专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2007113325A8 MICROMECHANICAL HOUSING COMPRISING AT LEAST TWO CAVITIES HAVING DIFFERENT INTERNAL PRESSURE AND/OR DIFFERENT GAS COMPOSITIONS AND METHOD FOR THE PRODUCTION THEREOF 审中-公开
标题翻译： MICRO机械GEHÄUSUNG有至少两个不同与内部压力和/或不同的气体成分及其制造方法孔洞
公开(公告)号：WO2007113325A8
公开(公告)日：2009-11-12
申请号：PCT/EP2007053342
申请日：2007-04-04
申请人： FRAUNHOFER GES FORSCHUNG , MERZ PETER , REINERT WOLFGANG , OLDSEN MARTEN , SCHWARZELBACH OLIVER
发明人： MERZ PETER , REINERT WOLFGANG , OLDSEN MARTEN , SCHWARZELBACH OLIVER
IPC分类号： B81B7/00
CPC分类号： B81B7/0038 , B81B7/02 , B81C1/00285
摘要： The invention relates to a multiple component which is to be subsequently individualised by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. Said multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. Said component is characterised in that the first of the two cavities is provided with getter material and due to said getter material has a different internal pressure and/or a different gas composition than the second cavity. The invention also relates to a method for producing said type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.
摘要翻译：本发明涉及一种多组分，提供了一种用于随后的分离，以形成含有活性结构部件，和一个相应的，在微系统技术组件可用，其中所述多组分或部件具有平的基底和类似平面结构帽结构，接合在一起，使得它们包围至少第一和每个调用的组件的第二空腔，其彼此和来自外部环境的密封，其特征在于，所述第一两个腔的设置有吸气剂材料，并且由于这个吸气另一内部压力和/或小于第二空腔的不同的气体组合物。本发明还涉及一种制造这样的装置或部件，其被用于不同类型的气体，其具有朝向所述吸气剂材料不同的吸收行为的气体混合物的方法。

2. 发明申请

WO2005098358A3 ANGULAR RATE SENSOR FEATURING MECHANICALLY DECOUPLED OSCILLATION MODES 审中-公开
标题翻译：与机械振动解耦FASHIONS旋转旋转速率传感器
公开(公告)号：WO2005098358A3
公开(公告)日：2005-12-22
申请号：PCT/EP2005003670
申请日：2005-04-07
申请人： FRAUNHOFER GES FORSCHUNG , SCHWARZELBACH OLIVER
发明人： SCHWARZELBACH OLIVER
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： The invention relates to an angular rate sensor for detecting a rotation. Said sensor comprises the following components: a substrate, at least one oscillating element that can be excited so as to oscillate rotationally or radially, an anchor structure, one or several detecting elements, one or several joining elements that connect the detecting element/s to the oscillating element, a mechanism for exciting the oscillating element, and a device for detecting a radial or rotational oscillation of the detecting element/s. Each of the detecting elements can oscillate radially on the same plane on which rotational oscillation of the oscillating element occurs, or vice versa, while the centrifugal force Fz caused by the rotational oscillation can trigger substantially no radial movement of the detecting element/s or the oscillating element/s. Also disclosed are different methods for operating said sensor.
摘要翻译：本发明涉及一种横摆率传感器，用于检测旋转。该传感器包括以下部件：一个基底，可通过激励在旋转或径向振动位移的至少一个振动元件，锚结构中，一个或多个检测元件（一个或多个），一个或多个连接构件（一个或多个），这是/将所述或所述检测元件（一个或多个）连接/连接到振动元件，用于激发所述振荡元件的激振装置和检测装置，用于检测径向或的或检测元件（一个或多个）的旋转振动。每个检测元件可以是在同一平面上，其中执行振动器的旋转振动，进行径向振荡，或者反之亦然，但是由旋转振荡离心力Fz的（多个）基本上没有径向运动或检测元件或或振动元件（一个或多个）可以触发。此外，提供了用于操作传感器的各种方法。

3. 发明专利

DE102004017480B4 未知
公开(公告)号：DE102004017480B4
公开(公告)日：2009-04-16
申请号：DE102004017480
申请日：2004-04-08
申请人： FRAUNHOFER GES FORSCHUNG
发明人： SCHWARZELBACH OLIVER
IPC分类号： G01C19/56

4. 发明专利

DE102006048381A1 未知
公开(公告)号：DE102006048381A1
公开(公告)日：2008-04-17
申请号：DE102006048381
申请日：2006-10-12
申请人： FRAUNHOFER GES FORSCHUNG , SENSORDYNAMICS AG
发明人： SCHWARZELBACH OLIVER , WEISS MANFRED , KEMPE VOLKER
IPC分类号： G01P15/125 , G01P15/18
摘要： Exemplary embodiments relate to a sensor for detecting an acceleration acting on the sensor, having: a substrate, a mass unit, which acts as an inert mass in the event of the presence of an acceleration, a fixing structure, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and the mass unit has an interial center of gravity, which is at a distance from the respective pivot axis, and at least one detection unit, with which a change in position between the mass unit and the substrate may be detected. The detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit.

