专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPH10274174A LIQUID TRANSFERRING DEVICE AND ITS CONTROLLING METHOD 失效
公开(公告)号：JPH10274174A
公开(公告)日：1998-10-13
申请号：JP2392598
申请日：1998-01-21
申请人： EBARA CORP , EBARA DENSAN KK
发明人： YAMAMOTO JUICHI , IKEGAMI TETSUMASA , SOFUGAWA TAKUJI , AIYOSHIZAWA SHIYUNICHI , NAKAZAWA TOSHIHARU , KOJIMA YOSHINORI
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22
摘要： PROBLEM TO BE SOLVED: To prevent stagnation of liquid in a discharge pipe and stop fluid flow by means of a pump itself, by arranging a screw type pump having a pump rotor which can be controlled in rotational speed in both normal and reverse directions on the way of a liquid transferring line, and thereby suctioning back the liquid in a reverse direction. SOLUTION: In order to feed liquid, a pump rotor 13 is rotated in a normal direction, that is, a direction for spirally feeding liquid along a screw thread groove 12a from a suctioning port 2a to a discharging port 2b. After completing feeding of a required amount of liquid, the residual liquid in a discharge pipe 4 is suctioned back into a suction pipe 3. Namely, after the pump rotor 12 is stopped, the rotational direction of the pump rotor 12 is changed for suctioning the residual liquid inside the discharge pipe 4 back to the suction pipe 3. When the pump rotor 12 is stopped, however, liquid is under contraflow due to a large discharging port head and pressure difference between the pump suctioning side and the discharging side. In such a case, the rotational speed of the pump rotor 12 is reduced for performing suctioning back.

2. 发明专利

JPH10122178A VACUUM PUMP AND ITS PURGING METHOD 失效
公开(公告)号：JPH10122178A
公开(公告)日：1998-05-12
申请号：JP29437896
申请日：1996-10-16
申请人： EBARA CORP , EBARA DENSAN KK
发明人： KAWASAKI HIROYUKI , SOFUGAWA TAKUJI , NAKAZAWA TOSHIHARU
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To prevent an impurity such as nitrogen gas not contained in the process gas primarily from being contained in the circulated process gas when a vacuum pump is used in a vacuum system circulating the process gas for reutilization. SOLUTION: This vacuum pump 20 is used in a vacuum system guiding the process gas containing inactive gas into a vacuum chamber to react to an object to be processed in the vacuum chamber, exhausting the gas from the vacuum chamber, then returning a part of the exhausted gas into the vacuum chamber again. The inactive Ar gas contained in the process gas used for the oxide film etching of a wafer, for example, is used for the purge gas 21 guided into the vacuum pump 20 for purging.

3. 发明专利

JPH1018991A TURBO MOLECULAR PUMP 失效
公开(公告)号：JPH1018991A
公开(公告)日：1998-01-20
申请号：JP2590597
申请日：1997-01-24
申请人： EBARA CORP , EBARA DENSAN KK
发明人： MIYAMOTO MATSUTARO , AIYOSHIZAWA SHIYUNICHI , NAKAZAWA TOSHIHARU , KOJIMA YOSHINORI , KAWASAKI HIROYUKI , SOFUGAWA TAKUJI
IPC分类号： F04D19/04 , F16C32/04
摘要： PROBLEM TO BE SOLVED: To improve stability of rotation in the radial direction, and eliminate a bearing device and the like so as to compact a turbo molecular pump, by setting a ratio H/D of the height H to a pump main body and the maximum diameter D to a specific value or below. SOLUTION: A rotary cylindrical part 2 is rotatably supported between a cylindrical casing 3 and a fixed shaft 1 projected from a bottom plate 4. Three-stage rotary blades 7a-7c are formed on the outer surface of the rotary cylindrical part 2, and two fixed blades 8a, 8b formed on the inner surface of the easing 3 are alternately sandwiched among the rotary blades 7a-7c. A ratio H/D of the height H of a pump main body to the maximum diameter D f is set to flatness of 0.7 or below. An axial magnetic bearing 11 is arranged between an annular projection 9 on the upper inner side of the rotary cylindrical part 2 and a horizontal surface to which the upper recess 10 of the fixed shaft 1 is opposed, and a radial magnetic bearing 13 is arranged between opposed cylindrical surfaces below the axial magnetic bearing 11. The radial and axial magnetic bearings 13, 11 are arranged in a position where the whole centroid of the rotary cylindrical part 2 including the blades is sandwiched in the axial direction, therefore, by this arrangement, it is enough that the radial bearing is axially arranged in only one place.

