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1. 发明授权

US07486459B1 Disk drive with performance driven head-to-disk spacing 有权
标题翻译：磁盘驱动器具有性能驱动的头到盘间距
公开(公告)号：US07486459B1
公开(公告)日：2009-02-03
申请号：US11101296
申请日：2005-04-07
申请人： Erhard Schreck , Anthony R. Hurtado , Andrew LeFebvre , Chris Hawks , Thao Anh Nguyen , Scott Hughes , Bruce C. Schardt , Donald J. Brunnett
发明人： Erhard Schreck , Anthony R. Hurtado , Andrew LeFebvre , Chris Hawks , Thao Anh Nguyen , Scott Hughes , Bruce C. Schardt , Donald J. Brunnett
IPC分类号： G11B27/36 , G06K9/60
CPC分类号： G11B27/36 , G11B5/3133 , G11B5/40 , G11B5/6064 , G11B19/048 , G11B2220/2516 , Y10T29/49025 , Y10T29/49036
摘要： A disk drive for storing data includes a drive housing, a storage disk that is rotatably coupled to the drive housing, a slider assembly positioned near the storage disk, and a drive circuitry. The slider assembly includes a head that interacts with the storage disk during a data transfer operation. The drive circuitry performs a performance test on the head at a first HtD spacing and at a second HtD spacing that is different than the first HtD spacing while the drive is operation. The slider assembly includes a slider mover that moves the head between the first HtD spacing and the second HtD spacing. The slider mover can move the head to the first HtD spacing during the data transfer operation if the result of the performance test is a first test result and the slider mover moves the head to the second HtD spacing during the data transfer operation if the result of the performance test is a second test result.
摘要翻译：用于存储数据的磁盘驱动器包括驱动器壳体，可旋转地联接到驱动器壳体的存储盘，位于存储盘附近的滑块组件和驱动电路。滑块组件包括在数据传送操作期间与存储盘相互作用的头部。驱动电路在驱动器运行时以第一HtD间隔和第二HtD间隔在头上执行与第一HtD间隔不同的性能测试。滑动器组件包括滑块移动器，其在第一HtD间隔和第二HtD间距之间移动头部。如果性能测试的结果是第一测试结果，并且滑块移动器在数据传输操作期间将磁头移动到第二HtD间距，则滑块移动器可以在数据传送操作期间将磁头移动到第一HtD间距，如果结果为性能测试是第二个测试结果。

2. 发明授权

US07324299B1 Disk drive that positions a head at multiple head-to-disk spacings 有权
标题翻译：磁盘驱动器将磁头定位在多个磁头到磁盘间距
公开(公告)号：US07324299B1
公开(公告)日：2008-01-29
申请号：US11101114
申请日：2005-04-07
申请人： Erhard Schreck , Donald J Brunnett , Jingbo Yu , Francis P. Crimi , Scott Hughes , Duc Banh , Anthony R. Hurtado , Kazuhiro Saito , Andrew LeFebvre , Chris Hawks , Thao Anh Nguyen , Brian Strom , Bruce C. Schardt
发明人： Erhard Schreck , Donald J Brunnett , Jingbo Yu , Francis P. Crimi , Scott Hughes , Duc Banh , Anthony R. Hurtado , Kazuhiro Saito , Andrew LeFebvre , Chris Hawks , Thao Anh Nguyen , Brian Strom , Bruce C. Schardt
IPC分类号： G11B21/02 , G11B5/596 , G11B5/58
CPC分类号： G11B5/58
摘要： A disk drive having a drive housing, a storage disk that is rotatably coupled to the drive housing, and a slider assembly that includes a head and a slider mover. The head reads data from the storage disk during a read operation and writes data to the storage disk during a write operation. The slider mover maintains the head at a read HtD spacing during the read operation, at a pre-write HtD spacing during the read operation prior to the write operation, at a write HtD spacing during the write operation, and at an idle HtD spacing when the drive is not performing the read operation or the write operation. The disk drive includes a drive circuitry that directs a read power level to the slider mover to maintain the head at the read HtD spacing, a pre-write power level to maintain the head at the pre-write HtD spacing, a write power level to maintain the head at the write HtD spacing, and a idle power level to maintains the head at the idle HtD spacing.
摘要翻译：具有驱动器壳体，可旋转地联接到驱动器壳体的存储盘的磁盘驱动器和包括头部和滑块移动器的滑块组件。在读取操作期间，磁头从存储磁盘读取数据，并在写操作期间将数据写入存储磁盘。滑动移动器在读操作期间以读写操作期间的读取HtD间隔，在写操作期间的读操作期间以写入HtD间隔，在写操作期间以写HtD间隔，以及在空闲HtD间隔处将头保持在读取HtD间隔，驱动器不执行读操作或写操作。磁盘驱动器包括驱动电路，其将读取功率电平引导到滑块移动器以将磁头保持在读取HtD间隔，预写功率电平以将磁头保持在预写HtD间隔，写入功率电平将头部保持在写入HtD间距，并保持空闲功率级别，以将头部保持在空闲HtD间距。

