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1. 发明申请

WO2009124542A2 METHOD AND DEVICE FOR IGNITING AN ARC 审中-公开
标题翻译：用于点燃电弧闪光的方法和装置
公开(公告)号：WO2009124542A2
公开(公告)日：2009-10-15
申请号：PCT/DE2009000498
申请日：2009-04-07
申请人： FRAUNHOFER GES FORSCHUNG , GRABAU PATRICK , ROCH JULIUS , HOPFE VOLKMAR , DANI INES
发明人： GRABAU PATRICK , ROCH JULIUS , HOPFE VOLKMAR , DANI INES
IPC分类号： H05H1/24
CPC分类号： H05H1/2406 , H05H2001/2412 , H05H2001/3426
摘要： The invention relates to a method and a device for igniting an arc between an anode and a cathode of a plasma source at ambient atmosphere conditions, said cathode being arranged at a distance to the anode and the plasma source being suitable to produce a substrate surface modification. The aim of the invention is to reduce the effort required for igniting an arc and to make the ignition process safer. The invention is characterized in that a barrier discharge is ignited by means of a supplied gas by means of two electrodes that are arranged in parallel to the longitudinal axis between the anode and the cathode, the electrodes being connected to a high voltage generator and being supplied with high-frequency alternating current voltage during ignition. When a direct current voltage is applied to the anode and the cathode, the charge carriers present due to the barrier discharge between the anode and the cathode allow ignition of an arc.
摘要翻译：本发明涉及一种用于点燃在等离子体源一定距离处布置的阳极和阴极之间的电弧的方法和装置，其可以用于在环境大气条件下进行衬底表面改性。本发明的目的是降低点燃等离子体源电弧的费用并使点火过程更安全。在本发明中，该过程是这样的，即通过两个平行于与高压发生器连接的阳极和阴极排列的电极之间的纵向轴线并且在利用高频交流电压点燃时采用供应气体点燃阻挡放电。结果，当施加施加到阳极和阴极的直流电压时，在由阳极和阴极之间的阻挡放电所携带的电荷载流子的情况下，电弧可以被点燃。

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