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1. 发明授权

US6422264B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US6422264B2
公开(公告)日：2002-07-23
申请号：US73464000
申请日：2000-12-13
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time DELTAt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点的特定延迟时间DELTAt中达到设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

2. 发明专利

CA2442166A1 APPARATUS FOR THE CORRECTION OF TEMPERATURE DRIFT FOR A PRESSURE SENSOR, A PRESSURE CONTROL APPARATUS, AND A PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2442166A1
公开(公告)日：2003-07-17
申请号：CA2442166
申请日：2002-11-22
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： UNO TOMIO , SUGIYAMA KAZUHIKO , NAKAMURA OSAMU , MATSUMOTO ATSUSHI , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , OHMI TADAHIRO
IPC分类号： G01F1/50 , G01D3/02 , G01L9/00 , G01L19/04 , G05D7/06 , G05D16/20 , G01D3/028
摘要： A pressure sensor, a pressure controller and a flow controller in which the pressure can be detected accurately regardless of temperature variation by correcting temperature drift of the pressure sensor automatically. The temperature drift corrector of a pressure type flow controller comprises an upstream side pressure sensor (10) interposed between an orifice (4) and a control valve (22) and detecting the upstream side pressure P1. The pressure type flow controller for controlling flow rate at the orifice (4) by opening/closing the control valve (22) while operating the flow rate at the orifice (4) based on the upstream side pressure P1 comprises a temperature sensor (14) for measuring the fluid temperature, a memory means (64) for storing the relation between the fluid temperature T and the output drift of the upstream side pressure sensor (10), and means for correcting temperature drift by operating the output drift of the upstream side pressure sensor (10 ) from the data of the memory means (64) when the fluid temperature T is varie d and eliminating the output drift of the upstream side pressure sensor (10) b y the output drift thus operated. According to the arrangement, temperature drift of the pressure sensor is corrected automatically and accurate flow control is ensured.

3. 发明专利

CA2423342A1 IMPROVED PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2423342A1
公开(公告)日：2003-06-28
申请号：CA2423342
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO
发明人： UNO TOMIO , NISHINO KOUJI , DOHI RYOUSUKE , NAKAMURA OSAMU , SUGIYAMA KAZUHIKO , MATSUMOTO ATSUSHI , INUI SHUJIRO , IKEDA NOBUKAZU , SAKAI TAIJI , OHMI TADAHIRO , UEYAMA MASANORI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06 , G05D7/00
摘要： Provided is an improved pressure-type flow rate control apparatus that can control The flow rate of a fluid with great precision using an empirical formula. The empiric al formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a hi gh speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2m(P1 - P2)n and the flow rate of fluid passing through orifice 4 is calculated by: Qc - KP2m(P1 - P2)n (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controll ed to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r .ltoreq. r c), the flow rate is calculated by Qc = KP1. Under non-critical conditions (r = r c), the flow rate is calculated by Qc = KP2m(P1 - P2)n, so thatthe glow rate is controlled to the target flow rate with accuracy at a high spee d depending upon the conditions of fluid.

4. 发明专利

CA2442166C APPARATUS FOR THE CORRECTION OF TEMPERATURE DRIFT FOR A PRESSURE SENSOR, A PRESSURE CONTROL APPARATUS, AND A PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2442166C
公开(公告)日：2007-04-10
申请号：CA2442166
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , DOHI RYOUSUKE , MATSUMOTO ATSUSHI , NISHINO KOUJI , SUGIYAMA KAZUHIKO , IKEDA NOBUKAZU , NAKAMURA OSAMU , UNO TOMIO
IPC分类号： G01F1/50 , G01L19/04 , G01D3/02 , G01D3/028 , G01L9/00 , G05D7/06 , G05D16/20
摘要： 22 A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided in which the temperature drift of the pressure sensor is automatically corrected and pressure can be accurately detected in spite of changes in temperature. A pressure-type flow rate control apparatus, in which an apparatus for correcting temperature drift according to the present invention is installed, has an upstream side pressure sensor 10 provided between an orifice 4 and a control valve 22 for detecting an upstream side pressure P1, and controls the flow rate of a fluid passing through the orifice 4 by means of a regulating control valve 22, while calculating the flow rate of the fluid passing through the orifice 4 from the upstream side pressure P1, wherein th e apparatus for correcting temperature drift comprises a temperature sensor 14 for measuring the temperature of the fluid, a memory means 64 for storing a relation between t he fluid temperature T and an output drift of the upstream side pressure sensor 10, a nd a temperature drift correcting means which calculates the amount of the output drift of the upstream side pressure sensor 10 from data in the memory means 64 when the temperature T of the fluid changes, and offsets the output drift of the upstream side pressure sensor 10 with the calculated amount of the output drift, thereby correcting the temperature drift. By means of this arrangement, the temperature drift of the pressure sensor is automatically corrected, which makes it possible to control accurately the flow rate.

