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    • 1. 发明申请
    • PRESSURE SENSOR
    • 压力传感器
    • WO1992012408A1
    • 1992-07-23
    • PCT/DE1992000016
    • 1992-01-10
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...PLÖCHINGER, HeinzOFFEREINS, Henderikus, L.SANDMAIER, Hermann
    • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ...
    • G01L09/00
    • G01L9/0073G01L19/147
    • A pressure sensor has a first and second sensor body (2, 3). The first sensor body (2) has a first recess (4) on the rear which defines a diaphragm region (6). The second sensor body (3) has a second rear recess (9) and its rear is connected to the front of the first sensor body (2) to form a pressure sensor chamber (12). In order to increase the overload resistance of the pressure sensor, the second sensor body (3) has overload contact devices which are arranged in such a way that the edge (24) of the diaphragm region (6) contacts said devices, at least when an overload pressure exceeding the measuring pressure is applied to the diaphragm region (6), said devices (13, 20, 21) having a smaller mutual distance (b) in the diaphragm direction compared with the lateral extent (a) of the diaphragm region (6) between the etched notches (8) of the first rear recess (4) in the first sensor body (2).
    • 压力传感器具有第一和第二传感器体(2,3)。 第一传感器体(2)在其后部具有限定膜片区域(6)的第一凹部(4)。 第二传感器体(3)具有第二后凹部(9),并且其后部连接到第一传感器主体(2)的前部,以形成压力传感器室(12)。 为了增加压力传感器的过载阻力,第二传感器体(3)具有过载接触装置,其以使得隔膜区域(6)的边缘(24)接触所述装置的方式布置,至少在 超过测量压力的过载压力被施加到膜片区域(6)上,与膜片区域的横向范围(a)相比,在膜片方向上具有较小相互距离(b)的装置(13,20,21) (6)在第一传感器体(2)中的第一后凹部(4)的蚀刻缺口(8)之间。