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1. 发明授权

US07903250B1 Control by sample reflectivity 有权
标题翻译：通过样品反射率控制
公开(公告)号：US07903250B1
公开(公告)日：2011-03-08
申请号：US12477571
申请日：2009-06-03
申请人： Fabio A. Faccini , Torsten R. Kaack , Jiyou Fu , Zhiming Jiang
发明人： Fabio A. Faccini , Torsten R. Kaack , Jiyou Fu , Zhiming Jiang
IPC分类号： G01N21/55
CPC分类号： G01N21/55 , G01N21/9501
摘要： A method of performing an investigation of a substrate, by measuring a reflectivity of the substrate, comparing the reflectivity of the substrate to an anticipated reflectivity value, selectively subjecting the substrate to a laser beam for a predetermined duration and at a predetermined energy only when the reflectivity of the substrate is within a specified tolerance of the anticipated reflectivity value, selectively signaling a fault condition when the reflectivity of the substrate is not within the specified tolerance of the anticipated reflectivity value, and selectively performing the investigation of the substrate only when the reflectivity of the substrate is within the specified tolerance of the anticipated reflectivity value.
摘要翻译：通过测量衬底的反射率，将衬底的反射率与预期反射率值进行比较来选择性地对衬底进行预定的时间和激光束的处理的方法，只有当衬底的反射率在预期反射率值的特定公差内，当衬底的反射率不在预期反射率值的规定公差内时选择性地发信号通知故障状态，并且仅当反射率的基板在预期反射率值的规定公差内。

2. 发明授权

US07453562B1 Ellipsometry measurement and analysis 有权
标题翻译：椭偏仪测量和分析
公开(公告)号：US07453562B1
公开(公告)日：2008-11-18
申请号：US11863334
申请日：2007-09-28
申请人： Torsten R. Kaack , Shankar Krishnan , Fabio A. Faccini
发明人： Torsten R. Kaack , Shankar Krishnan , Fabio A. Faccini
IPC分类号： G01N21/00
CPC分类号： G01N21/33
摘要： A method of performing a measurement of properties of a sample, by directing a first beam of light at the sample, where a combination of the wavelength, energy, and length of time is sufficient to cause temporary damage to the sample. The first beam is reflected from the sample. The properties of the reflected beam are sensed to create a signal. A length of time is waited, sufficient for the damage to substantially heal, before a second beam of light is directed at the sample, where a combination of the wavelength, energy, and length of time is sufficient to cause temporary damage to the sample. The second beam is reflected from the sample. The properties of the reflected beam are sensed to create a signal. The first and second electrical signals are analyzed to determine the properties of the sample.
摘要翻译：通过在样品处引入第一光束，其中波长，能量和时间长度的组合足以引起对样品的暂时损坏，来执行样品的性质的测量的方法。第一个光束从样品反射。感测反射光束的特性以产生信号。在第二光束被引导到样品之前等待长度的时间足以使损伤基本上愈合，其中波长，能量和时间长度的组合足以引起对样品的暂时损坏。第二个光束从样品反射。感测反射光束的特性以产生信号。分析第一和第二电信号以确定样品的性质。

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