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    • 2. 发明申请
    • INCREASING BREAKDOWN VOLTAGE IN SEMICONDUCTOR DEVICES WITH VERTICAL SERIES CAPACITIVE STRUCTURES
    • 在具有垂直系列电容结构的半导体器件中增加断开电压
    • WO2006122328A2
    • 2006-11-16
    • PCT/US2006/018922
    • 2006-05-11
    • FULTEC SEMICONDUCTOR, INC.YANG, Robert, Kuo-ChangHEBERT, Francois
    • YANG, Robert, Kuo-ChangHEBERT, Francois
    • H01L29/76H01L29/94
    • H01L29/7802H01L29/407H01L29/4236H01L29/7395H01L29/74H01L29/7803H01L29/7811H01L29/7813H01L29/861
    • This invention relates to an apparatus and method for achieving high breakdown voltage and low on-resistance in semiconductor devices that have top, intermediate and bottom regions with a controllable current path traversing any of these regions. The device has an insulating trench that is coextensive with the top and intermediate regions and girds these regions from at least one side and preferably from both or all sides. A series capacitive structure with a biased top element and a number of floating elements is disposed in the insulating trench, and the intermediate region is endowed with a capacitive property that is chosen to establish a capacitive interaction or coupling between the series capacitive structure and the intermediate region so that the breakdown voltage VBD is maximized and on- resistance is minimized. The capacitive property of the intermediate region is established by an appropriately chosen material constitution and is further controlled by a predetermined constitution of the insulating trench. The apparatus and method of invention are useful in any number of semiconductor devices including, among other, transistors, bipolar transistors, MOSFETs, JFETs, thyristors and diodes.
    • 本发明涉及一种用于实现半导体器件中的高击穿电压和低导通电阻的装置和方法,所述半导体器件具有穿过任何这些区域的可控电流路径的顶部,中间和底部区域。 该装置具有与顶部和中间区域共同延伸的绝缘沟槽,并且从至少一个侧面,优选地从两侧或全部侧面将这些区域线化。 具有偏置顶部元件和多个浮动元件的串联电容结构设置在绝缘沟槽中,并且中间区域具有被选择用于建立串联电容结构和中间体之间的电容性相互作用或耦合的电容性质 使得击穿电压VBD最大化并且导通电阻最小化。 通过适当选择的材料结构建立中间区域的电容性质,并通过绝缘沟槽的预定结构进一步控制。 本发明的装置和方法可用于任何数量的半导体器件,其中包括晶体管,双极晶体管,MOSFET,JFET,晶闸管和二极管。