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5. 发明申请

WO1997028085A1 METHOD FOR GENERATING MOISTURE, REACTOR FOR GENERATING MOISTURE, METHOD FOR CONTROLLING TEMPERATURE OF REACTOR FOR GENERATING MOISTURE, AND METHOD FOR FORMING PLATINUM-COATED CATALYST LAYER 审中-公开
标题翻译：用于产生水分的方法，用于产生水分的反应器，用于控制用于产生水分的反应器的温度的方法，以及形成铂包覆催化剂层的方法
公开(公告)号：WO1997028085A1
公开(公告)日：1997-08-07
申请号：PCT/JP1997000188
申请日：1997-01-27
申请人： FUJIKIN INCORPORATED , HITACHI, LTD. , OHMI, Tadahiro , KAWADA, Koji , TANABE, Yoshikazu , NITTA, Takahisa , IKEDA, Nobukazu , MORIMOTO, Akihiro , HIRAO, Keiji , MOROKOSHI, Hiroshi , MINAMI, Yukio
发明人： FUJIKIN INCORPORATED , HITACHI, LTD.
IPC分类号： C01B05/00
CPC分类号： C01B5/00
摘要： The invention aims at further reducing the size and cost of a reactor for generating water from oxygen and hydrogen, providing high-purity water in an amount necessary for practical use safely, stably and continuously, and allowing a platinum-coated catalyst layer formed on the internal wall of the reactor body to maintain its high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, a gas-diffusing member provided in the internal space of the body of the reactor, and a platinum coating provided on the internal wall surface of the body of the reactor, and hydrogen and oxygen fed from the inlet are diffused by means of the gas-diffusing member and then come into contact with the platinum coating to enhance the reactivity, thereby producing water from hydrogen and oxygen. The temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below the ignition temperature of hydrogen or a hydrogen-containing gas to react hydrogen with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body of a metallic reactor, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or a nitride on the wall surface, and forming a platinum coating on the barrier coating.
摘要翻译：本发明旨在进一步降低用于从氧气和氢气产生水的反应器的尺寸和成本，提供安全，稳定和连续地实际使用所需量的高纯度水，并且允许形成在其上的铂涂覆的催化剂层反应器主体的内壁在长时间内保持其高催化活性。具体地，反应器包括由耐热材料制成的本体，具有用于水/湿气的入口和出口，设置在反应器主体的内部空间中的气体扩散部件和设置在反应器主体的内部的铂镀膜反应器主体的内壁表面和从入口供给的氢气和氧气通过气体扩散构件扩散，然后与铂涂层接触以增强反应性，由此从氢气和氧气中产生水。用于产生水分的反应器的温度，其中氢气在高温下与氧气反应以产生水分，保持在低于氢气或含氢气体的点火温度以使氢气与氧气反应，同时防止氢气的爆炸性燃烧和氧气。反应器主体内壁上的铂包覆催化剂层是通过处理金属反应器主体内壁的表面，清洗处理过的表面，形成氧化物或非金属材料的非金属材料的阻挡层在壁表面上形成氮化物，并在阻挡涂层上形成铂涂层。

6. 发明授权

US12123520B2 Diaphragm, valve device, and method for manufacturing diaphragm 有权
公开(公告)号：US12123520B2
公开(公告)日：2024-10-22
申请号：US17510805
申请日：2021-10-26
申请人： FUJIKIN INCORPORATED
发明人： Kenta Kondo , Toshiyuki Inada , Tomohiro Nakata , Kazunari Watanabe , Tomoki Nakada
IPC分类号： F16K7/12 , F16K31/122
CPC分类号： F16K7/126 , F16K31/1221
摘要： A diaphragm includes: a metal thin plate; and a thin film layer formed over an entirety of a surface on one side of the thin plate.

7. 发明授权

US12085186B2 Valve and fluid control device with a magnetic indicator 有权
公开(公告)号：US12085186B2
公开(公告)日：2024-09-10
申请号：US17935670
申请日：2022-09-27
申请人： Fujikin Incorporated
发明人： Kengo Tsujino , Tomoki Nakada , Ryutaro Tanno , Yuya Suzuki , Akihiro Harada , Tsutomu Shinohara
IPC分类号： F16K31/126 , F16K27/02
CPC分类号： F16K31/126 , F16K27/02
摘要： A valve which can accurately detect an operation of the valve is provided.
The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

8. 发明公开

US20240288361A1 DENSITY MEASUREMENT DEVICE 审中-公开
公开(公告)号：US20240288361A1
公开(公告)日：2024-08-29
申请号：US18568691
申请日：2022-06-29
申请人： FUJIKIN INCORPORATED
发明人： Masaaki NAGASE , Hidekazu ISHII , Kosuke SUGIMOTO , Takashi FUKAWA , Wataru ASHINO
IPC分类号： G01N21/31 , G01N21/03 , G01N21/25 , G01N21/85
CPC分类号： G01N21/31 , G01N21/0303 , G01N21/255 , G01N21/85 , G01N2021/0389 , G01N2021/8578 , G01N2201/0638
摘要： Provided is a concentration measurement device that can be miniaturized without using an optical fiber. The concentration measurement device including a measurement cell having a gas flow path and an optical path intersecting the gas flow path; a light source for emitting light inside the optical path, the light source 14 being installed at one end of the optical path; a first photodetector for detecting a light emitted from the light source as a reference light, the first photodetector being installed at a side of the light source and rearward from a distal end of the light source in a light emitting direction along an optical axis of the light source; a second photodetector for detecting a light emitted from the light source for measuring light absorption, the second photodetector being installed at another end of the optical path.

9. 发明公开

US20240242976A1 GAS SUPPLY DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS 审中-公开
公开(公告)号：US20240242976A1
公开(公告)日：2024-07-18
申请号：US18279712
申请日：2022-03-04
申请人： Tokyo Electron Limited , FUJIKIN INCORPORATED
发明人： Jun HIROSE , Atsushi SAWACHI , Takahiro MATSUDA , Kazunari WATANABE , Kohei SHIGYOU , Taiki HOSHIKO
IPC分类号： H01L21/67
CPC分类号： H01L21/67017
摘要： A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.

10. 发明授权

US12007797B2 Flow rate control device and flow rate control method 有权
公开(公告)号：US12007797B2
公开(公告)日：2024-06-11
申请号：US18346434
申请日：2023-07-03
申请人： FUJIKIN INCORPORATED
发明人： Katsuyuki Sugita , Kouji Nishino , Naofumi Yasumoto , Kaoru Hirata , Shinya Ogawa , Keisuke Ideguchi
IPC分类号： G05D7/06 , F16K31/00 , G01F1/36 , G05B15/02
CPC分类号： G05D7/0623 , F16K31/004 , G05B15/02 , G05D7/0635 , G01F1/363
摘要： A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

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