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1. 发明专利

JP2012154337A System and method for correcting for pressure variation using motor 有权
标题翻译：使用电机校正压力变化的系统和方法
公开(公告)号：JP2012154337A
公开(公告)日：2012-08-16
申请号：JP2012085238
申请日：2012-04-04
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： GONNELLA GEORGE , CEDRONE JAMES , ZAGARS RAYMOND A , MCLOUGHLIN ROBERT F
IPC分类号： F04B43/02 , F04B11/00 , F04B43/04
CPC分类号： F04B13/00
摘要： PROBLEM TO BE SOLVED: To provide systems and methods for compensating for pressure increase that may occur in various enclosed spaces of a pumping apparatus.SOLUTION: Embodiments of the present invention may compensate for pressure increases in chambers of the pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for the pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.
摘要翻译：要解决的问题：提供用于补偿可能在泵送装置的各种封闭空间中可能发生的压力增加的系统和方法。解决方案：本发明的实施例可以通过移动泵送装置的泵送装置来调节泵送装置的腔室中的压力增加，以调节腔室的体积以补偿腔室中的压力增加。更具体地，在一个实施例中，为了解决分配室中的流体的不希望的压力增加，分配马达可以反向以返回活塞以补偿分配室中的任何压力增加。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2013058251A System and method for flow monitoring and control 有权
标题翻译：流量监测与控制系统与方法
公开(公告)号：JP2013058251A
公开(公告)日：2013-03-28
申请号：JP2012256361
申请日：2012-11-22
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： BRODEUR CRAIG L , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , NIERMEYER KARL J , SHYU JIEH-HWA
IPC分类号： G05D7/00 , G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that can control flow rate using a single sensor.SOLUTION: A control device (30) comprises: an inlet (32) for receiving a flow; an outlet (34) for directing the flow to other components of a flow system; a pressure reduction element (36); a pressure sensor (38) located upstream from the pressure reduction element (36) configured to measure upstream pressure; a pressure sensor (40) located downstream from the pressure reduction element (36) configured to measure downstream pressure; a controller (42), which can comprise a processor, a memory and software instructions for determining fluid flow rate and generating a valve control signal; and a valve (44), such as a butterfly valve and a hydraulically driven valve, responsive to the valve control signal to regulate fluid flow.
摘要翻译：要解决的问题：提供可以使用单个传感器来控制流量的流量控制装置。控制装置（30）包括：用于接收流动的入口（32）; 用于将流引导到流动系统的其它部件的出口（34）; 减压元件（36）; 位于所述减压元件（36）上游的压力传感器（38），其被配置成测量上游压力; 位于所述减压元件（36）的下游的压力传感器（40），其构造成测量下游压力; 控制器（42），其可以包括处理器，用于确定流体流速并产生阀门控制信号的存储器和软件指令; 以及响应于阀控制信号来调节流体流动的阀（44），例如蝶阀和液压驱动阀。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2011003203A Flow control system for adjusting stop/suction valve for distributing fluid 审中-公开
标题翻译：用于调节流量控制系统，用于调节用于分配流体的停止/止回阀
公开(公告)号：JP2011003203A
公开(公告)日：2011-01-06
申请号：JP2010163589
申请日：2010-07-21
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： MCLOUGHLIN ROBERT F , GONNELLA GEORGE L , KING TIMOTHY J
IPC分类号： B05D3/00 , G05D16/20 , B05C11/10 , G03F7/16 , H01L21/027
CPC分类号： G05D16/2013 , B05C5/02 , B05C11/1013 , B05C11/1026 , G03F7/16 , G05D16/2026 , Y10T137/0379 , Y10T137/2409 , Y10T137/776
摘要： PROBLEM TO BE SOLVED: To provide a control system for adjusting a stop/suction valve so as to precisely distribute fluid.SOLUTION: First and second flow limiting devices 20 and 21 have first and second air outlets, respectively fluid-communicated with a stop part and a suction part of the stop/suction valve 10. First and second pressure sensors 24 and 25 sense the pressure inside a first air outlet and the pressure inside a second air outlet. A computer processor 30, respectively independently controls the pressure of the first and the second air outlets, in response to the first and the second pressure sensors. The pressure of the first and the second air outlets is maintained over a predetermined time so that the stoppage part and the absorption part of the stop/suction valve are respectively maintained at a prescribed opening position, and the pressure of the first and second air outlets is controlled respectively independently so that the stoppage part and the absorption part of the stop/suction valve are respectively maintained in a predetermined closing position over a predetermined time.
摘要翻译：要解决的问题：提供一种用于调节停止/吸入阀以便精确地分配流体的控制系统。解决方案：第一和第二限流装置20和21具有分别与停止部分流体连通的第一和第二空气出口和吸气阀10的抽吸部分。第一和第二压力传感器24和25检测第一空气出口内的压力和第二空气出口内的压力。计算机处理器30响应于第一和第二压力传感器分别独立地控制第一和第二空气出口的压力。第一和第二空气出口的压力保持在预定时间内，使得停止/吸入阀的停止部分和吸收部分分别保持在规定的打开位置，并且第一和第二出气口分别独立地控制，使得停止/吸入阀的停止部分和吸收部分在预定时间内分别保持在预定的关闭位置。