4. 发明专利

JP2011192654A Sample surface inspection method and inspection device 有权
标题翻译：样品表面检查方法和检验装置
公开(公告)号：JP2011192654A
公开(公告)日：2011-09-29
申请号：JP2011108943
申请日：2011-05-16
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NOMICHI SHINJI , NAITO YOSHIHIKO , SOFUGAWA TAKUJI , TERAO KENJI , HATAKEYAMA MASAKI , OKUMURA KATSUYA
IPC分类号： H01J37/21 , H01J37/244 , H01J37/28 , H01J37/29 , H01L21/66
CPC分类号： H01J37/265 , G01R31/307 , H01J37/04 , H01J2237/2441 , H01J2237/2446 , H01J2237/2594 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a method and device where highly accurate sample surface inspection can be carried out. SOLUTION: In the method to inspect a sample surface, an electron beam type sample surface inspecting device is used. In the method to inspect the sample surface by emitting electron beams generated from an electron gun of the sample surface inspecting device to the sample surface and by focusing secondary electrons generated from the sample surface toward an electron-detecting face of a detector, a focusing condition of the secondary electrons on the detecting face of the detector is controlled so that potential of the sample surface varies according to the amount of the electron beams emitted on the sample surface. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供可以进行高精度的样品表面检查的方法和装置。
解决方案：在检查样品表面的方法中，使用电子束型样品表面检查装置。在通过将从样品表面检查装置的电子枪产生的电子束发射到样品表面并通过将从样品表面产生的二次电子聚焦到检测器的电子检测面的方法来检查样品表面，聚焦条件控制检测器的检测面上的二次电子，使得样品表面的电位根据在样品表面上发射的电子束的量而变化。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2010123929A Extreme ultraviolet light source apparatus 审中-公开
标题翻译：极光超光源光源装置
公开(公告)号：JP2010123929A
公开(公告)日：2010-06-03
申请号：JP2009242869
申请日：2009-10-21
申请人： Ebara Corp , Gigaphoton Inc , Topcon Corp , ギガフォトン株式会社 , 株式会社トプコン , 株式会社荏原製作所
发明人： NAGAI SHINJI , ISHIHARA TAKANOBU , KAKIZAKI KOJI , SOFUGAWA TAKUJI , MURAKAMI TAKESHI , INOUE MASAHIRO
IPC分类号： H01L21/027
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source apparatus that can collect debris influencing an optical element etc., in a chamber with simple constitution and obtain an EUV optical output having desired intensity.
SOLUTION: The extreme ultraviolet light source apparatus comprises: target supply units (a molten Sn tank 5 and a nozzle 6) supplying droplets 7 as a target into a vacuum chamber 1; an EUV light collector mirror Lb outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light Lb emitted from the droplets 7 being ionized as a plasma by irradiation with CO2 laser light La at a plasma luminescence point P1 in the vacuum chamber 1; and an ion debris removal unit 10 at least a portion of which is located in an obscuration region E including the plasma luminescence point P1.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在具有简单结构的室中收集影响光学元件等的碎片的极紫外光源装置，并获得具有期望强度的EUV光输出。解决方案：极紫外光源装置包括：向真空室1供给作为目标的液滴7的目标供给单元（熔融Sn罐5和喷嘴6）通过在真空室1中的等离子体发光点P1处通过用CO 2激光La照射，通过反射从液滴7发射的远紫外光Lb作为等离子体离子化而输出极紫外光的EUV聚光镜Lb; 以及离子碎片去除单元10，其至少一部分位于包括等离子体发光点P1的遮蔽区域E中。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009235922A Turbo vacuum pump 有权
标题翻译：涡轮真空泵
公开(公告)号：JP2009235922A
公开(公告)日：2009-10-15
申请号：JP2008079535
申请日：2008-03-26
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , SOFUGAWA TAKUJI
