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1. 发明授权

US07195343B2 Low ejection energy micro-fluid ejection heads 有权
标题翻译：低喷射能量微流体喷射头
公开(公告)号：US07195343B2
公开(公告)日：2007-03-27
申请号：US10927796
申请日：2004-08-27
申请人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
发明人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
IPC分类号： B41J2/05
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/164 , Y10T29/49401
摘要： A micro-fluid ejection device structure and method therefor having improved low energy design. The devices includes a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
摘要翻译：一种具有改进的低能量设计的微流体喷射装置结构及其方法。这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。在选自TaAl，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN等的电阻层的绝缘层上形成多个加热电阻体，和TaAl / TaAlN。选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。牺牲层在等离子体氧化过程中被氧化，以在多个加热电阻器上提供流体接触层。

2. 发明授权

US08366952B2 Low ejection energy micro-fluid ejection heads 有权
标题翻译：低喷射能量微流体喷射头
公开(公告)号：US08366952B2
公开(公告)日：2013-02-05
申请号：US12758161
申请日：2010-04-12
申请人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
发明人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
IPC分类号： G01D15/00 , G11B5/127
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/164 , Y10T29/49401
摘要： A micro-fluid ejection device structure and method therefor having improved low energy design. The devices include a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
摘要翻译：一种具有改进的低能量设计的微流体喷射装置结构及其方法。这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。在选自TaAl，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN等的电阻层的绝缘层上形成多个加热电阻体，和TaAl / TaAlN。选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。牺牲层在等离子体氧化过程中被氧化以在多个加热电阻器上提供流体接触层。

3. 发明申请

US20100213165A1 LOW EJECTION ENERGY MICRO-FLUID EJECTION HEADS 有权
标题翻译：低喷射能量微流体喷射头
公开(公告)号：US20100213165A1
公开(公告)日：2010-08-26
申请号：US12758161
申请日：2010-04-12
申请人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
发明人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
IPC分类号： C23F1/00 , B21D53/76
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/164 , Y10T29/49401
摘要： A micro-fluid ejection device structure and method therefor having improved low energy design. The devices include a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
摘要翻译：一种具有改进的低能量设计的微流体喷射装置结构及其方法。这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。在选自TaAl，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN等的电阻层的绝缘层上形成多个加热电阻体，和TaAl / TaAlN。选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。牺牲层在等离子体氧化过程中被氧化以在多个加热电阻器上提供流体接触层。

4. 发明授权

US07749397B2 Low ejection energy micro-fluid ejection heads 失效
标题翻译：低喷射能量微流体喷射头
公开(公告)号：US07749397B2
公开(公告)日：2010-07-06
申请号：US11673795
申请日：2007-02-12
申请人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
发明人： Frank E. Anderson , Byron V. Bell , Robert W. Cornell , Yimin Guan
IPC分类号： G01D15/00 , G11B5/127
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/164 , Y10T29/49401
摘要： A micro-fluid ejection device structure and method therefor having improved low energy design. The devices includes a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
摘要翻译：一种具有改进的低能量设计的微流体喷射装置结构及其方法。这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。在选自TaAl，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN等的电阻层的绝缘层上形成多个加热电阻体，和TaAl / TaAlN。选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。牺牲层在等离子体氧化过程中被氧化以在多个加热电阻器上提供流体接触层。

5. 发明授权

US07080896B2 Micro-fluid ejection device having high resistance heater film 有权
标题翻译：具有高电阻加热膜的微流体喷射装置
公开(公告)号：US07080896B2
公开(公告)日：2006-07-25
申请号：US10760726
申请日：2004-01-20
申请人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
发明人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
IPC分类号： B41J2/05
CPC分类号： B41J2/14129 , B41J2202/03 , Y10T29/49082 , Y10T29/49098 , Y10T29/49099 , Y10T29/49163 , Y10T29/49346 , Y10T29/49401
摘要： A semiconductor substrate for a micro-fluid ejection head. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. Each of the fluid ejection actuators includes a thin heater stack comprising a thin film heater and one or more protective layers adjacent the heater. The thin film heater is made of a tantalum-aluminum-nitride thin film material having a nano-crystalline structure consisting essentially of AlN, TaN, and TaAl alloys, and has a sheet resistance ranging from about 30 to about 100 ohms per square. The thin film material contains from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.
摘要翻译：一种用于微流体喷射头的半导体衬底。衬底包括设置在衬底上的多个流体喷射致动器。每个流体喷射致动器包括薄加热器堆叠，其包括薄膜加热器和与加热器相邻的一个或多个保护层。薄膜加热器由具有主要由AlN，TaN和TaAl合金组成的纳米晶体结构的钽 - 氮化铝薄膜材料制成，并且具有约30至约100欧姆/平方的薄层电阻。薄膜材料含有约30至约70原子％的钽，约10至约40原子％的铝和约5至约30原子％的氮。

