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1. 发明授权

US11536385B2 Fluid control device 有权
公开(公告)号：US11536385B2
公开(公告)日：2022-12-27
申请号：US17257001
申请日：2019-06-04
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Tsutomu Shinohara , Yuya Suzuki , Hidenori Kiso
IPC分类号： F16K27/02 , F16K7/16 , F16K37/00
摘要： A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

2. 发明授权

US11243549B2 Valve and fluid supply line 有权
公开(公告)号：US11243549B2
公开(公告)日：2022-02-08
申请号：US16648327
申请日：2018-08-28
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Kenji Aikawa , Akihiro Harada , Yuya Suzuki , Takahiro Matsuda , Katsunori Komehana , Masahiko Ochiishi , Tsutomu Shinohara
IPC分类号： G05D7/06 , F16K27/00 , F16K7/17 , F16K31/122 , F16K31/12
摘要： The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.
A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.

3. 发明申请

US20210302264A1 Fluid Control Device, Abnormality Detection Method of Fluid Control Device, Abnormality Detection Device, and Abnormality Detection System 有权
公开(公告)号：US20210302264A1
公开(公告)日：2021-09-30
申请号：US17264879
申请日：2019-07-16
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Tsutomu Shinohara , Yuya Suzuki , Hidenori Kiso
IPC分类号： G01M3/28 , F16K31/126 , F16K37/00 , F16K7/14
摘要： A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

4. 发明授权

US11988302B2 Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system 有权
公开(公告)号：US11988302B2
公开(公告)日：2024-05-21
申请号：US17264879
申请日：2019-07-16
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Tsutomu Shinohara , Yuya Suzuki , Hidenori Kiso
IPC分类号： F16K37/00 , F16K7/14 , F16K31/126 , G01M3/28
CPC分类号： F16K37/005 , F16K7/14 , F16K31/1262 , F16K31/1266 , G01M3/2876 , G01M3/2815
摘要： A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

5. 发明授权

US11732818B2 Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement method 有权
公开(公告)号：US11732818B2
公开(公告)日：2023-08-22
申请号：US17340592
申请日：2021-06-07
申请人： FUJIKIN INCORPORATED , Koganei Corporation
发明人： Ryutaro Tanno , Yuya Suzuki , Tsutomu Shinohara , Tomohiro Nakata , Akira Watanabe , Takahiro Kawano
IPC分类号： F16K31/06
CPC分类号： F16K31/0675 , F16K31/0606 , F16K31/0651
摘要： An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

6. 发明公开

US20230258281A1 Valve, Abnormality Diagnosis Method of Valve 审中-公开
公开(公告)号：US20230258281A1
公开(公告)日：2023-08-17
申请号：US18136844
申请日：2023-04-19
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Kenji Aikawa , Akihiro Harada , Yuya Suzuki , Takahiro Matsuda , Katsunori Komehana , Masahiko Ochiishi , Tsutomu Shinohara
IPC分类号： F16K37/00 , G01M13/003 , F16K7/16
CPC分类号： F16K37/0033 , G01M13/003 , F16K7/16
摘要： A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

7. 发明授权

US10998211B2 Management system, method, and computer program for semiconductor fabrication apparatus 有权
公开(公告)号：US10998211B2
公开(公告)日：2021-05-04
申请号：US16615398
申请日：2018-05-15
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Takahiro Mastuda , Tsutomu Shinohara
IPC分类号： H01L21/67 , G06T7/73 , G05B19/418 , G06T7/00 , H04N7/18
摘要： In a semiconductor fabrication apparatus composed of a plurality of components, such as fluid control devices, a manager is to be enabled to identify components by intuition. Information on the identified component is to be provided to the manager in an easy-to-understand manner. In a system in which a manager terminal 3 and an information processor 2 are communicably configured via networks NW1 and NW2, the manager terminal 3 receives component information on a semiconductor fabrication apparatus 1 from the information processor 2. Upon the identification of the position of a component constituting the semiconductor fabrication apparatus 1 on the captured image of the semiconductor fabrication apparatus 1 using an identification processing unit 32, a compositing processing unit 33 creates a composite image in which component information is composited with the captured image at the position of the component identified, and an image display unit 34 displays the composite image. On the other hand, the information processor 2 makes reference to the component information storage unit 2A to extract the component information using an extraction processing unit 21, and transmits the component information to the manager terminal 3.

8. 发明授权

US12123517B2 Valve, abnormality diagnosis method of valve 有权
公开(公告)号：US12123517B2
公开(公告)日：2024-10-22
申请号：US18136844
申请日：2023-04-19
申请人： Fujikin Incorporated
发明人： Ryutaro Tanno , Kenji Aikawa , Akihiro Harada , Yuya Suzuki , Takahiro Matsuda , Katsunori Komehana , Masahiko Ochiishi , Tsutomu Shinohara
IPC分类号： F16K37/00 , F16K7/16 , F16K31/04 , F16K31/50 , F16K31/528 , G01M13/003
CPC分类号： F16K37/0033 , F16K7/16 , F16K31/046 , F16K31/047 , F16K31/508 , F16K31/5286 , F16K37/0041 , G01M13/003
摘要： To enable accurate and simple diagnosis of an operation abnormality of a valve.
A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

9. 发明授权

US11927280B2 Diaphragm valve and monitoring method thereof with improved leak detection 有权
公开(公告)号：US11927280B2
公开(公告)日：2024-03-12
申请号：US16972717
申请日：2019-05-17
申请人： FUJIKIN INCORPORATED
发明人： Yuya Suzuki , Ryutaro Tanno , Daihi Tsuchiguchi , Nobuo Nakamura , Tsutomu Shinohara
IPC分类号： G01L7/00 , F16K7/12 , F16K25/00 , F16K37/00
CPC分类号： F16K7/123 , F16K25/005 , F16K37/0041
摘要： A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

10. 发明授权

US11371627B2 System, method, and computer program for analyzing operation of fluid control device 有权
公开(公告)号：US11371627B2
公开(公告)日：2022-06-28
申请号：US16494775
申请日：2018-03-13
申请人： Fujikin Incorporated
发明人： Yuya Suzuki , Katsunori Komehana , Masahiko Ochiishi , Akihiro Harada , Ryutaro Tanno , Tsutomu Shinohara
IPC分类号： F16K37/00 , G01M3/02
摘要： A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis.
A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8. The server 72 includes a determination processing unit 721 that determines whether the fluid control device 8 has an abnormality, an information collection unit 724 that collects the operation information and an abnormality determination result for the fluid control device 1, an information storage unit 725 that stores the operation information and the determination result collected, an information extraction unit 726 that refers to the information storage unit 725, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, selectively for each of a plurality of the fluid control devices 1, and a correlation analysis unit 727 that analyzes correlation between a predetermined operation of the fluid control device 8 and occurrence of abnormality through comparison using the information extracted.

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