3. 发明授权

US07310194B1 System for monitoring and dynamically adjusting head-to-disk spacing in a disk drive 失效
标题翻译：用于监视和动态调整磁盘驱动器中磁盘间距的系统
公开(公告)号：US07310194B1
公开(公告)日：2007-12-18
申请号：US11101089
申请日：2005-04-07
申请人： Bruce C. Schardt , Erhard Schreck , Jingbo Yu , Michael Mallary , Scott Hughes , Duc Banh , Kazuhiro Saito , Donald J Brunnett , Tim Glassburn , Chris Hawks , Thao Anh Nguyen , Andrew LeFebvre , Joerg Ferber , Richard K. Oswald , Brian Strom
发明人： Bruce C. Schardt , Erhard Schreck , Jingbo Yu , Michael Mallary , Scott Hughes , Duc Banh , Kazuhiro Saito , Donald J Brunnett , Tim Glassburn , Chris Hawks , Thao Anh Nguyen , Andrew LeFebvre , Joerg Ferber , Richard K. Oswald , Brian Strom
IPC分类号： G11B21/02
CPC分类号： G11B5/6029 , G11B5/3133 , G11B5/455 , G11B5/5534 , G11B5/607
摘要： A disk drive includes a drive housing, a storage disk, a slider and a drive circuitry. The slider magnetically interacts with the storage disk, and includes a read/write head that is positioned to have an actual head-to-disk spacing greater than zero nanometers during rotation of the storage disk. The drive circuitry can determine and/or monitor the actual head-to-disk spacing at any time during the operation of the disk drive based on an amplitude or a change in the amplitude of a signal such as a variable gain amplifier signal. In one embodiment, the slider includes a slider mover that receives current via the drive circuitry and causes a deformation of a portion of the slider to change the head-to-disk spacing based on the amplitude of the signal. In another embodiment, the read/write head moves during substantially consistent rotational velocity of the storage disk from a first actual head-to-disk spacing equal to approximately zero nanometers, to a second actual head-to-disk spacing that is greater than zero nanometers based on a desired amplitude of the signal.
摘要翻译：磁盘驱动器包括驱动器壳体，存储盘，滑块和驱动电路。该滑块与存储盘磁性地相互作用，并且包括读/写头，其被定位成在存储盘旋转期间具有大于零纳米的实际头到盘间距。驱动电路可以基于诸如可变增益放大器信号的信号的振幅或振幅的变化来确定和/或监视磁盘驱动器的操作期间的任何时间的实际磁头到磁盘间距。在一个实施例中，滑块包括滑块移动器，其通过驱动电路接收电流，并且导致滑块的一部分的变形，以基于信号的幅度来改变头对盘间隔。在另一个实施例中，读/写头在存储盘的基本一致的旋转速度从等于大约零纳米的第一实际磁头到磁盘间隔移动到大于零的第二实际磁头到磁盘间隔基于信号的期望幅度的纳米。

