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1. 发明授权

US06258217B1 Rotating magnet array and sputter source 有权
标题翻译：旋转磁体阵列和溅射源
公开(公告)号：US06258217B1
公开(公告)日：2001-07-10
申请号：US09406853
申请日：1999-09-29
申请人： Edmond A. Richards , Paul R. Fournier , David Johnson , Abdul Lateef , David G. Lishan , Shinzo Onishi , Mark D. Kenney
发明人： Edmond A. Richards , Paul R. Fournier , David Johnson , Abdul Lateef , David G. Lishan , Shinzo Onishi , Mark D. Kenney
IPC分类号： C23C1435
CPC分类号： H01J37/3408 , C23C14/35 , H01J37/3455
摘要： A sputtering system and magnet array for depositing metal and metal-reactive gas coatings onto a substrate. The magnet array is designed for use in a rotating magnetron. The magnet array includes a plurality of magnets disposed on a plate. The plurality of magnets is arranged such that a closed-loop magnetic path is formed. The shape of the magnetic path is a double-lobe structure that includes first and second lobes that are symmetric to one another about an axis in the plane of the plate that intersects the center of rotation of the plate. The magnets are arranged in several rows. A first row of magnets has a double-lobe structure that corresponds to the first and second lobes of the magnetic path. Second and third rows of magnets are arranged in the shape of rings inside the first and second lobes of the magnetic path magnetic path. The lobe structure of the magnetic path can be circular or elliptical in shape. Using this design, a metal or metal-reactive gas coating can be deposited on the surface of the substrate at a high rate.
摘要翻译：用于将金属和金属反应性气体涂层沉积到衬底上的溅射系统和磁体阵列。磁体阵列设计用于旋转磁控管。磁体阵列包括设置在板上的多个磁体。多个磁体被布置成使得形成闭环磁路。磁路的形状是双瓣结构，其包括围绕板的平面中与轴的旋转中心相交的轴线彼此对称的第一和第二凸角。磁铁排成几行。第一排磁体具有对应于磁路的第一和第二凸角的双瓣结构。第二和第三排磁体被布置成在磁路磁路的第一和第二凸角内的环形。磁路的凸角结构可以是圆形或椭圆形。使用这种设计，金属或金属反应性气体涂层可以高速沉积在基板的表面上。

2. 发明授权

US06771482B2 Perimeter seal for backside cooling of substrates 有权
标题翻译：用于衬底背面冷却的周边密封
公开(公告)号：US06771482B2
公开(公告)日：2004-08-03
申请号：US10163567
申请日：2002-06-06
申请人： Mark D. Kenney
发明人： Mark D. Kenney
IPC分类号： H05F2300
CPC分类号： H01L21/67126
摘要： An apparatus, typically a sealing member extending around the periphery of a substrate support or chuck, seals an individual substrate with respect to a substrate support, typically in a processing chamber. The seal is of a corrugated shape, that enhances clamping forces, typically from electrostatic or mechanical clamps, to provide a seal between it and the substrate, for example a wafer.
摘要翻译：通常围绕衬底支撑件或卡盘的周边延伸的密封构件相对于通常在处理室中的衬底支撑件密封单个衬底。密封件是波纹形状，其通常通过静电或机械夹具增强夹紧力，以在其与衬底（例如晶片）之间提供密封。

3. 发明授权

US6154995A Trigger cover for firearm 失效
标题翻译：触发枪支盖
公开(公告)号：US6154995A
公开(公告)日：2000-12-05
申请号：US287785
申请日：1999-04-07
申请人： Richard C. Lenoir , Mark D. Kenney
发明人： Richard C. Lenoir , Mark D. Kenney
IPC分类号： F41A17/06 , F41A17/54 , F41A17/46
CPC分类号： F41A17/54 , F41A17/06
摘要： The trigger cover includes a housing having a clamp for secure attachment to the trigger guard of a firearm. Within the housing is an electrical circuit having a receiver energized by movement of a motion sensor. The receiver is coupled to a central processing unit which, upon receiving a signal from a remote transmitter, will energize a motor or solenoid to permit the spring-driven motion of a pair of guard plates which normally block access to the firearm trigger. The transmitter of the predetermined radio code may be worn as part of a piece of jewelry.
摘要翻译：触发盖包括具有用于牢固地附接到枪支的触发器护罩的夹具的壳体。在壳体内是具有由运动传感器的运动激励的接收器的电路。接收器耦合到中央处理单元，该中央处理单元在接收到来自远程发射器的信号时将激励电动机或螺线管，以允许一对防护板的弹簧驱动运动，这些防护板通常阻挡对火器触发器的访问。预定无线电代码的发射机可以作为一件首饰的一部分佩戴。

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