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    • 6. 发明专利
    • SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
    • JPH05206201A
    • 1993-08-13
    • JP3853792
    • 1992-01-28
    • FURUKAWA ELECTRIC CO LTDFURUKAWA SAAKITSUTO FOIL KK
    • MUGISHIMA TOSHIOSEKI OSAMUOTANI KENICHI
    • H01L21/60
    • PURPOSE:To improve bonding workability and durability of a chip carrier, by arranging a theremally conductive penetration post which penetrates a flexible film part, on the rear side of an inner lead part of metal wiring. CONSTITUTION:Metal wiring 1 is radially arranged in four directions in the manner in which inner lead parts la are positioned inside and outer lead parts 1b are positioned outside. The inner lead parts 1a are bonded to bumps 7 of a semiconductor chip 6, and the outer lead parts 1b are connected with a lead frame, terminal parts of an external circuit board, etc. Coating and exposure of cyclized isoprene rubber are repeated on the surface of a compound tape on which surface metal wiring 1 is formed and on the surface of a flexible tape 2, thereby forming through holes, sprocket holes 5, and outer lead holes 1b. After the wall surface of the through hole is subjected to conduction treatment, the hole is filled by electroplating, and a penetration post 8 is formed. At the time of bonding, a tool is made to abut against the penetration post 8, heat and pressure are applied, and the bump of the chip 6 is bonded to the inner lead part 1a. Sufficient finger strength can be obtained and the metal wiring can be made fine.
    • 7. 发明专利
    • MANUFACTURE OF TWO-LAYERED TAB
    • JPH04345044A
    • 1992-12-01
    • JP11771891
    • 1991-05-22
    • FURUKAWA ELECTRIC CO LTD
    • SEKI OSAMUOTANI KENICHIMUGISHIMA TOSHIO
    • H01L21/60
    • PURPOSE:To effectively obtain a two-layered TAB exerting no influence upon heating at the time of semiconductor element mounting, while compensating mechanical strength of inner leads, by performing etching while an outer lead part and a sprocket part are irradiated from the insulating layer side of a two-layered TAB original sheet, with a light having an ultraviolet wavelength region. CONSTITUTION:A two-layered TAB original sheet is obtained by forming a copper layer 11 on a polyimide film 10. After a resist layer 12 is formed on the polyimide film 10, said resist layer 12 is exposed to light by using a photo mask having patterns of a sprocket hole part 30, an inner lead part 31 and an outer lead part 32, and then developed, thus forming a resist mask 13. While the sprocket hole part 30 and the outer lead part 32 are irradiated with ultraviolet rays by using a high pressure mercury lamp, etching is performed. The resist layer 13 is eliminated, and the sprocket hole part 30 and the outer lead part 32 are completely etched, thereby obtaining a two-layered TAB wherein the inner lead part 31 of about 5mum in thickness is left.