4. 发明授权

US07509728B1 Method for adjusting head-to-disk spacing in a disk drive 有权
标题翻译：调整磁盘驱动器中磁盘间距的方法
公开(公告)号：US07509728B1
公开(公告)日：2009-03-31
申请号：US11101298
申请日：2005-04-07
申请人： Erhard Schreck , Francis P. Crimi , Duc Bahn , Thao Anh Nguyen , Kazuhiro Saito , Donald J. Brunnett , Andrew LeFebvre , Scott Hughes , Brian Strom , Michael Mallary , Hyunchul Shim , Bruce C. Schardt
发明人： Erhard Schreck , Francis P. Crimi , Duc Bahn , Thao Anh Nguyen , Kazuhiro Saito , Donald J. Brunnett , Andrew LeFebvre , Scott Hughes , Brian Strom , Michael Mallary , Hyunchul Shim , Bruce C. Schardt
IPC分类号： G11B21/02
CPC分类号： G11B27/36 , G11B5/3133 , G11B5/40 , G11B5/6064 , G11B19/048 , G11B2220/2516 , Y10T29/49025 , Y10T29/49036
摘要： A method for manufacturing a first disk drive includes incorporating a first storage disk having a first storage surface, and a first slider having a first read/write head and a slider mover into the first disk drive. Further, the first read/write head is movably positioned a first head-to-disk spacing relative to the first storage surface. The method also includes determining an incremental power level necessary to be delivered to a second slider mover of a second slider having a second read/write head to adjust a second head-to-disk spacing relative to a second storage surface by a predetermined increment. In addition, the method includes adjusting a first head-to-disk spacing by directing an operational power level to the first slider mover. The operational power level is derived from the incremental power level. The step of determining an incremental power level can include directing power to the second slider mover and detecting approximately when a portion of the second slider first contacts the second storage surface. Moreover, the step of adjusting can be performed during one or more manufacturing operations of the first disk drive.
摘要翻译：一种用于制造第一盘驱动器的方法，包括：将具有第一存储表面的第一存储盘和具有第一读/写头和滑块移动器的第一滑块结合到第一盘驱动器中。此外，第一读/写头相对于第一存储表面可移动地定位成第一头对盘间隔。该方法还包括确定必须传送到具有第二读/写头的第二滑块的第二滑块移动器所需的增量功率水平，以相对于第二存储表面调整第二头 - 盘间隔预定增量。此外，该方法包括通过将操作功率电平引导到第一滑块移动器来调整第一头对盘间隔。运行功率电平是从增量功率电平得出的。确定增量功率水平的步骤可以包括将功率引导到第二滑块移动器，并且大体上检测第二滑块的一部分是否首先接触第二存储表面。此外，可以在第一盘驱动器的一个或多个制造操作期间执行调整步骤。

5. 发明授权

US07310195B1 System and method for adjusting head-to-disk spacing in a disk drive 失效
标题翻译：用于调整磁盘驱动器中磁盘间距的系统和方法
公开(公告)号：US07310195B1
公开(公告)日：2007-12-18
申请号：US11101113
申请日：2005-04-07
申请人： Erhard Schreck , Francis P. Crimi , Andrew LeFebvre , Duc Banh , Thao Anh Nguyen , Brian Strom , Bruce C. Schardt
发明人： Erhard Schreck , Francis P. Crimi , Andrew LeFebvre , Duc Banh , Thao Anh Nguyen , Brian Strom , Bruce C. Schardt
IPC分类号： G11B21/02 , G11B5/596 , G11B5/58
CPC分类号： G11B5/6005
摘要： A disk drive includes a drive housing, a storage disk, a slider and a drive circuitry. The storage disk has an inner and an outer diameter. The slider includes a read/write head and a slider mover that receives power from the drive circuitry to position the read/write head at a predetermined head-to-disk spacing during radial movement of the slider relative to the storage disk. The drive circuitry can direct a varying level of power to the slider mover during radial movement of the slider. In addition, the drive circuitry can increase the power to the slider mover as the read/write head nears a target track in order to decrease the head-to-disk spacing at the appropriate time. The drive circuitry can adjust the power to the slider mover so that the head-to-disk spacing remains within a predetermined range as the slider moves radially relative to the storage disk. The drive circuitry can also direct power to the slider mover so that the head-to-disk spacing is substantially the same at the start of a seek operation and when the read/write head arrives at a target track. The drive circuitry can also direct power to the slider mover based at least partially on the temperature of a portion of the slider.
摘要翻译：磁盘驱动器包括驱动器壳体，存储盘，滑块和驱动电路。存储盘具有内径和外径。滑动器包括读/写头和滑块移动器，其在驱动器相对于存储盘的径向移动期间从驱动电路接收功率以将读/写头定位在预定的头到盘间隔。驱动电路可以在滑块的径向运动期间将变化的功率级别引导到滑块移动器。此外，当读/写头靠近目标轨道时，驱动电路可以增加滑块移动器的功率，以便在适当的时间减小头对盘间距。驱动电路可以调节滑块移动器的功率，使得当滑块相对于存储盘径向移动时，磁头到磁盘间隔保持在预定范围内。驱动电路还可以将电力引导到滑块移动器，使得在寻道操作开始时和当读/写头到达目标轨道时，磁头到磁盘的间距基本相同。驱动电路还可以至少部分地基于滑块的一部分的温度将功率引导到滑块移动器。