5. 发明专利

CA2423342C IMPROVED PRESSURE-TYPE FLOW RATE CONTROL APPARATUS 未知
公开(公告)号：CA2423342C
公开(公告)日：2007-03-06
申请号：CA2423342
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK , OHMI TADAHIRO
发明人： DOHI RYOUSUKE , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , OHMI TADAHIRO , NISHINO KOUJI , NAKAMURA OSAMU , UNO TOMIO , INUI SHUJIRO , IKEDA NOBUKAZU , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G05D7/00 , G01F1/36 , G01F1/42 , G05D7/06
摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empiric al formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a hi gh speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2m(P1 - P2)n and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP2m(P1 - P2)n (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controll ed to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r .ltoreq. r c), the flow rate is calculated by Qc = KP1. Under non-critical conditions (r > r c), the flow rate is calculated by Q c = KP2m(P1 - P2)n, so that the flow rate is controlled to the target flow rate with accuracy at a high spee d depending upon the conditions of fluid.

6. 发明公开

EP1096351A4 PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE 审中-公开
标题翻译：旁路类型和调节压力系统与可变液体压力流量的方法和设备布置成平行液装置这FLÜSSIGLEITSSPEISEVORRICHTUNGUSED
公开(公告)号：EP1096351A4
公开(公告)日：2004-12-15
申请号：EP00913087
申请日：2000-04-03
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.
摘要翻译：用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有在其它流动通道的稳流瞬态效应。为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道达在一个特定的延迟时间ΔT的一组流量Qs 从起点。这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式理论上推导做了与压力比不低于临界压力比更高流动。从做过公式，则流程因数被定义，所以做了式可以被应用到许多用流动因素气体类型。该方法包括：在下游侧计算通过传递到孔口雅丁式QC = KP1（K =常数）具有压力P1的气体的QC流量上设置节流孔上游侧的两次或更多次高于压力P2 ，worin流量因数FF为每种气体的计算如下： FF =（K /伽马S）A2 /（卡帕+ 1）U <1 /（卡帕-1）>是κ/ A（卡帕 + 1）RUU <1.2> 和worin，如果气体类型A的计算的流速是QA，并且，当将B型气体被允许在相同的压力下，通过相同的孔中流动的上游侧并在上游侧相同的温度，流率QB的计算公式如下： QB =（FFB / FFA）QA 其中YS =标准状态的气体的浓度; Kappa值=气体的比热的比值; R为气体的=常数; K =比例常数不依赖于气体的类型; FFA =气体类型A的流动系数; 气体类型B. 的和FFB =流量系数

7. 发明公开

EP1672457A4 DEVICE FOR CONTROLLING CHAMBER INNER PRESSURE AND INNER PRESSURE CONTROLLED-TYPE CHAMBER 审中-公开
标题翻译：一种用于控制腔内部压力和室内压控制型
公开(公告)号：EP1672457A4
公开(公告)日：2008-02-13
申请号：EP04817112
申请日：2004-09-14
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , TERAMOTO AKINOBU , UNO TOMIO , DOHI RYOUSUKE , NISHINO KOUJI , NAKAMURA OSAMU , MATSUMOTO ATSUSHI , NAGASE MASAAKI , IKEDA NOBUKAZU
IPC分类号： G05D7/06 , G05D16/20
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： Flow rate control accuracy is prevented from being reduced in a low flow rate region to enable highly accurate flow rate control over the entire flow rate control region. By this, a chamber inner pressure is highly accurately controlled over a wide range by regulating the flow rate of a gas fed to a chamber. A gas feeding device for feeding a gas to a chamber, where the device is constituted of parallelly connected pressure-type flow rate control devices and a control device for controlling the flow rate control devices and feeds a desired gas, while controlling the flow rate, to a chamber deaerated by a vacuum pump. The gas feeding device is constructed such that one of the pressure-type flow control devices controls a gas flow rate range of up to 10% maximum of the maximum flow rate fed to the chamber and the remaining flow control devices control the remaining range. Further, a pressure detector is installed on a chamber and a detected value from the detector is inputted in the control device. Control signals to the pressure-type flow rate control devices are regulated to control the amount of the gas fed to the chamber, controlling a chamber inner pressure.

