下位和上位之间进行调节 (10),所述传感器头被布置成在垂直驱动机构(10)上枢转,以便枢转到所述开口(4)中。 该装置特别适用于半导体工业,用于记录具有诸如半导体晶片,平板显示器或掩模的基板的盒或容器的占有状态。