6. 发明授权

US6118632A Magnetic disk stack having laser-bump identifiers on magnetic disks 失效
标题翻译：磁盘堆在磁盘上具有激光凸点标识符
公开(公告)号：US6118632A
公开(公告)日：2000-09-12
申请号：US800097
申请日：1997-02-12
申请人： Thomas Robert Albrecht , Peter Michael Baumgart , Thao Anh Nguyen , Kurt Allen Rubin , Andrew Ching Tam
发明人： Thomas Robert Albrecht , Peter Michael Baumgart , Thao Anh Nguyen , Kurt Allen Rubin , Andrew Ching Tam
IPC分类号： G11B5/00 , G11B5/012 , G11B5/016 , G11B5/09 , G11B5/65 , G11B5/73 , G11B5/738 , G11B5/82 , G11B5/84 , G11B11/10 , G11B13/00 , G11B20/10 , G11B27/11 , G11B27/24
CPC分类号： G11B5/012 , G11B27/11 , G11B27/24 , G11B5/82 , G11B2005/001 , G11B2220/20 , G11B2220/65
摘要： A magnetic disk with nonmagnetic information encoded under, in or above the magnetic layer of the disk is described along with the disk drive using the magnetic disks. The information may be stored as a series of laser-written marks (e.g., bumps, oxidized spots or spots with altered reflectivity) upon the surface(s) of each disk of the disk stack. The set of marks may be a series of laser bumps which serve a dual purpose as a landing zone or contact start/stop (CSS) zone for the slider and as encoded identifying information. During the manufacturing process for disk drives containing the disks, each disk's identifier can be read using outboard equipment such as an HRF tester or by means contained in the drive itself. Each disk identifier can then be stored magnetically in a special region of the hard disk reserved for use by the drive and/or within the flash memory of the hard drive. The drive can then communicate the identifier(s) to a host computer using the conventional communication hardware and firmware. In this way selected information such as the origin, batch number, date of manufacture, serial number, etc. of any disk can be obtained when needed as, for example, as part of failure analysis.
摘要翻译：与使用磁盘的磁盘驱动器一起描述在磁盘的磁性层下面或上方编码的具有非磁性信息的磁盘。信息可以作为一系列激光写入的标记（例如，具有改变的反射率的凸起，氧化点或斑点）存储在盘堆叠的每个盘的表面上。该组标记可以是一系列激光凸块，其作为滑块的着陆区域或接触开始/停止（CSS）区域和作为编码的识别信息的双重目的。在包含磁盘的磁盘驱动器的制造过程中，可以使用诸如HRF测试仪之类的外部设备或驱动器本身包含的方式读取每个磁盘的标识符。然后可以将磁盘的每个标识符磁性地存储在硬盘的特殊区域中，以供驱动器使用和/或在硬盘驱动器的闪存中使用。然后，驱动器可以使用传统的通信硬件和固件将标识符传送到主计算机。以这种方式，当需要时，例如作为故障分析的一部分，可以获得任何盘的原点，批号，制造日期，序列号等所选择的信息。

