专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2008277698A Substrate carrying mechanism, and substrate processing apparatus having same 审中-公开
标题翻译：承载机构的基板，以及具有相同基板的基板处理装置
公开(公告)号：JP2008277698A
公开(公告)日：2008-11-13
申请号：JP2007122484
申请日：2007-05-07
申请人： Ebatekku:Kk , 株式会社エバテック
发明人： ISHIHARA SHINICHIRO , KAMIMURA NAOKI , KODAMA TAKUYA
IPC分类号： H01L21/677 , C23C16/44 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a substrate carrying mechanism that carries out inspection of the presence or non-presence of substrate defects and/or checking of completion of delivery thereof without causing significant cost increase, and to provide a substrate processing apparatus having same.
SOLUTION: The substrate carrying mechanism wherein the substrate received from the prior process is delivered for the post process includes a substrate holding means having a pair of support arms 61, 62 for holding two sides opposite a rectangular substrate 80, moving means 65-68 for moving the substrate holding means, and sensors 70a, b, which are mouunted at the ends of the support arms 61, 62, for detecting the substrate 80 to generate signals. Further, a deciding means for deciding the presence or non-presence of the substrate defects and/or the completion of delivery thereof based on the signal outputted from the sensors 70a, b is disposed on a side edge portion of the substrate 80 passing in front of the sensors 70a, b when receiving or delivering the substrate 80.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种基板承载机构，用于对基板缺陷的存在或不存在进行检查和/或检查其完成的传送而不引起显着的成本增加，并且提供一种基板处理装置有相同的解决方案：其中从现有方法接收的基板被输送用于后处理的基板承载机构包括：基板保持装置，具有一对支撑臂61,62，用于保持与矩形基板80相对的两侧;移动装置65 -68，以及用于检测基板80以产生信号的在支撑臂61,62的端部被修补的传感器70a，b。此外，基于从传感器70a，b输出的信号，确定基板缺陷的存在或不存在以及/或其传送完成的判定装置设置在前面通过的基板80的侧边缘部分上传感器70a，b在接收或传送基板80时。（C）版权所有（C）2009，JPO＆INPIT

IPRDB

热门服务

关于我们

友情链接

联系方式