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo vacuum pump capable of compressing gas from high vacuum to the atmospheric pressure, keeping a rotor rotating at high speed with high accuracy, and being inexpensively manufactured. SOLUTION: The turbo vacuum pump is equipped with a rotation shaft 1 extending over approximately the whole length of the pump, a discharge part 10 formed by alternately arranging rotor blades and stator blades in a casing 2, and a bearing motor part 50 having a motor 51 which gives rotation driving force to the rotation shaft 1 and bearings 53, 54, 55 for rotatably supporting the rotation shaft 1. In the turbo vacuum pump, a gas bearing 40 is used as a bearing which supports the rotation shaft 1 in a thrust direction. Spiral grooves 45 are formed on both surfaces of a stationary side section 41 of the gas bearing. The stationary side section 41 formed with the spiral grooves 45 is sandwiched between an upper rotating side section 42 fixed to the rotation shaft 1 and a lower rotating side section 43. A spacer 46 is provided between the lower rotating side section 43 and an end face 1e of the rotation shaft 1. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够将气体从高真空压缩至大气压力的涡轮真空泵，保持转子高速高精度地转动，并且成本低廉。解决方案：涡轮真空泵配备有在泵的整个长度上延伸的旋转轴1，通过在壳体2中交替地设置转子叶片和定子叶片而形成的排出部分10，以及轴承马达部分50 具有向旋转轴1提供旋转驱动力的马达51和用于可旋转地支撑旋转轴1的轴承53,54,55。在涡轮真空泵中，气体轴承40用作支撑旋转轴1的轴承在推力方向。螺旋槽45形成在气体轴承的静止侧部41的两个表面上。形成有螺旋槽45的固定侧部41夹在固定在旋转轴1上的上部旋转侧部42和下部旋转侧部43之间。在下部旋转侧部43和端面 1E的旋转轴1.版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2007048754A Inspection device with charged particle beam and device manufacturing method using inspection device 有权
标题翻译：具有充电颗粒光束的检查装置和使用检查装置的装置制造方法
公开(公告)号：JP2007048754A
公开(公告)日：2007-02-22
申请号：JP2006232088
申请日：2006-08-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKASUJI MAMORU , NOMICHI SHINJI , SATAKE TORU , KANEUMA TOSHIFUMI , SOFUGAWA TAKUJI , YOSHIKAWA SEIJI , KARIMATA TSUTOMU , OWADA SHIN , NISHIFUJI MUTSUMI , HAMASHIMA MUNEKI , TAKAGI TORU
IPC分类号： H01J37/28 , G01N23/225 , H01J37/147 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a flaw inspection method equipped with an enhanced throughput capable of precluding a crosstalk between a plurality of electron beams and leading the discharged secondary electrons efficiently to a detector. SOLUTION: The apparent angle on a specimen surface 1010 viewed from an objective lens is determined from the aperture angle and the magnification at the image surface 1005 of secondary electrons, and the receiving angle at the specimen surface is determined from the obtained apparent angle, the initial energy of the secondary electrons and the beam potential of the objective lens, followed by determining the yield of the secondary electrons on the basis of the obtained receiving angle, and on the basis of the resolution decided by the aperture angle, the spacing of irradiation with adjoining primary electron beams is separated to a distance or more which does not present a problem of crosstalk. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有能够排除多个电子束之间的串扰并且将放电的二次电子有效地引导到检测器的增强的吞吐量的缺陷检查方法。解决方案：从物镜观察的样品表面1010上的视角根据二次电子的图像表面1005的孔径角和倍率确定，并且从获得的表观上确定样品表面处的接收角度角度，二次电子的初始能量和物镜的光束电位，然后基于获得的接收角确定二次电子的产量，并且基于由孔径角决定的分辨率，相邻的一次电子束的照射间隔被分离到一定距离以上，这不会产生串扰的问题。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2005235777A Inspection apparatus and method by electron beam, and device manufacturing method using the inspection apparatus 审中-公开
标题翻译：电子束的检查装置和方法以及使用检查装置的装置制造方法
公开(公告)号：JP2005235777A
公开(公告)日：2005-09-02
申请号：JP2005061093
申请日：2005-03-04
申请人： Ebara Corp , Toshiba Corp , 株式会社東芝 , 株式会社荏原製作所
发明人： YAMAZAKI YUICHIRO , WATANABE KENJI , SOFUGAWA TAKUJI , NOMICHI SHINJI , SATAKE TORU , YOSHIKAWA SEIJI , KARIMATA TSUTOMU , NAKASUJI MAMORU , HATAKEYAMA MASAKI , MURAKAMI TAKESHI , NAGAHAMA ICHIROTA , NAGAI TAKAMITSU , SUGIHARA KAZUYOSHI
IPC分类号： H01L21/66 , H01J37/29