8. 发明公开

EP1643218A4 DIFFERENTIAL PRESSURE TYPE FLOWMETER AND DIFFERENTIAL PRESSURE TYPE FLOWMETER CONTROLLER 审中-公开
标题翻译：差压式和流量计控制差压式流量计
公开(公告)号：EP1643218A4
公开(公告)日：2007-05-09
申请号：EP04746098
申请日：2004-06-18
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： OHMI TADAHIRO , SUGIYAMA KAZUHIKO , UNO TOMIO , IKEDA NOBUKAZU , NISHINO KOUJI , NAKAMURA OSAMU , DOHI RYOUSUKE , MATSUMOTO ATSUSHI
IPC分类号： G01F1/42 , G01F1/00 , G01F1/50 , G01F1/88 , G01F7/00 , G05D7/06
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A differential pressure type flow meter in which production cost is lowered by simplifying the structure and high-accuracy measurement of flow rate can be carried out in real time under inline state with an error E not higher than (1%SP) over a wide flow rate range of 100%-1%. The differential pressure type flow meter comprises an orifice, a detector of pressure P1 on the upstream side of the orifice, a detector of pressure P2 on the downstream side of the orifice, a detector of fluid temperature T on the upstream side of the orifice, and a control operation circuit for operating the flow rate Q of fluid passing through the orifice using detected pressures P1 and P2 and detected temperature T from respective detectors, wherein the flow rate Q of fluid is operated according to the following expression; Q=C1.P1/√T.((P2/P1) -(P2/P1) ) (where, C1 is a proportional constant, m and n are constants).

9. 发明公开

EP1475684A4 ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE 有权
标题翻译： VERBESSERTESTRÖMUNGUNGSSTEUEREINRICHTUNGDES DRUCKTYPS
公开(公告)号：EP1475684A4
公开(公告)日：2005-09-07
申请号：EP02781829
申请日：2002-11-22
申请人： FUJIKIN KK , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G01F1/36 , G01F1/42 , G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.
摘要翻译：一种先进的压力型流量控制装置，其能够通过使用所建立的实验流量表达准确地控制流量，所述实验流量表达准确地适应非临界区域中的可压缩流体的实际流量，其中，临界区域非声速区域表示为Qc = KP2mP1-P2n，并且通过节流孔4的流体流量通过使用以下表达式来计算Qc = KP2m P1-P2n K是比例常数，m和n是常数可以将流量精确而快速地控制到特定的流量，并且总是将由上游侧压力P1和下游侧压力P2提供的压力比P2 / P1 = r与临界值rc进行比较，并且通过在r rc的非临界条件下使用表达式Qc = KP2m P1-P2n，从而可以将流量精确且快速地控制为指定的一个对应于流体的所有条件。

10. 发明专利

DE60219365T2 未知
公开(公告)号：DE60219365T2
公开(公告)日：2007-08-09
申请号：DE60219365
申请日：2002-11-22
申请人： TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
IPC分类号： G01F1/00 , G05D7/06 , G01F1/36 , G01F1/42
摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empirical formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions. The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a high speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP2 (P1 - P2) and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP2 (P1 - P2) (K is a proportional constant; and m and n are constants) so that the flow rate of fluid passing through the orifice 4 can be controlled to the target flow rate with high precision at a high speed. Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1 = r, obtained from an upstream pressure P1 and a downstream pressure P2 is constantly compared with a critical value rc, and under critical conditions (r ≤ rc), the flow rate is calculated by : Qc = KP1. Under non-critical conditions (r > rc), the flow rate is calculated by Qc = KP2 (P1 - P2) , so that the flow rate is controlled to the target flow rate with accuracy at a high speed depending upon the conditions of fluid.

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