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1. 发明授权

US06577970B2 Method of determining a crystallographic quality of a material located on a substrate 有权
公开(公告)号：US06577970B2
公开(公告)日：2003-06-10
申请号：US09801455
申请日：2001-03-08
申请人： Erik C. Houge , John M. McIntosh , Larry E. Plew , Fred A. Stevie , Catherine Vartuli
发明人： Erik C. Houge , John M. McIntosh , Larry E. Plew , Fred A. Stevie , Catherine Vartuli
IPC分类号： G01N3700
CPC分类号： G01N23/225
摘要： The present invention provides a method of determining a crystallographic quality of a material located on a substrate. The method includes determining a set of crystallographic solutions for an unknown crystallographic orientation, and subsequently comparing the set of crystallographic solutions to adjacent known crystallographic orientations to determine the unknown crystallographic orientation. In a preferred embodiment, the set of crystallographic solutions may be a rank of crystallographic solutions which may represent the most probable crystallographic orientations. The rank of crystallographic solutions, in an alternative embodiment, may be represented by a vote, a fit and a confidence index.

2. 发明授权

US06627885B1 Method of focused ion beam pattern transfer using a smart dynamic template 有权
标题翻译：使用智能动态模板的聚焦离子束图案转移方法
公开(公告)号：US06627885B1
公开(公告)日：2003-09-30
申请号：US09631545
申请日：2000-08-03
申请人： John M. McIntosh , Erik C. Houge , Fred A. Stevie , Catherine Vartuli , Scott Jessen
发明人： John M. McIntosh , Erik C. Houge , Fred A. Stevie , Catherine Vartuli , Scott Jessen
IPC分类号： H01J3726
CPC分类号： G03F1/74 , G03F1/84 , H01J37/28 , H01J2237/2817
摘要： The present invention provides a method of forming a dynamic template with a focused beam. The method includes forming a desired template that represents a desired image, forming an actual template that represents an actual image, such as a photolithographic mask or a semiconductor device feature, and comparing the desired template to the actual template to yield a deviation template. In one embodiment the deviation template is formed by subtracting the actual template from the desired template.
摘要翻译：本发明提供了一种用聚焦光束形成动态模板的方法。该方法包括形成表示期望图像的所需模板，形成表示实际图像的实际模板，例如光刻掩模或半导体器件特征，并将所需模板与实际模板进行比较以产生偏差模板。在一个实施例中，通过从期望的模板中减去实际模板来形成偏差模板。

3. 发明授权

US07342225B2 Crystallographic metrology and process control 有权
标题翻译：晶体计量和过程控制
公开(公告)号：US07342225B2
公开(公告)日：2008-03-11
申请号：US10505198
申请日：2003-02-24
申请人： Erik C. Houge , Brian Kempshall , Stephen M. Schwarz , Fred A. Stevie
发明人： Erik C. Houge , Brian Kempshall , Stephen M. Schwarz , Fred A. Stevie
IPC分类号： H01J37/28 , H01J37/256 , G01N23/00
CPC分类号： H01J37/295 , G01N23/203 , Y10S117/902
摘要： A system (70) for crystallography including a sample holder (74), an electron source (76) for generating an electron beam, and a scanning actuator (80) for controlling the relative movement between the electron beam and the crystalline sample, the scanning actuator being controllable for directing the electron beam at a series of spaced apart points within the sample area. The system also includes an image processor (84) for generating crystallographic data based upon electron diffraction from the crystalline sample and for determining whether sufficient data have been acquired to characterize the sample area. The system further includes a controller (86) for controlling the scanning actuator to space the points apart such that acquired data is representative of a different grains within the crystalline sample. IN other embodiments, the invention includes one or more ion beams (178, 188) for crystallography and a combination ion beam/electron beam (218, 228).
摘要翻译：一种用于晶体学的系统（70），包括样品保持器（74），用于产生电子束的电子源（76）和用于控制电子束和结晶样品之间的相对运动的扫描致动器（80），扫描致动器是可控制的，用于在样品区域内的一系列间隔开的点处引导电子束。该系统还包括一个图像处理器（84），用于根据晶体样品的电子衍射产生晶体数据，并确定是否已获取足够的数据来表征样品区域。所述系统还包括控制器（86），用于控制所述扫描致动器将所述点间隔开，使得所获取的数据代表所述结晶样品内的不同晶粒。在其它实施例中，本发明包括用于晶体学的一个或多个离子束（178,188）和离子束/电子束（218,228）的组合。

4. 发明授权

US4861126A Low temperature intrinsic gettering technique 失效
标题翻译：低温内在吸气技术
公开(公告)号：US4861126A
公开(公告)日：1989-08-29
申请号：US190721
申请日：1988-05-05
申请人： Mindaugas F. Dautartas , Alain S. Harrus , Edward P. Martin, Jr. , Fred A. Stevie
发明人： Mindaugas F. Dautartas , Alain S. Harrus , Edward P. Martin, Jr. , Fred A. Stevie
IPC分类号： G02B6/13 , G02F1/035 , G02F1/313 , H01L21/322
CPC分类号： G02F1/035 , G02B6/13 , H01L21/3221 , G02F1/3132 , G02F2201/066 , G02F2203/21
摘要： Ionic drift in integrated optical devices is reduced by the utilization of a gettering layer interposed between the surface dielectric and the electrodes. The material used to form this layer is capable of gettering the mobile ions at a relatively low temperature (for example
摘要翻译：集成光学器件中的离子漂移通过利用介于表面电介质和电极之间的吸杂层来减少。用于形成该层的材料能够在相对低的温度（例如<600℃）下吸收移动离子。

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