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1. 发明授权

US07620470B1 Method and apparatus for impasse detection and resolution 有权
标题翻译：用于僵尸检测和解决的方法和装置
公开(公告)号：US07620470B1
公开(公告)日：2009-11-17
申请号：US11241023
申请日：2005-09-30
申请人： Susan Hickey , Edward C. Stewart , Jason A. Grover , Cabe W. Nicksic
发明人： Susan Hickey , Edward C. Stewart , Jason A. Grover , Cabe W. Nicksic
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B19/4184 , G05B2219/31455 , G05B2219/32243 , G05B2219/32297 , G05B2219/37224 , Y02P90/14 , Y02P90/20
摘要： A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A fault detection relating to the processing of the semiconductor wafer is performed. Dynamically modifying the predetermined routing plan or the predetermined schedule based upon the fault detection. A predetermined process material delivery plan is dynamically modified based upon the modifying of the routing plan or modifying of the predetermined schedule.
摘要翻译：一种用于执行自动化处理流程调整的方法，装置和系统。基于路由规划和预定时间表处理半导体晶片。执行与半导体晶片的处理有关的故障检测。基于故障检测动态地修改预定的路由计划或预定的时间表。基于修改路由规划或修改预定时间表来动态地修改预定的处理材料传送计划。

2. 发明授权

US06766258B1 Method and apparatus for dynamically enabling trace data collection 失效
标题翻译：用于动态启用跟踪数据收集的方法和装置
公开(公告)号：US06766258B1
公开(公告)日：2004-07-20
申请号：US10160933
申请日：2002-05-31
申请人： Edward C. Stewart , Susan Hickey
发明人： Edward C. Stewart , Susan Hickey
IPC分类号： G01B528
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method includes identifying a degraded condition associated with the processing of a workpiece. At least one process tool associated with the degraded condition is identified. Trace data collection is enabled for the identified process tool. A system includes a processing system configured to process a workpiece and a tool monitor. The tool monitor is configured to identify a degraded condition associated with the processing of the workpiece, identify at least one process tool from the processing system associated with the degraded condition, and enable trace data collection for the identified process tool.
摘要翻译：一种方法包括识别与工件的处理相关联的退化状态。识别与劣化状况相关联的至少一个处理工具。为识别的过程工具启用跟踪数据收集。系统包括被配置为处理工件和工具监视器的处理系统。工具监视器被配置为识别与工件的处理相关联的劣化状况，从与劣化状态相关联的处理系统识别至少一个处理工具，并且为所识别的过程工具启用跟踪数据收集。

3. 发明授权

US07200779B1 Fault notification based on a severity level 失效
标题翻译：基于严重性级别的故障通知
公开(公告)号：US07200779B1
公开(公告)日：2007-04-03
申请号：US10133097
申请日：2002-04-26
申请人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
发明人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
IPC分类号： G06F11/00
CPC分类号： G06F11/0769 , G06F11/0709 , G06F11/076 , G06F11/0781
摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
摘要翻译：基于严重性级别提供了用于故障通知的方法和装置。该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

4. 发明授权

US06954883B1 Method and apparatus for performing fault detection using data from a database 有权
标题翻译：使用数据库中的数据进行故障检测的方法和装置
公开(公告)号：US06954883B1
公开(公告)日：2005-10-11
申请号：US10044340
申请日：2002-01-11
申请人： Elfido Coss, Jr. , Michael R. Conboy , Susan Hickey
发明人： Elfido Coss, Jr. , Michael R. Conboy , Susan Hickey
IPC分类号： G06F11/00
CPC分类号： G05B19/41875 , G05B2219/32196 , G05B2219/45031 , H01L21/67253 , H01L21/67288 , H01L22/20 , Y02P90/22
摘要： A method and an apparatus for performing fault detection using real-time or near real-time data from a database. A first process on at least one semiconductor wafer is performed. Data is acquired on at least one of a real-time basis and a near real-time basis, the data comprising at least one of a process state data, a tool state data, and an integrated metrology data resulting from the first processing of semiconductor wafer. The data is stored in a database. A fault detection analysis is performed based upon the data acquired from the database based upon a trigger signal that causes data to be extracted from the database on a substantially real time basis.
摘要翻译：一种用于使用来自数据库的实时或近实时数据执行故障检测的方法和装置。执行至少一个半导体晶片的第一工艺。以实时和近实时为基础的至少一个采集数据，所述数据包括由半导体的第一处理产生的过程状态数据，工具状态数据和集成测量数据中的至少一个晶圆。数据存储在数据库中。基于从数据库获取的数据基于触发信号执行故障检测分析，该触发信号使数据基本上实时地从数据库中提取出来。

5. 发明授权

US06697696B1 Fault detection control system using dual bus architecture, and methods of using same 失效
标题翻译：使用双总线架构的故障检测控制系统及其使用方法
公开(公告)号：US06697696B1
公开(公告)日：2004-02-24
申请号：US10085831
申请日：2002-02-28
申请人： Susan Hickey , Elfido Coss, Jr.
发明人： Susan Hickey , Elfido Coss, Jr.
IPC分类号： G06F1900
CPC分类号： G05B19/41875 , G05B2219/31356 , G05B2219/32222 , Y02P90/12 , Y02P90/22 , Y02P90/86
摘要： The present invention is generally directed to a fault detection control system using dual bus architecture, and methods of using same. In one illustrative embodiment, the system comprises a plurality of process tools, each of the tools adapted to perform at least one process operation on at least one workpiece, at least one sensor that is operatively coupled to each of the process tools and adapted to sense at least one parameter associated with at least one process operation, an initial fault detection unit coupled to an instrument bus, the initial fault detection unit adapted to receive data from at least one sensor on each of the plurality of process tools via the instrument bus, and a primary fault detection unit operatively coupled to a manufacturing execution system and a system bus, the data from the sensors on each of the plurality of process tools being provided to the primary fault detection unit after the data is processed in the initial fault detection unit. In one illustrative embodiment, one of the methods of identifying faults in a manufacturing system comprises processing a workpiece in a process tool, obtaining data regarding the processing of the workpiece in the process tool via at least one sensor that is operatively coupled to the process tool, providing the data obtained by the at least one sensor to an initial fault detection unit that is adapted to receive the data via an instrument bus, the initial fault detection unit determining if an alarm condition exists, and providing the data to a primary fault detection control unit via a system bus after the data is processed through the initial fault detection unit.
摘要翻译：本发明一般涉及使用双总线架构的故障检测控制系统及其使用方法。在一个说明性实施例中，系统包括多个处理工具，每个工具适于在至少一个工件上执行至少一个过程操作，至少一个传感器可操作地耦合到每个处理工具并适于感测与至少一个过程操作相关联的至少一个参数，耦合到仪器总线的初始故障检测单元，所述初始故障检测单元适于经由所述仪表总线从所述多个处理工具中的每一个上的至少一个传感器接收数据，以及可操作地耦合到制造执行系统和系统总线的主故障检测单元，在所述初始故障检测单元中处理所述数据之后，将来自所述多个处理工具中的每一个上的传感器的数据提供给所述主故障检测单元。在一个说明性实施例中，识别制造系统中的故障的方法之一包括在处理工具中处理工件，通过可操作地耦合到处理工具的至少一个传感器获得关于处理工具中的工件的处理的数据将由所述至少一个传感器获得的数据提供给适于经由仪表总线接收数据的初始故障检测单元，所述初始故障检测单元确定是否存在报警条件，并将所述数据提供给主要故障检测在通过初始故障检测单元处理数据之后，通过系统总线控制单元。

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