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1. 发明授权

US5689057A Calibration disk with disk bumps for calibrating PZT sliders 失效
标题翻译：校准盘，用于校准PZT滑块
公开(公告)号：US5689057A
公开(公告)日：1997-11-18
申请号：US607753
申请日：1996-02-27
申请人： Peter Michael Baumgart , Karl A. Flechsig , Michael Franklin Lee , Wing P. Leung , Ullal Vasant Nayak , Thao Anh Nguyen , Timothy Christopher O'Sullivan , Andrew Ching Tam
发明人： Peter Michael Baumgart , Karl A. Flechsig , Michael Franklin Lee , Wing P. Leung , Ullal Vasant Nayak , Thao Anh Nguyen , Timothy Christopher O'Sullivan , Andrew Ching Tam
IPC分类号： B23K26/08 , G11B5/82 , G11B5/84 , G11B7/00 , G11B7/08 , G11B33/10 , G01B5/28
CPC分类号： B82Y15/00 , B23K26/0823 , B82Y10/00 , G11B33/10 , G11B5/82 , G11B5/8404 , G11B5/8408 , Y10T29/49995
摘要： Crater shaped bumps are made on a calibration disk which can be used for calibrating a PZT slider, the PZT slider in turn being used for detecting predetermined asperities on a production run magnetic disk. The crater shaped bumps emulate predetermined asperities of production run magnetic disks and especially asperities which are undesirable and would cause the production run disk to be discarded after testing by the PZT slider. Crater shaped bumps which emulate undesirable asperities on current production runs of magnetic disks have a diameter in the range of 10 to 25 .mu.m and a peripheral ridge with a height h.sub.r above a nominal surface of the calibration disk in the range of 75 to 120 nm. Close tolerance crater shaped bumps with this configuration can be made by impinging two or more pulses of laser energy on the same location of a calibration disk. By increasing the number of pulses the height of the peripheral ridge progressively increases. By employing multiple pulses, the height of the peripheral ridge is increased while the diameter of the crater shaped bump stays substantially constant. Further, by employing multiple pulses diameters and heights of crater shaped bumps can be produced with close tolerances within a diameter range of 5 to 20 .mu.m and a height range of 2 to 120 nm. Different arrangements of the crater shaped bumps on a calibration disk are provided for increasing the range of calibration of the PZT slider.
摘要翻译：在可用于校准PZT滑块的校准盘上形成火山口形凸块，PZT滑块又用于检测生产运行磁盘上的预定凹凸。火山口形凸起模拟生产运行磁盘的预定粗糙度，特别是不期望的粗糙度，并且会在PZT滑块测试后导致生产运行盘被丢弃。在当前的磁盘生产运行中模拟不期望的粗糙度的火山口形凸起具有在10至25μm的范围内的直径和在校准盘的标称表面上的高度hr在75至120nm范围内的周边脊。可以通过在校准盘的相同位置上照射激光能量的两个或更多个脉冲来实现具有该配置的紧公差凹坑形状的凸块。通过增加脉冲数，周边脊的高度逐渐增加。通过采用多个脉冲，周边脊的高度增加，而凹坑形凸起的直径基本保持不变。此外，通过使用多个脉冲，可以在5〜20μm的直径范围内和2〜120nm的高度范围内产生具有紧密公差的凹坑形凸起的高度。提供校准盘上的凹坑形突起的不同布置，用于增加PZT滑块的校准范围。

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