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    • 4. 发明授权
    • Method and device for irradiating spots on a layer
    • 用于在层上照射斑点的方法和装置
    • US07399978B2
    • 2008-07-15
    • US10539351
    • 2003-11-20
    • Helmar Van SantenJacobus Hermanus Maria Neijzen
    • Helmar Van SantenJacobus Hermanus Maria Neijzen
    • G21G5/00G03B27/52G03B27/42G03C5/00
    • G03F7/70341G11B7/122G11B7/1374G11B7/261
    • For irradiating a layer a radiation beam is directed and focussed to a spot on the layer, relative movement of the layer relative to the optical element is caused so that, successively, different portions of the layer are irradiated and an interspace between a surface of the optical element nearest to the layer is maintained. Furthermore, at least a portion of the interspace through which the radiation irradiates the spot on the layer is maintained filled with a liquid, the liquid being supplied via a supply conduit and flowing out of an outflow opening through a total projected cross-sectional passage area in a plane parallel to the layer. The outflow opening or a plurality of the outflow openings are positioned such that, seen in a direction perpendicular to the layer, the total cross-sectional area has a centre in the portion of the interspace through which the radiation irradiates the spot.
    • 为了照射层,辐射束被引导并聚焦到层上的斑点,引起层相对于光学元件的相对运动,使得相继地照射该层的不同部分和在该层的表面之间的间隙 保持最靠近层的光学元件。 此外,辐射照射到层上的斑点的间隙的至少一部分保持充满液体,液体经由供应管道供给,并通过总投影横截面通过面积流出流出开口 在与平面平行的平面上。 流出开口或多个流出开口定位成使得从垂直于该层的方向看,总横截面积在该空间部分中的中心,辐射辐射穿过该点。
    • 7. 发明授权
    • Device for directing radiation to a layer, apparatus with such device and method using such apparatus
    • 用于将辐射引导到层的装置,具有这种装置的装置和使用这种装置的方法
    • US07605979B2
    • 2009-10-20
    • US11911559
    • 2006-04-13
    • Jacobus Hermanus Maria NeijzenHelmar Van Santen
    • Jacobus Hermanus Maria NeijzenHelmar Van Santen
    • G02B27/10G02B27/14
    • G11B7/261G03F7/70383G03F7/70583
    • A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
    • 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B1)聚焦到所述层上的第一光学元件(L1),用于聚焦源自第二辐射源 第二辐射源(S2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L2)具有孔(A2),其允许第一辐射束(B1)的光学上不受干扰地通过。 以这种方式实现L1和L2的紧凑且轻的配置以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。
    • 8. 发明申请
    • Device for Directing Radiation to a Layer, Apparatus with Such Device and Method Using Such Apparatus
    • 用于将辐射定向到层的装置,具有这种装置的装置和使用这种装置的方法
    • US20080186549A1
    • 2008-08-07
    • US11911559
    • 2006-04-13
    • Jacobus Hermanus Maria NeijzenHelmar Van Santen
    • Jacobus Hermanus Maria NeijzenHelmar Van Santen
    • G02B26/08
    • G11B7/261G03F7/70383G03F7/70583
    • A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
    • 描述了用于将辐射引导到层(1)的装置。 该装置包括用于将源自第一辐射源(S1)的第一辐射束(B 1)聚焦到所述层上的第一光学元件(L 1),用于聚焦第二辐射束的第二光学元件(L 2) B 2)源自第二辐射源(S 2)到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动,其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件(L 2)具有允许第一辐射束(B 1)的光学上不受干扰地通过的孔径(A 2)。 以这种方式,实现了L 1和L 2的紧凑和轻型结构以及改进的辐射束质量。 此外,公开了一种包括这种装置的装置和使用这种装置的方法。