4. 发明专利

JP2008016038A Control system for adjusting stop/suction valve for distributing fluid 审中-公开
标题翻译：用于调节分配流体的停止/抽吸阀的控制系统
公开(公告)号：JP2008016038A
公开(公告)日：2008-01-24
申请号：JP2007185233
申请日：2007-07-17
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： MCLOUGHLIN ROBERT F , GONNELLA GEORGE L , KING TIMOTHY J
IPC分类号： B05D3/00 , G05D16/20 , B05C11/10 , G03F7/16 , H01L21/027
CPC分类号： G05D16/2013 , B05C5/02 , B05C11/1013 , B05C11/1026 , G03F7/16 , G05D16/2026 , Y10T137/0379 , Y10T137/2409 , Y10T137/776
摘要： PROBLEM TO BE SOLVED: To provide a control system for adjusting a stop/suction valve so as to precisely distribute fluid. SOLUTION: First and second flow limiting devices 20 and 21 have first and second air outlets respectively fluidly communicated with a stop part and a suction part of the stop/suction valve 10. First and second pressure sensors 24 and 25 sense pressure in a first air outlet and pressure in a second air outlet. A computer processor 30 respectively controls the pressure of the first and second outlets in response to the first and second pressure sensors. The pressure of the first and second air outlets is maintained over a predetermined time so that the stop part and the absorption part of the stop/suction valve are respectively maintained in a predetermined opening position. The pressure of the first and second air outlets is controlled so that the stop part and absorption part of the stop/suction valve are respectively maintained in a predetermined closing position over the predetermined time. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于调节停止/吸入阀以便精确地分配流体的控制系统。解决方案：第一和第二限流装置20和21具有第一和第二空气出口分别与停止部分和止动/吸入阀10的吸入部分流体连通。第一和第二压力传感器24和25感测压力第一空气出口和第二空气出口中的压力。计算机处理器30分别响应于第一和第二压力传感器控制第一和第二出口的压力。第一和第二出气口的压力保持在预定的时间，使得停止部分和停止/吸入阀的吸收部分分别保持在预定的打开位置。控制第一和第二空气出口的压力，使得停止/吸入阀的停止部分和吸收部分在预定时间内分别保持在预定的关闭位置。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2010176707A System and method for flow monitoring and control 有权
标题翻译：流量监测与控制系统与方法
公开(公告)号：JP2010176707A
公开(公告)日：2010-08-12
申请号：JP2010106809
申请日：2010-05-06
申请人： Entegris Inc , エンテグリース,インコーポレイテッド
发明人： BRODEUR CRAIG L , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , NIERMEYER KARL J , SHYU JIEH-HWA
IPC分类号： G05D7/06 , G01F1/00 , G01F1/36
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that controls a flow rate using a single sensor. SOLUTION: A control device (30) includes: an inlet (32) for receiving a flow; an outlet (34) for directing a flow to other components of a flow system; a pressure loss element (36); a pressure sensor (38) located upstream from the pressure loss element (36) configured to measure an upstream pressure; a pressure sensor (40) located downstream from the pressure loss element (36) configured to measure a downstream pressure; a controller (42), which includes processor, memory and software instructions for determining a fluid flow rate for generating a valve control signal; and a valve (44), such as a butterfly valve and a hydraulically driven valve, responsive to the valve control signal to regulate fluid flow. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用单个传感器控制流量的流量控制装置。控制装置（30）包括：用于接收流动的入口（32）; 用于将流引导到流系统的其它部件的出口（34）; 压力损失元件（36）; 位于所述压力损失元件（36）上游的压力传感器（38），其构造成测量上游压力; 压力传感器（40）位于所述压力损失元件（36）的下游，被配置成测量下游压力; 控制器（42），其包括用于确定用于产生阀门控制信号的流体流速的处理器，存储器和软件指令; 以及响应于阀控制信号来调节流体流动的阀（44），例如蝶阀和液压驱动阀。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2011071564A System and method of controlling fluid flow 有权
标题翻译：控制流体流动的系统和方法
公开(公告)号：JP2011071564A
公开(公告)日：2011-04-07
申请号：JP2011004417
申请日：2011-01-12
申请人： Entegris Inc , エンテグリース,インコーポレイテッド
发明人： LAVERDIERE MARC , MCLOUGHLIN ROBERT F
IPC分类号： H01L21/31 , G05D7/00 , G05D7/06 , G05D11/00
CPC分类号： G05D7/0635 , H01L21/6715 , Y10T137/0989
摘要： PROBLEM TO BE SOLVED: To provide an optimum system and a method of controlling fluid dispensation so as to surely effect the clean break-off of fluid upon the finishing of a dispensing process, and to decrease the crystallization of the fluid in a dispensing nozzle. SOLUTION: The system includes a control device capable of generating a flow rate control signal which closes a control valve in accordance with a first close distance parameter for the first segment of a close distance and capable of generating the flow rate control signal which closes the control valve in accordance with a second close distance parameter for the second segment of the close distance. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种最佳系统和一种控制流体分配的方法，以便在分配过程完成时可靠地影响流体的干净分离，并且减少流体在分配喷嘴。解决方案：该系统包括能够产生流量控制信号的控制装置，该流量控制信号根据紧密距离的第一段的第一近距离参数关闭控制阀，并且能够产生流量控制信号，根据近距离的第二段的第二近距离参数关闭控制阀。版权所有（C）2011，JPO＆INPIT

