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    • 1. 发明专利
    • Inorganic film manufacturing method
    • 无机薄膜制造方法
    • JP2014017490A
    • 2014-01-30
    • JP2013149144
    • 2013-07-18
    • Fujifilm Corp富士フイルム株式会社
    • NOMOTO MAKIUMEDA KENICHITANAKA ATSUSHIAZUMA KOHEI
    • H01L21/368C01G23/00C01G39/00C01G41/00H01L21/336H01L29/26H01L29/786
    • PROBLEM TO BE SOLVED: To provide a good-quality inorganic film having specific resistance appropriate for transistor drive.SOLUTION: An inorganic film represented by a general formula NMQO(where N represents Zn or Mg, M represents Ti, W or Mo, Q represents In or Fe, and a, b, c, d are positive real numbers) is deposited by coating of a raw material liquid containing at least one of oxide, alkoxide and organic metallic compound of N, at least one of oxide, alkoxide and organic metallic compound of M, oxide, alkoxide and organic metallic compound of Q and an organic solvent, and a semiconductor film 4 is formed by a heat treatment. A heat source of the heat treatment is an excimer laser which is a pulse laser having a pulse width of 100 ns and under.
    • 要解决的问题:提供具有适合于晶体管驱动的电阻率的优质无机膜。溶液:由通式NMQO表示的无机膜(其中N表示Zn或Mg,M表示Ti,W或Mo,Q表示 In或Fe,以及a,b,c,d为正实数)通过涂覆含有氧化物,醇盐和有机金属化合物N,至少一种氧化物,醇盐和有机物的原料液体而沉积 M,氧化物,醇盐和有机金属化合物的金属化合物和有机溶剂,并且通过热处理形成半导体膜4。 热处理的热源是作为脉冲宽度为100ns以下的脉冲激光的准分子激光器。
    • 3. 发明专利
    • Solar cell submodule, method for manufacturing the same, and substrate with electrode
    • 太阳能电池组件及其制造方法和电极用基板
    • JP2012114414A
    • 2012-06-14
    • JP2011217609
    • 2011-09-30
    • Fujifilm Corp富士フイルム株式会社
    • KOBAYASHI HIROYUKINOMOTO MAKI
    • H01L31/04
    • Y02E10/541Y02P70/521
    • PROBLEM TO BE SOLVED: To provide a substrate with an electrode, which has high adhesion and is difficult to peel in a compound semiconductor-based photoelectric conversion element comprising a photoelectric conversion layer formed on a conductive layer made of a transition metal by a vapor deposition method, and to provide a solar cell submodule comprising the substrate with an electrode.SOLUTION: A substrate 1 with an electrode, which is to be used in a chalcogen-containing compound semiconductor-based photoelectric conversion element 2, comprises a conductive layer 20 consisting essentially of a single transition metal on a substrate 10. At least a surface layer 22 of the conductive layer 20 on the side opposite to the substrate 10 is a layer containing a nitride of the transition metal.
    • 要解决的问题:为了提供一种具有电极的基板,该电极具有高的粘附性并且难以在基于化合物半导体的光电转换元件中剥离,该化合物半导体的光电转换元件包括由在过渡金属制成的导电层上形成的光电转换层, 气相沉积方法,并提供包括具有电极的基板的太阳能电池子模块。 解决方案:具有用于含硫属化合物半导体的光电转换元件2中的具有电极的基板1包括基本上由基底10上的单个过渡金属组成的导电层20。至少 导电层20的与基板10相反的一侧的表面层22是含有过渡金属的氮化物的层。 版权所有(C)2012,JPO&INPIT