7. 发明授权

US5768076A Magnetic recording disk having a laser-textured surface 失效
标题翻译：具有激光纹理表面的磁记录盘
公开(公告)号：US5768076A
公开(公告)日：1998-06-16
申请号：US601887
申请日：1996-02-15
申请人： Peter Michael Baumgart , Wing Pun Leung , Thao Anh Nguyen , Andrew Ching Tam
发明人： Peter Michael Baumgart , Wing Pun Leung , Thao Anh Nguyen , Andrew Ching Tam
IPC分类号： B23K26/00 , G11B5/60 , G11B5/62 , G11B5/64 , G11B5/82 , G11B5/84 , G11B5/704
CPC分类号： B23K26/0078 , G11B5/62 , G11B5/64 , G11B5/82 , G11B5/84 , G11B5/8404 , G11B5/8408 , G11B5/6011
摘要： A data recording disk having at least part of the data storage surface textured according to a process for creating a "distant bump array" surface texture for reducing stiction. The texturing process uses a tightly focused diode-pumped Nd:YLF or Nd:YVO.sub.4 or other solid-state laser that is pulsed with a 0.3-90 nanosecond pulse train to produce a plurality of distantly-spaced bumps in the disk surface. The bump profile can be selected as a smooth dimple or one with a central protrusion useful for low stiction without close spacing or elevated "roughness". The data-storage region of the disk surface can be textured for low stiction without materially affecting magnetic data storage density.
摘要翻译：一种数据记录盘，其具有至少部分数据存储表面，根据用于创建用于减少静摩擦的“远凸起阵列”表面纹理的处理而纹理化。纹理化处理使用紧密聚焦的二极管泵浦Nd：YLF或Nd：YVO4或其他固体激光器，其用0.3-90纳秒脉冲串脉冲，以在盘表面中产生多个远距离间隔的凸块。凸起轮廓可以选择为平滑的凹坑，也可以选择具有中心凸起的中心凸起，该中心凸起可用于低静压，而没有紧密间隔或升高的“粗糙度”。磁盘表面的数据存储区域可以纹理化以实现低静态，而不会对磁数据存储密度造成重大影响。

8. 发明授权

US6013336A Procedure employing a diode-pumped laser for controllably texturing a disk surface 失效
标题翻译：采用二极管泵浦激光器可控地纹理化磁盘表面的程序
公开(公告)号：US6013336A
公开(公告)日：2000-01-11
申请号：US4694
申请日：1998-01-08
申请人： Peter Michael Baumgart , Wing Pun Leung , Thao Anh Nguyen , Andrew Ching Tam
发明人： Peter Michael Baumgart , Wing Pun Leung , Thao Anh Nguyen , Andrew Ching Tam
IPC分类号： B23K26/00 , G11B5/60 , G11B5/62 , G11B5/64 , G11B5/82 , G11B5/84 , B05D3/06 , B05D5/12
CPC分类号： B23K26/0078 , G11B5/62 , G11B5/64 , G11B5/82 , G11B5/84 , G11B5/8404 , G11B5/8408 , G11B5/6011
摘要： A process for creating a "distant bump array" surface texture in a magnetic recording disk for reducing stiction and the disk so textured. The texturing process uses a tightly focused diode-pumped Nd:YLF or Nd:YVO.sub.4 or other solid-state laser that is pulsed with a 0.3-90 nanosecond pulse train to produce a plurality of distantly-spaced bumps in the disk surface. The bump creation process is highly controllable, permitting repeated creation of a preselected bump profile such as a smooth dimple or one with a central protrusion useful for low stiction without close spacing or elevated "roughness". Some bump profiles permit texturing of the data-storage region of the disk surface for low stiction without materially affecting magnetic data storage density.
摘要翻译：用于在磁记录盘中创建“远距离的凸块阵列”表面纹理以减少静摩擦和磁盘的纹理的过程。纹理化处理使用紧密聚焦的二极管泵浦Nd：YLF或Nd：YVO4或其他固体激光器，其用0.3-90纳秒脉冲串脉冲，以在盘表面中产生多个远距离间隔的凸块。凸起创建过程是高度可控的，允许重复地产生预选的凸起轮廓，例如平滑凹坑或具有用于低静摩擦的中心突起的凸起轮廓，而没有紧密间隔或升高的“粗糙度”。一些凸块轮廓允许对磁盘表面的数据存储区域进行纹理化以实现低静态，而不会对磁数据存储密度造成重大影响。