摘要： PROBLEM TO BE SOLVED: To improve an inspection speed detecting a failure of a sample of a wafer, etc. SOLUTION: An inspection apparatus by an electron beam is one of a mapping projection type and comprises: a primary electron optical system for forming the electron beam emitted from en electron gun into a rectangle and irradiating onto a face of a sample to be inspected; a secondary electron optical system for converging secondary electrons emitted from the sample; a detection device for converting the converged secondary electrons into an optical image through a fluorescent plate to image them to a line sensor; and a control device for controlling charge moving time to transfer the line image which is imaged in a pixel string provided with the line sensor, cooperatively with the moving speed of a stage to move the sample. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提高检测晶片样品故障等的检查速度。解决方案：电子束检查装置是映射投影型之一，包括：一次电子用于将从电子枪发射的电子束形成矩形并照射到要检查的样品的面上的光学系统; 用于会聚从样品发射的二次电子的二次电子光学系统; 检测装置，用于通过荧光板将会聚的二次电子转换为光学图像，以将其成像到线传感器; 以及控制装置，用于控制电荷移动时间，以便与用于移动样本的载物台的移动速度协调地传送被成像在设置有线传感器的像素串中的线图像。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2004363085A Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus 审中-公开
公开(公告)号：JP2004363085A
公开(公告)日：2004-12-24
申请号：JP2004031749
申请日：2004-02-09
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NOMICHI SHINJI , SATAKE TORU , SOFUGAWA TAKUJI , KANEUMA TOSHIFUMI , HATAKEYAMA MASAKI , YOSHIKAWA SEIJI , MURAKAMI TAKESHI , WATANABE KENJI , KARIMATA TSUTOMU , SUEMATSU KENICHI , TANABE YUTAKA , TAJIMA RYO , TOYAMA KEIICHI
IPC分类号： G01B15/00 , G01N23/20 , G01N23/225 , H01J37/05 , H01J37/06 , H01J37/09 , H01J37/12 , H01J37/147 , H01J37/153 , H01J37/16 , H01J37/18 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28 , H01J37/29 , H01L21/66
CPC分类号： G01N23/225 , H01J37/05 , H01J37/28 , H01J2237/2441 , H01J2237/2446 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a system for further increasing an inspection speed of an inspection apparatus in an SEM system, namely for increasing throughput. SOLUTION: The inspection apparatus for inspecting the surface of a substrate creates a crossover from electrons generated from an electron source 25-1, then, an image is formed with a desired magnification in the direction of a sample W, and the crossover is created. When the crossover is passed, an electron that becomes noise is removed from the crossover by an aperture, the crossover is set to have a desired magnification, an adjustment is made so that the crossover becomes a parallel electron beam, and a substrate is irradiated with light in a desired sectional shape. Electron rays are created so that irregularities in illumination in the electron rays is 10% or less. Electrons discharged from the sample W are detected by a detector 25-11. COPYRIGHT: (C)2005,JPO&NCIPI

10. 发明专利

JP2003123679A ELECTRON BEAM EQUIPMENT AND DEVICE-MANUFACTURING METHOD USING SAME ELECTRON BEAM EQUIPMENT 审中-公开
公开(公告)号：JP2003123679A
公开(公告)日：2003-04-25
申请号：JP2001316608
申请日：2001-10-15
申请人： EBARA CORP
发明人： HAMASHIMA MUNEKI , NAKASUJI MAMORU , NOMICHI SHINJI , SATAKE TORU , SOFUGAWA TAKUJI
IPC分类号： H01L21/66 , H01J37/12
摘要： PROBLEM TO BE SOLVED: To provide an electron beam equipment which prevents dielectric breakdown between electrodes of an electron optics system, especially that in multiple beams, and a device manufacturing method using the electron beam equipment. SOLUTION: At least one of the lens electrodes inside a primary or a secondary optical system is coated with metal with work function of not less than 4.5 eV. Metal with which the lens electrodes inside the first or the second optical system are coated are to be platinum, iridium, ruthenium, rhenium, osmium, or an alloy with platinum as a main material.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式