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1. 发明授权

US08018017B2 Thermo-mechanical cleavable structure 有权
标题翻译：热机械可切割结构
公开(公告)号：US08018017B2
公开(公告)日：2011-09-13
申请号：US10905905
申请日：2005-01-26
申请人： Fen Chen , Cathryn J. Christiansen , Richard S. Kontra , Tom C. Lee , Alvin W. Strong , Timothy D. Sullivan , Joseph E. Therrien
发明人： Fen Chen , Cathryn J. Christiansen , Richard S. Kontra , Tom C. Lee , Alvin W. Strong , Timothy D. Sullivan , Joseph E. Therrien
IPC分类号： H01L31/058
CPC分类号： H01L23/5256 , H01L2924/0002 , H01L2924/00
摘要： A thermo-mechanical cleavable structure is provided and may be used as a programmable fuse for integrated circuits. As applied to a programmable fuse, the thermo-mechanical cleavable structure includes an electrically conductive cleavable layer adjacent to a thermo-mechanical stressor. As electricity is passed through the cleavable layer, the cleavable layer and the thermo-mechanical stressor are heated and gas evolves from the thermo-mechanical stressor. The gas locally insulates the thermo-mechanical stressor, causing local melting adjacent to the bubbles in the thermo-mechanical stressor and the cleavable structure forming cleaving sites. The melting also interrupts the current flow through the cleavable structure so the cleavable structure cools and contracts. The thermo-mechanical stressor also contracts due to a phase change caused by the evolution of gas therefrom. As the thermo-mechanical cleavable structure cools, the cleaving sites expand causing gaps to be permanently formed therein.
摘要翻译：提供了一种热机械可切割结构，可用作集成电路的可编程保险丝。如应用于可编程保险丝，热机械可切割结构包括与热机械应力源相邻的导电可切割层。当电通过可切割层时，可切割层和热机械应力器被加热并且气体从热机械应力源逸出。气体将热机械应力局部绝缘，导致邻近热机械应力的气泡局部熔化，形成裂开位置的可切割结构。熔化还中断当前通过可切割结构的流动，因此可切割结构冷却和收缩。热机械应力还由于由其产生的气体引起的相变而收缩。当热机械可裂解结构冷却时，裂解位置膨胀，导致间隙永久形成。

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