5. 发明专利

CA2670513C A SENSOR FOR DETECTING ACCELERATIONS 未知
公开(公告)号：CA2670513C
公开(公告)日：2016-01-26
申请号：CA2670513
申请日：2007-10-12
申请人： FRAUNHOFER GES FORSCHUNG , SENSORDYNAMICS AG ENTWICKLUNGS UND PRODUKTIONSGESELLSCHAFT
发明人： SCHWARZELBACH OLIVER , WEISS MANFRED , KEMPE VOLKER
IPC分类号： G01P15/02 , G01P15/125 , G01P15/18
摘要： The present invention relates to a sensor for detecting an acceleration acting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing structure (2, 1, 5), by means of which the mass unit is articulated on the substrate, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of gravity (4), which is at a distance from the respective pivot axis, and at least one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit. Preferably, two detection units are provided. A change in position between the mass unit and the substrate which is brought about as a result of an acceleration of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acceleration of the sensor acting in a second direction.

6. 发明专利

CA2670513A1 SENSOR FOR DETECTING ACCELERATION 未知
公开(公告)号：CA2670513A1
公开(公告)日：2008-04-17
申请号：CA2670513
申请日：2007-10-12
申请人： FRAUNHOFER GES FORSCHUNG , SENSORDYNAMICS AG ENTWICKLUNGS
发明人： SCHWARZELBACH OLIVER , WEISS MANFRED , KEMPE VOLKER
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18
摘要： The present invention relates to a sensor for detecting an acceleration a cting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing str ucture (2, 1, 5), by means of which the mass unit is articulated on the subs trate, wherein the mass unit is articulated on the substrate in such a way t hat at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of g ravity (4), which is at a distance from the respective pivot axis, and at le ast one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the dete ction unit is arranged with respect to the mass unit in such a way that a de formation of the mass unit cannot be transferred to the detection unit. Pref erably, two detection units are provided. A change in position between the m ass unit and the substrate which is brought about as a result of an accelera tion of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acc eleration of the sensor acting in a second direction.

7. 发明专利

DE502007013188C5 MIKROMECHANISCHE GEHÄUSUNG MIT MINDESTENS ZWEI KAVITÄTEN MIT UNTERSCHIEDLICHEM INNENDRUCK UND/ODER UNTERSCHIEDLICHER GASZUSAMMENSETZUNG SOWIE VERFAHREN ZU DEREN HERSTELLUNG 未知
公开(公告)号：DE502007013188C5
公开(公告)日：2021-07-29
申请号：DE502007013188
申请日：2007-04-04
申请人： FRAUNHOFER GES FORSCHUNG
发明人： REINERT WOLFGANG , OLDSEN MARTEN , SCHWARZELBACH OLIVER , MERZ PETER
IPC分类号： B81C1/00 , B81B7/00 , B81B7/02
摘要： In der Mikrosystemtechnik einsetzbares Bauteil mit einem Substrat und einer Kappenstruktur, die so durch einen hermetisch schließenden Bondrahmen miteinander verbunden sind, dass sie mindestens einen ersten und einen zweiten Hohlraum umschließen, die gegeneinander und gegen die Außenumgebung abgedichtet sind, wobei in dem ersten Hohlraum ein Drehratensensor und in dem zweiten Hohlraum ein Beschleunigungssensor angeordnet ist und wobei der erste Hohlraum einen anderen Innendruck aufweist als der zweite Hohlraum, dadurch gekennzeichnet, dass der erste der beiden Hohlräume mit einem Gettermaterial versehen ist und dass sein Innendruck aufgrund dieses Gettermaterials anders ist als der Innendruck des zweiten Hohlraums.

8. 发明专利

DE102006016260A1 未知
公开(公告)号：DE102006016260A1
公开(公告)日：2007-10-18
申请号：DE102006016260
申请日：2006-04-06
申请人： FRAUNHOFER GES FORSCHUNG
发明人： MERZ PETER , REINERT WOLFGANG , OLDSEN MARTEN , SCHWARZELBACH OLIVER
IPC分类号： H01L23/10 , B81B7/00 , B81C1/00
摘要： The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.

9. 发明专利

DE102004017480A1 未知
公开(公告)号：DE102004017480A1
公开(公告)日：2005-10-27
申请号：DE102004017480
申请日：2004-04-08
申请人： FRAUNHOFER GES FORSCHUNG
发明人： SCHWARZELBACH OLIVER
IPC分类号： G01C19/56 , G01P9/04

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式