6. 发明授权

US07918015B2 Method for making a thin film resistor 有权
标题翻译：制造薄膜电阻的方法
公开(公告)号：US07918015B2
公开(公告)日：2011-04-05
申请号：US12336767
申请日：2008-12-17
申请人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
发明人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
IPC分类号： H01C17/00
CPC分类号： B41J2/14129 , B41J2202/03 , Y10T29/49082 , Y10T29/49098 , Y10T29/49099 , Y10T29/49163 , Y10T29/49346 , Y10T29/49401
摘要： A process for making a fluid ejector head for a micro-fluid ejection device. In one embodiment, the process comprises depositing a thin film resistive layer on a substrate to provide a plurality of thin film heaters. The thin film resistive layer comprises a tantalum-aluminum-nitride material consisting essentially of AlN, TaN, and TaAl alloys, and containing from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.
摘要翻译：一种用于制造微流体喷射装置的流体喷射头的方法。在一个实施例中，该方法包括在衬底上沉积薄膜电阻层以提供多个薄膜加热器。薄膜电阻层包括主要由AlN，TaN和TaAl合金组成的钽 - 氮化铝材料，并且含有约30至约70原子％的钽，约10至约40原子％的铝和约5至约约30原子％的氮。

7. 发明申请

US20090094834A1 Micro-fluid Ejection Device Having High Resistance Heater Film 有权
标题翻译：具有高电阻加热膜的微流体喷射装置
公开(公告)号：US20090094834A1
公开(公告)日：2009-04-16
申请号：US12336767
申请日：2008-12-17
申请人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
发明人： Byron V. Bell , Robert W. Cornell , Yimin Guan , George K. Parish
IPC分类号： B21D53/76 , H01C17/12
CPC分类号： B41J2/14129 , B41J2202/03 , Y10T29/49082 , Y10T29/49098 , Y10T29/49099 , Y10T29/49163 , Y10T29/49346 , Y10T29/49401
摘要： A process for making a fluid ejector head for a micro-fluid ejection device. In one embodiment, the process comprises depositing a thin film resistive layer on a substrate to provide a plurality of thin film heaters. The thin film resistive layer comprises a tantalum-aluminum-nitride material consisting essentially of AlN, TaN, and TaAl alloys, and containing from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.
摘要翻译：一种用于制造微流体喷射装置的流体喷射头的方法。在一个实施例中，该方法包括在衬底上沉积薄膜电阻层以提供多个薄膜加热器。薄膜电阻层包括主要由AlN，TaN和TaAl合金组成的钽 - 氮化铝材料，并且含有约30至约70原子％的钽，约10至约40原子％的铝和约5至约约30原子％的氮。

8. 发明授权

US07390078B2 Reduction of heat loss in micro-fluid ejection devices 有权
标题翻译：减少微流体喷射装置中的热损失
公开(公告)号：US07390078B2
公开(公告)日：2008-06-24
申请号：US11170894
申请日：2005-06-30
申请人： Byron V. Bell , Robert W. Cornell , Yimin Guan , Burton L. Joyner, II
发明人： Byron V. Bell , Robert W. Cornell , Yimin Guan , Burton L. Joyner, II
IPC分类号： B41J2/05
CPC分类号： B41J2/14129
摘要： The present disclosure is directed to a micro-fluid ejection head for a micro-fluid ejection device. The head includes a semiconductor substrate, a fluid ejection actuator supported by the semiconductor substrate, a nozzle member containing nozzle holes attached to the substrate for expelling droplets of fluid from one or more nozzle holes in the nozzle member upon activation of the ejection actuator. The substrate further includes a thermal insulating barrier layer between the semiconductor substrate and the fluid ejection actuator. The thermal insulating barrier layer includes a porous, substantially impermeable material having a thermal conductivity of less than about 1 W/m-K.
摘要翻译：本公开涉及用于微流体喷射装置的微流体喷射头。头部包括半导体衬底，由半导体衬底支撑的流体喷射致动器，喷嘴构件，其包含附接到衬底的喷嘴孔，用于在激活喷射致动器时从喷嘴构件中的一个或多个喷嘴孔排出流体液滴。衬底还包括在半导体衬底和流体喷射致动器之间的绝热阻挡层。绝热阻隔层包括具有小于约1W / m-K的热导率的多孔的基本上不可渗透的材料。

