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    • 6. 发明授权
    • Method using megasonic energy in liquefied gases
    • 在液化气中使用兆声波能量的方法
    • US5456759A
    • 1995-10-10
    • US283927
    • 1994-08-01
    • Thomas B. Stanford, Jr.Sidney C. Chao
    • Thomas B. Stanford, Jr.Sidney C. Chao
    • B08B3/12B08B7/00D06F19/00D06F43/00D06F43/08H01L21/00H05K3/26B08B3/08
    • H01L21/67028B08B3/12B08B7/0021D06F19/00D06F43/007D06F43/08H05K3/26
    • A process for removing undesired sub-micrometer particulates from a chosen substrate (16) comprising the steps of: (a) placing the substrate containing the undesired particulates in a cleaning chamber (12) provided with megasonic energy-producing means (20); (b) introducing a liquefied gas (22), such as liquid carbon dioxide, into the cleaning chamber and contacting the substrate containing the undesired particulates with the liquid carbon dioxide at a temperature below its critical temperature; and (c) exposing the liquid carbon dioxide to the megasonic energy-producing means for a period of time sufficient to remove the undesired particulates from the substrate. The substrate containing the undesired particulates may optionally be contacted with carbon dioxide in the dense phase prior to and/or after the treatment with megasonic energy to aid in removal of the undesired particulates. Further, spent liquid carbon dioxide may be treated to regenerate fresh liquid carbon dioxide which is recycled to the cleaning chamber. Other gases besides carbon dioxide which may be used include nitrous oxide, sulfur hexafluoride, and xenon. Further, gas mixtures and gas mixtures with suitable modifiers may be employed.
    • 一种用于从所选择的衬底(16)去除不想要的亚微米颗粒的方法,包括以下步骤:(a)将含有不需要的微粒的衬底放置在设置有兆声波能量产生装置的清洁室中; (b)将诸如液体二氧化碳的液化气体(22)引入清洁室中,并将含有不需要的颗粒的基材与液体二氧化碳在低于其临界温度的温度下接触; 和(c)将液体二氧化碳暴露于兆声波能量产生装置一段足以从衬底去除不需要的颗粒的时间。 含有不需要的颗粒的基质可以任选地在紧密处理之前和/或之后与密集相中的二氧化碳接触,以帮助除去不需要的颗粒。 此外,废液二氧化碳可以被处理以再生再循环到清洁室的新鲜液体二氧化碳。 除二氧化碳之外的其他气体可以使用包括一氧化二氮,六氟化硫和氙。 此外,可以使用具有合适的改性剂的气体混合物和气体混合物。
    • 7. 发明授权
    • Apparatus for applying ultrasonic energy in precision cleaning
    • 超声能量在精密清洗中的应用
    • US5337446A
    • 1994-08-16
    • US967261
    • 1992-10-27
    • Charles W. SmithThomas B. Stanford, Jr.
    • Charles W. SmithThomas B. Stanford, Jr.
    • B08B1/04B08B3/12B08B7/00B08B11/02
    • B08B3/12B08B1/04B08B7/0021
    • An apparatus for applying ultrasonic energy in precision cleaning includes a pressure vessel having a plurality of sonic plates, with or without a rotary device located inside the vessel. The plates may be arranged centrally within the vessel to propagate sonic waves outward, or the plates may be located on an interior wall in the pressure vessel, directed inward. Each plate includes a plurality of sonic transducers, spaced along the longitudinal axis of the pressure vessel. The rotary device may include a plurality of arms carrying removable brush holders or a rotating parts basket. In either case, the device is driven by a motor mounted in a top cover of the pressure vessel. A liquid cleaning fluid, preferably carbon dioxide, is charged in the pressure vessel to submerge the sonic plates and workpieces secured in the pressure vessel. The transducers are then energized and the rotary device engaged to apply both sonic and mechanical agitation to the workpieces for enhanced removal of particulates. The sonic application may be preceded or followed by pressurization of the pressure vessel to above the supercritical pressure of the carbon dioxide for removing dissolvable contaminants from the workpieces.
    • 用于在精密清洗中施加超声波能量的装置包括具有多个声波板的压力容器,具有或不具有位于容器内部的旋转装置。 板可以布置在容器内的中央以向外传播声波,或者板可以位于压力容器内的内向内。 每个板包括沿着压力容器的纵向轴线间隔开的多个声音换能器。 旋转装置可以包括携带可拆卸刷持器或旋转部件篮的多个臂。 在任一情况下,该装置由安装在压力容器的顶盖中的马达驱动。 将液体清洁流体(优选二氧化碳)装入压力容器中以浸没固定在压力容器中的声板和工件。 传感器然后通电,并且旋转装置接合以将声波和机械搅拌施加到工件上以增强微粒的去除。 声音应用之前或之后是将压力容器加压到高于二氧化碳的超临界压力,以从工件中除去可溶解的污染物。