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    • 3. 发明申请
    • TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP
    • 涡轮分子泵和用于涡轮分子泵的颗粒捕获
    • US20110293401A1
    • 2011-12-01
    • US13146497
    • 2010-02-05
    • Yukiteru SekitaKazuma KubotaTsuyoshi MoriyaEiichi Sugawara
    • Yukiteru SekitaKazuma KubotaTsuyoshi MoriyaEiichi Sugawara
    • F01D1/36B01D46/00B01D50/00F04D19/04
    • F04D29/701F04D19/042
    • A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).
    • 涡轮分子泵包括:转子(30),其形成有多级的旋转叶片(32),并且高速旋转; 沿所述泵的轴向布置成相对于所述旋转叶片(32)交替的多个固定叶片(33)。 包含旋转叶片(32)和固定叶片(33)的泵壳体(34),并形成有入口开口(21a); 设置在所述转子(30)的入口附近的圆盘(150),并且与所述旋转叶片的根部径向向内配置成与所述转子(30)的表面相对; 以及设置在入口开口(21a)和转子(30)之间并通过交织细线制成的圆柱形网状结构(153a,153b)。 撞击转子和反弹的颗粒被内部捕获在网状结构(153a,153b)中。