7. 发明专利

DE602006021614D1 E/A-SYSTEME, VERFAHREN UND EINRICHTUNGEN ZUR ANSCHALTUNG EINER PUMPENSTEUERUNG 未知
公开(公告)号：DE602006021614D1
公开(公告)日：2011-06-09
申请号：DE602006021614
申请日：2006-11-20
申请人： ENTEGRIS INC
发明人： CEDRONE JAMES , GONNELLA GEORGE , MCLOUGHLIN ROBERT F
IPC分类号： G06F3/00 , F04B13/00 , G05D11/00 , G06F13/38

8. 发明专利

SG135178A1 SYSTEM AND METHOD OF CONTROLLING FLUID FLOW 未知
公开(公告)号：SG135178A1
公开(公告)日：2007-09-28
申请号：SG2007057557
申请日：2005-02-07
申请人： ENTEGRIS INC
发明人： LAVERDIERE MARC , MCLOUGHLIN ROBERT F
IPC分类号： G05D7/00 , G05D7/06 , G05D11/00
摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

9. 发明专利

SG149738A1 SYSTEM AND METHOD FOR FLOW MONITORING AND CONTROL 未知
公开(公告)号：SG149738A1
公开(公告)日：2009-02-27
申请号：SG2007057565
申请日：2005-02-09
申请人： ENTEGRIS INC
发明人： BRODEUR CRAIG L , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , NIERMEYER KARL J , SHYU JIEH-HWA
IPC分类号： G05D7/06
摘要： System And Method For Flow Monitoring And Control A control device (30) include an inlet (32) for receiving a flow, an outlet (34) for directing a flow to other components of a flow system, pressure loss element (36) a pressure sensor (38) upstream pressure loss element (36) configured to measure an upstream of pressure, pressure sensor (40) downstream of pressure loss element (36) configured to measure a downstream pressure, a controller (42), which can include processor, memory and software instructions for determining a fluid flow rate for generating a valve control signal, and a valve (44) butterfly valve, a pneumatically driven valve responsive to the valve control signal to regulate fluid flow.

10. 发明专利

SG145614A1 SYSTEM AND METHOD FOR FLOW MONITORING AND CONTROL 未知
公开(公告)号：SG145614A1
公开(公告)日：2008-09-29
申请号：SG2007057540
申请日：2005-02-09
申请人： ENTEGRIS INC
发明人： BRODEUR CRAIG L , LAVERDIERE MARC , MCLOUGHLIN ROBERT F , NIERMEYER KARL J , SHYU JIEH-HWA
IPC分类号： G05D7/06
摘要： System And Method For Flow Monitoring And Control A control device (30) include an inlet (32) for receiving a flow, an outlet (34) for directing a flow to other components of a flow system, pressure loss element (36) a pressure sensor (38) upstream pressure loss element(36)configured to measure an upstream of pressure, pressure sensor(40)downstream of pressure loss element (36) configured to measure a downstream pressure, a controller (42), which can include processor, memory and software instructions for determining a fluid flow rate for generating a valve control signal, and a valve (44) butterfly valve, a pneumatically driven valve responsive to the valve control signal to regulate fluid flow.

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