9. 发明授权

US06205002B1 Disk drive with textured slider contact region 失效
标题翻译：带有纹理滑块触点区域的磁盘驱动器
公开(公告)号：US06205002B1
公开(公告)日：2001-03-20
申请号：US08874848
申请日：1997-06-13
申请人： Peter Michael Baumgart , Thomas Allen Gregory , Ulla Vasant Nayak , Thao Anh Nguyen , Michael Luis Ramirez , Andrew Ching Tam , Run-Han Wang
发明人： Peter Michael Baumgart , Thomas Allen Gregory , Ulla Vasant Nayak , Thao Anh Nguyen , Michael Luis Ramirez , Andrew Ching Tam , Run-Han Wang
IPC分类号： G11B582
CPC分类号： G11B5/60 , G11B5/012 , G11B5/54 , G11B5/82 , G11B21/12 , G11B21/22
摘要： A disk drive having a disk with a contact start/stop (CSS) region on which a slider can rest is described. The CSS region is divided into at least three zones with the inner and outer zones having a surface topography which is different from the surface topography of the middle zone. The middle zone of the CSS region may be textured with bumps having a lower average height, a lower average density and/or a different bump diameter. The middle zone may also be left untextured. The slider is maintained over the CSS region during spin up and/or spin down.
摘要翻译：描述了一种具有带触点启动/停止（CSS）区域的磁盘的磁盘驱动器，滑块可以放置在该区域上。 CSS区域被分成至少三个区域，内部和外部区域具有与中间区域的表面形貌不同的表面形貌。 CSS区域的中间区域可以纹理化，具有较低的平均高度，较低的平均密度和/或不同的凸起直径的凸起。中间区域也可能没有纹理。在旋转和/或旋转时，滑块保持在CSS区域上。

10. 发明授权

US5689057A Calibration disk with disk bumps for calibrating PZT sliders 失效
标题翻译：校准盘，用于校准PZT滑块
公开(公告)号：US5689057A
公开(公告)日：1997-11-18
申请号：US607753
申请日：1996-02-27
申请人： Peter Michael Baumgart , Karl A. Flechsig , Michael Franklin Lee , Wing P. Leung , Ullal Vasant Nayak , Thao Anh Nguyen , Timothy Christopher O'Sullivan , Andrew Ching Tam
发明人： Peter Michael Baumgart , Karl A. Flechsig , Michael Franklin Lee , Wing P. Leung , Ullal Vasant Nayak , Thao Anh Nguyen , Timothy Christopher O'Sullivan , Andrew Ching Tam
IPC分类号： B23K26/08 , G11B5/82 , G11B5/84 , G11B7/00 , G11B7/08 , G11B33/10 , G01B5/28
CPC分类号： B82Y15/00 , B23K26/0823 , B82Y10/00 , G11B33/10 , G11B5/82 , G11B5/8404 , G11B5/8408 , Y10T29/49995
摘要： Crater shaped bumps are made on a calibration disk which can be used for calibrating a PZT slider, the PZT slider in turn being used for detecting predetermined asperities on a production run magnetic disk. The crater shaped bumps emulate predetermined asperities of production run magnetic disks and especially asperities which are undesirable and would cause the production run disk to be discarded after testing by the PZT slider. Crater shaped bumps which emulate undesirable asperities on current production runs of magnetic disks have a diameter in the range of 10 to 25 .mu.m and a peripheral ridge with a height h.sub.r above a nominal surface of the calibration disk in the range of 75 to 120 nm. Close tolerance crater shaped bumps with this configuration can be made by impinging two or more pulses of laser energy on the same location of a calibration disk. By increasing the number of pulses the height of the peripheral ridge progressively increases. By employing multiple pulses, the height of the peripheral ridge is increased while the diameter of the crater shaped bump stays substantially constant. Further, by employing multiple pulses diameters and heights of crater shaped bumps can be produced with close tolerances within a diameter range of 5 to 20 .mu.m and a height range of 2 to 120 nm. Different arrangements of the crater shaped bumps on a calibration disk are provided for increasing the range of calibration of the PZT slider.
摘要翻译：在可用于校准PZT滑块的校准盘上形成火山口形凸块，PZT滑块又用于检测生产运行磁盘上的预定凹凸。火山口形凸起模拟生产运行磁盘的预定粗糙度，特别是不期望的粗糙度，并且会在PZT滑块测试后导致生产运行盘被丢弃。在当前的磁盘生产运行中模拟不期望的粗糙度的火山口形凸起具有在10至25μm的范围内的直径和在校准盘的标称表面上的高度hr在75至120nm范围内的周边脊。可以通过在校准盘的相同位置上照射激光能量的两个或更多个脉冲来实现具有该配置的紧公差凹坑形状的凸块。通过增加脉冲数，周边脊的高度逐渐增加。通过采用多个脉冲，周边脊的高度增加，而凹坑形凸起的直径基本保持不变。此外，通过使用多个脉冲，可以在5〜20μm的直径范围内和2〜120nm的高度范围内产生具有紧密公差的凹坑形凸起的高度。提供校准盘上的凹坑形突起的不同布置，用于增加PZT滑块的校准范围。

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