9. 发明授权

US06902256B2 Ink jet printheads 有权
标题翻译：喷墨打印头
公开(公告)号：US06902256B2
公开(公告)日：2005-06-07
申请号：US10621018
申请日：2003-07-16
申请人： Frank E. Anderson , Byron V. Bell , Carl E. Sullivan , Paul A Cook , Robert W. Cornell , George K. Parish
发明人： Frank E. Anderson , Byron V. Bell , Carl E. Sullivan , Paul A Cook , Robert W. Cornell , George K. Parish
IPC分类号： B41J2/14 , B41J2/175 , B41J2/05
CPC分类号： B41J2/17556 , B41J2/14129 , B41J2/17506 , B41J2/17513 , B41J2202/03 , B41J2202/13
摘要： An ink jet printer including a printer cartridge containing a printhead attached to a cartridge carriage for translation of the cartridge across a print media. The printer also includes an off carriage ink supply, a printer microprocessor, and a combined ink fill tube and electrical connection cable connected between the cartridge and the off carriage ink supply for providing refill ink to the ink cartridge and control of the carriage and printhead. Improvements to the printer enable low cost, high quality printing to be achieved.
摘要翻译：一种喷墨打印机，包括一个打印机墨盒，该打印机墨盒包含一个连接到墨盒托架的打印头，用于使打印墨盒平移印刷介质。该打印机还包括一个卸载墨盒，一个打印机微处理器以及一个连接在墨盒和卸载墨盒之间的组合墨水填充管和电连接电缆，用于向墨盒提供再填充墨水并控制滑架和打印头。对打印机的改进使得能够实现低成本，高质量的打印。

10. 发明授权

US06929349B2 Thin film ink jet printhead adhesion enhancement 失效
标题翻译：薄膜喷墨打印头附着力增强
公开(公告)号：US06929349B2
公开(公告)日：2005-08-16
申请号：US10685115
申请日：2003-10-14
申请人： Byron V. Bell , Yimin Guan
发明人： Byron V. Bell , Yimin Guan
IPC分类号： B41J2/14 , B41J2/135
CPC分类号： B41J2/14129
摘要： An ink jet printhead for an ink jet printer and method for making an improved printhead. The printhead includes a nozzle plate attached to a heater chip. The heater chip is a semiconductor substrate having a resistive layer deposited on the substrate, a dielectric layer deposited on the resistive layer, a cavitation layer for contact with ink, and an adhesion layer between the dielectric layer and cavitation layer. The adhesion layer is selected from the group consisting of tantalum nitride (TaN), tantalum oxide (TaO), silicon nitride (SiN), and titanium nitride (TiN), provided the adhesion layer and cavitation layer are selected so that the adhesion layer has no elemental component in common with the cavitation layer when the dielectric layer is comprised of SiC/SiN. Adhesion between the dielectric layer and cavitation layer is significantly enhanced by the invention.
摘要翻译：一种用于喷墨打印机的喷墨打印头和用于制造改进的打印头的方法。打印头包括附接到加热器芯片的喷嘴板。加热器芯片是具有沉积在基板上的电阻层，沉积在电阻层上的介电层，与油墨接触的空穴层以及介电层和空化层之间的粘合层的半导体基板。粘合层选自氮化钽（TaN），氧化钽（TaO），氮化硅（SiN）和氮化钛（TiN），只要选择粘合层和空穴层，使得粘附层具有当介电层由SiC / SiN组成时，没有与空化层共同的元素分量。通过本发明，电介质层和空化层之间的粘合力显着增强。

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